Solid element device and method for manufacturing thereof

ABSTRACT

A method for manufacturing a solid element device, which comprises providing a glass-containing Al 2 O 3  substrate ( 3 ) having a GaN based LED element ( 2 ) placed thereon, setting a P 2 O 5 —ZnO based low melting point glass in parallel with the substrate, and carrying out a press working at a temperature of 415° C. or higher under a pressure of 60 kgf in a nitrogen atmosphere. Under these conditions, the low melting point glass has a viscosity of 10 9  poise, and is adhered via an oxide formed on the surface of the glass-containing Al 2 O 3  substrate ( 3 ). A solid element device manufactured by the above method can be manufactured through a glass sealing working at a low temperature and also has a highly reliable sealing structure.

This application is based on Japanese Patent Application Nos.2003-063015, 2003-160855, 2003-160867, 2003-193182, 2003-342705,2003-342706, and 2004-010385, the entire disclosures of which areincorporated herein by reference.

TECHNICAL FIELD

The invention relates to a solid element device (or solid-state device)comprising an optical element sealed with a glass material, andparticularly to a solid element device using a low melting glassmaterial as a glass material.

BACKGROUND ART

Solid element devices comprising a solid element, such as a lightemitting diode, sealed with a light transparent resin material such asan epoxy resin have hitherto been known. In such solid element devices,it is known that, upon exposure to high intensity light, the lighttransparent resin causes deterioration such as yellowing. In particular,when a group III nitride-based compound semiconductor light emittingelement which emits short-wavelength light is used, the lighttransparent resin near the element is yellowed by high energy lightgenerated from the element and the heat generated from the element perse and, consequently, the light takeout efficiency is often lowered toan extent that is not negligible.

In order to prevent the deterioration of the sealing member, aluminescent device using a low melting glass as a sealing member hasbeen proposed in Japanese Patent Laid-Open Nos. 1996-102553 and1999-177129.

In the luminescent device described in Japanese Patent Laid-Open No.1996-102553, an LED element, a wire bonding part, and the periphery ofthe upper end of a lead part are covered with a sealing body 7 made of atransparent low melting glass. The low melting glass used is that, forexample, selenium, thallium, arsenic, or sulfur has been added to bringthe melting point to about 130 to 350° C. In this case, preferably, thelow melting glass has a melting point of 200° C. or below (morepreferably 150° C. or below).

According to the luminescent device described in Japanese PatentLaid-Open No. 1996-102553, a problem of a change in color of the sealingbody to yellow with the elapse of time due to poor or weak resistance toultraviolet light possessed by the epoxy resin and the like can beavoided.

On the other hand, the luminescent device described in Japanese PatentLaid-Open No. 1999-177129 uses, as a sealing body covering the LED lightemitting element, a low melting glass having a refractive index of about2 which is close to the refractive index of a GaN-based LED lightemitting element, about 2.3.

According to the luminescent device described in Japanese PatentLaid-Open No. 1999-177129, sealing of the LED light emitting elementwith the low melting glass having a refractive index close to theGaN-based LED light emitting element can reduce the quantity of light,which is totally reflected from the surface of the LED light emittingelement and is returned to the inside, and can increase the quantity oflight, which is emitted from the LED light emitting element and entersthe low melting glass. As a result, the emission efficiency of thechip-type LED and the like according to the invention of the applicationis higher than the conventional device in which the LED light emittingelement has been sealed with the epoxy resin.

According to the solid element devices using the conventional lowmelting glass as the sealing member, although the glass is low meltingglass, high temperature fabrication should be carried out, and, due tothe hard material, in fact, disadvantageously, any sample device cannotbe provided by the continuation of the resin sealing.

Accordingly, an object of the invention is to extract and solve problemsinvolved in the realization of inorganic material sealing and to providea solid element device, which can actually offer expected effects byglass sealing, and a method for manufacturing the same.

DISCLOSURE OF THE INVENTION

In order to attain the above object, the invention provides a solidelement device that comprises: a solid element being flip-chip mounted;an electric power receiving and supplying part for receiving electricpower from and supplying the electric power to said solid element; andan inorganic sealing material for sealing said solid element.

Further, in order to attain the above object, the invention provides asolid element device that comprises: a solid element: an electric powerreceiving and supplying part for receiving electric power from andsupplying the electric power to said solid element; a heat resistantmember for covering an electrical connection part and a part of saidelectric power receiving and supplying part in said solid element; andan inorganic sealing material for sealing said solid element includingsaid heat resistant member.

In order to attain the above object, the invention provides a solidelement device that comprises: a solid element; an electric powerreceiving and supplying part for receiving electric power from andsupplying the electric power to said solid element; and a glass sealingpart for sealing said solid element, said glass sealing part comprisinga low melting glass selected from SiO₂—Nb₂O₅-based, B₂O₃—F-based,P₂O₅—F-based, P₂O₅—ZnO-based, SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-basedlow melting glasses.

Furthermore, in order to attain the above object, the invention providesa solid element device that comprises: a solid element; a lead part madeof a metal for receiving electric power from and supplying the electricpower to said solid element; and an inorganic sealing material forsealing said solid element.

Furthermore, in order to attain the above object, the invention providesa solid element device that comprises: a solid element; an electricpower receiving and supplying part comprising an inorganic materialsubstrate for receiving electric power from and supplying the electricpower to said solid element; and an inorganic sealing material forsealing said solid element and a part of said electric power receivingand supplying part, said inorganic sealing material having a coefficientof thermal expansion equivalent to said inorganic material substrate.

Furthermore, in order to attain the above object, the invention providesa method of making a solid element device that comprises: a mountingstep of mounting a solid element on an electric power receiving andsupplying part; and a sealing step of pressing an inorganic sealingmaterial for said solid element in an oxygen barrier atmosphere at atemperature at or above the deformation point of said inorganic sealingmaterial to perform sealing.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a luminescent device in a first embodiment of the invention,wherein (a) is a longitudinal sectional view of the luminescent deviceand (b) a side view of a GaN-based LED element as a light source;

FIG. 2 is a first variant of the luminescent device in a firstembodiment, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of a GaN-based LED element as alight source;

FIG. 3 is a longitudinal sectional view of a luminescent device usinganother underfilling as a third variant;

FIG. 4 is a longitudinal sectional view of a luminescent device providedwith a mold part made of a resin material as a fourth variant;

FIG. 5 is a longitudinal sectional view of a luminescent device in asecond embodiment;

FIG. 6 is a longitudinal sectional view of a luminescent device in athird embodiment of the invention;

FIG. 7 is a longitudinal sectional view of a variant of the luminescentdevice in the third embodiment;

FIG. 8 is a longitudinal sectional view of a luminescent device in afourth embodiment;

FIG. 9 is a longitudinal sectional view of a first variant of aluminescent device in a fourth embodiment;

FIG. 10 is a longitudinal sectional view of a second variant of theluminescent device in the fourth embodiment;

FIG. 11 is a diagram showing a luminescent device in a fifth embodiment,wherein (a) is a plan view of the luminescent device, (b) a side view ofthe luminescent device, and (c) a bottom view of the luminescent device;

FIG. 12 is a longitudinal sectional view of a first variant of theluminescent device in the fifth embodiment;

FIG. 13 is a longitudinal sectional view of a second variant of theluminescent device in the fifth embodiment;

FIG. 14 is a cross-sectional view of a luminescent device in a sixthembodiment;

FIG. 15 is a diagram showing a first variant of the luminescent devicein the sixth embodiment, wherein (a) is a longitudinal sectional view ofthe luminescent device and (b) a side view of a GaN-based LED element asa light source;

FIG. 16 is a diagram showing a second variant of the luminescent devicein the sixth embodiment, wherein (a) is a longitudinal sectional view ofthe luminescent device and (b) a side view of a GaN-based LED element asa light source;

FIG. 17 is a diagram showing a luminescent device in a seventhembodiment, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of a GaN-based LED element as alight source;

FIG. 18 is a longitudinal sectional view of a first variant of theluminescent device in the seventh embodiment;

FIG. 19 is a diagram showing a luminescent device in an eighthembodiment, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of a GaN-based LED element as alight source;

FIG. 20 is a longitudinal sectional view of a variant of the luminescentdevice in the eighth embodiment;

FIGS. 21(a) to (e) are a diagram showing a formation process for theformation of a circuit pattern with an Au layer on an AlN substrate;

FIG. 22 is a longitudinal sectional view of a luminescent device in aninth embodiment;

FIG. 23 is a diagram illustrating the state of glass sealing of a leadframe based on hot pressing;

FIG. 24 is a diagram illustrating the state of a GaN-based LED element 2loaded on a Si submount which functions as a Zener diode;

FIG. 25 is a diagram showing a luminescent device in a tenth embodiment,wherein (a) is a plan view, (b) a cross-sectional view taken on line A-Aof (a), and (c) a perspective view of lower glass;

FIG. 26 is a cross-sectional view of a first variant of the luminescentdevice in the tenth embodiment;

FIG. 27 is a cross-sectional view of a second variant of the luminescentdevice in the tenth embodiment;

FIG. 28 is a diagram showing a luminescent device in an eleventhembodiment, wherein (a) is a side view and (b) a perspective viewillustrating glass sealing;

FIG. 29 is a longitudinal sectional view of a luminescent device in atwelfth embodiment;

FIG. 30 is a cross-sectional view showing the construction of a faceup-type light emitting element used in a working example of theinvention;

FIG. 31 is a perspective view showing an assembly of a light emittingelement and a lead;

FIG. 32 is a cross-sectional view showing a method for manufacturing anoptical device;

FIG. 33 is a cross-sectional view of an optical device in a workingexample;

FIG. 34 is a cross-sectional view of an optical device in anotherworking example;

FIG. 35 is a cross-sectional view of an optical device in still anotherworking example;

FIG. 36 is a cross-sectional view of an optical device in a furtherworking example;

FIG. 37 is a perspective view illustrating a method for manufacturing anoptical device;

FIG. 38 is a cross-sectional view of an optical device in anotherworking example;

FIG. 39 is a cross-sectional view of an optical device in still anotherworking example;

FIG. 40 is a cross-sectional view illustrating a method formanufacturing an optical device;

FIG. 41 is a cross-sectional view showing the construction of a flipchip-type light emitting element;

FIG. 42 is a cross-sectional view showing an example of an opticaldevice using a light emitting element;

FIG. 43 is a cross-sectional view of an optical device in anotherworking example;

FIG. 44 is a cross-sectional view of an optical device in still anotherworking example;

FIG. 45 is a cross-sectional view of an optical device in a furtherworking example;

FIG. 46 is a cross-sectional view of an optical device in anotherworking example;

FIG. 47 is a plan view showing another embodiment of an assembly of aflip chip-type light emitting element and electric power receiving andsupplying means;

FIG. 48 is a cross-sectional view of an example of an optical devicecomprising an assembly;

FIG. 49 is a cross-sectional view of an optical device in anotherworking example;

FIG. 50 is a cross-sectional view of an optical device in still anotherworking example;

FIG. 51 is a cross-sectional view of an optical device in a furtherworking example;

FIG. 52 is a cross-sectional view of an optical device in anotherworking example;

FIG. 53 is a cross-sectional view of an optical device in still anotherworking example;

FIG. 54 is a cross-sectional view of an optical device in a furtherworking example;

FIG. 55 is a plan view of an optical device in another working example;

FIG. 56 is a cross-sectional view showing a structure of an opticalelement;

FIG. 57 is a diagram illustrating a method for manufacturing an opticaldevice in Example 10;

FIG. 58 is a diagram illustrating the state of mounting of an opticalelement on a substrate;

FIG. 59 is a diagram showing the construction of an optical device inExample 10;

FIG. 60 is a plan view showing the construction of an optical device inanother working example;

FIG. 61 is a cross-sectional view taken on line B-B of FIG. 60;

FIG. 62 is a cross-sectional view taken on line C-C (arrow tipped) ofFIG. 61;

FIG. 63 is a bottom view;

FIG. 64 is a plan view of an optical device in another working example;

FIG. 65 is a cross-sectional view showing a structure of an opticalelement in a working example;

FIG. 66 is a plan view of an optical device in Example 12;

FIG. 67 is a cross-sectional view taken on line III-III of FIG. 66;

FIG. 68 is an enlarged view of the principal part of FIG. 67;

FIG. 69 is a bottom view of an optical device in a working example;

FIG. 70 is a diagram showing the construction of an optical device inanother working example;

FIG. 71 is a diagram showing the construction of an optical device instill another working example;

FIG. 72 is a diagram showing the construction of an optical device inanother working example;

FIG. 73 is a diagram showing the construction of an optical device instill another working example;

FIG. 74 is a diagram showing the construction of an optical device in afurther working example;

FIG. 75 is a cross-sectional view showing the construction of a lightemitting element;

FIG. 76 is a diagram showing the construction of a luminescent device ina working example, wherein (A) is a cross-sectional view and (B),a planview;

FIG. 77 is a cross-sectional view showing the construction of aluminescent device in a working example provided with a sealing member;

FIG. 78 is a cross-sectional view showing the construction of aluminescent device in a working example provided with a sealing memberin another embodiment;

FIG. 79 is a cross-sectional view showing a lead frame in anotherembodiment;

FIG. 80 is a plan view showing a lead frame in still another embodiment;

FIG. 81 is a plan view showing a lead frame in a further embodiment;

FIG. 82 is a perspective view showing a lead frame in a still furtherembodiment;

FIG. 83 is a perspective view showing a lead frame in anotherembodiment;

FIG. 84 is a cross-sectional view showing the construction of aluminescent device in a thirteenth embodiment;

FIG. 85 is a cross-sectional view showing a variant of a luminescentdevice in the thirteenth embodiment;

FIG. 86 is a cross-sectional view showing a luminescent device in afourteenth embodiment;

FIG. 87 is a cross-sectional view showing the construction of aluminescent device in a fifteenth embodiment;

FIG. 88 is a cross-sectional view showing the construction of aluminescent device in a sixteenth embodiment;

FIG. 89 is a cross-sectional view showing the construction of aluminescent device in a seventeenth embodiment;

FIG. 90 is a cross-sectional view showing the construction of aluminescent device in an eighteenth embodiment;

FIG. 91 is a cross-sectional view showing the construction of aluminescent device in a nineteenth embodiment;

FIG. 92 is a plan view showing a bump formed face of an LED element of astandard size;

FIG. 93 is a plan view showing a bump formed face of an LED element of alarge size;

FIG. 94 is a cross-sectional view showing the construction of aluminescent device in a twentieth embodiment;

FIG. 95 is a plan view illustrating the state of mounting of a submounton a lead frame;

FIG. 96 is a diagram illustrating the state immediately before glasssealing using a mold;

FIG. 97 is a cross-sectional view showing a variant of a luminescentdevice in the twentieth embodiment;

FIG. 98 is a cross-sectional view showing a face up-type luminescentdevice in a twenty-first embodiment of the invention;

FIG. 99 is a diagram showing a flip chip-type luminescent device in atwenty-second embodiment, wherein (a) is a cross-sectional view and (b)a side view as viewed from the right side face of (a); and

FIG. 100 is a diagram showing a face up-type luminescent device in atwenty-third embodiment, wherein (a) is a cross-sectional view and (b) aside view as viewed from the right side face of (a).

BEST MODE FOR CARRYING OUT THE INVENTION

The solid element device according to the invention will be explained indetail in conjunction with drawings and the like.

FIG. 1 shows a luminescent device in the first embodiment of theinvention, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of a GaN-based LED element as alight source. As shown in FIG. 1(a), this luminescent device 1 includesa flip chip-type GaN-based LED element 2, a glass-containing Al₂O₃substrate 3 with a GaN-based LED element 2 mounted thereon, a circuitpattern 4, which is made of tungsten (W)-nickel (Ni)-gold (Au) and isformed on the glass-containing Al₂O₃ substrate 3, an Au stud bump 5 forelectrically connecting the GaN-based LED element 2 to the circuitpattern 4, and a P₂O₅—ZnO-based glass sealing part 6 which seals theGaN-based LED element 2 and is bonded to the glass-containing Al₂O₃substrate 3.

As shown in FIG. 1(b), the GaN-based LED element 2 is formed bysuccessive crystal growth of a buffer layer 21, an n-type layer 22, alayer 23 including a light emitting layer, and a p-type layer 24 on thesurface of a sapphire (Al₂O₃) substrate 20. The GaN-based LED element 2includes a p-electrode 25 provided on the surface of the p-type layer 24and an n-electrode 26 on the n-type layer 22 exposed by removing,through etching, a part from the p-type layer 24 to a part of the n-typelayer 22. In this GaN-based LED element 2, epitaxial growth is carriedout at 700° C. or above, and the heat resistant temperature is 600° C.or above. Therefore, the GaN-based LED element 2 is stable against thetemperature at which sealing is carried out using low melting glasswhich is described later.

The p-electrode 25 also functions as a lower reflector that reflectslight emitted from the layer 23 including a light emitting layer towardthe substrate 20. The size is 0.34 mm 0.34 mm×0.09 mm in thickness.

The glass-containing Al₂O₃ substrate 3 has a coefficient of thermalexpansion of 12.3×10⁻⁶/° C. and has via holes 3A. The via holes 3Afunction to conduct the circuit pattern 4 made of W formed bymetallization of the surface and backside of the substrate.

The glass sealing part 6 is made of P₂O₅—ZnO-based low melting glass(coefficient of thermal expansion: 11.4×10⁻⁶/° C., yield point: 415° C.,refractive index: 1.59, internal transmittance: 99% (470 nm)) and is ina rectangular form which has an upper face 6A and a side face 6B formedbased on bonding of the glass sealing part to the glass-containing Al₂O₃substrate 3 by hot pressing in a mold followed by dicer cutting.

The low melting glass is processed at an incomparably higher viscositythan a viscosity level which is generally regarded as a high viscosityin resins. Further, in the case of glass, even when the temperatureexceeds the yield point by several tens of degrees, the viscosity is notlowered to the level of the general resin sealing. When the viscosity ona conventional resin molding level is contemplated, a temperature abovethe crystal growth temperature of the LED element is required, ordeposition on the mold occurs. This renders sealing and moldingdifficult. For this reason, processing at 10⁶ poises or more ispreferred.

The method for manufacturing this luminescent device 1 will beexplained.

At the outset, a glass-containing Al₂O₃ substrate 3 having via holes 3Ais provided. A W paste is screen printed on the surface of theglass-containing Al₂O₃ substrate 3 according to the circuit pattern.Next, the W paste printed glass-containing Al₂O₃ substrate 3 is heattreated at a temperature above 1000° C. to bake W to the substrate 3.Further, Ni plating and Au plating are provided on W to form the circuitpattern 4. Next, the GaN-based LED element 2 is electrically connectedto the circuit pattern 4 (surface side) in the glass-containing Al₂O₃substrate 3 through Au stud bumps 5. Next, a P₂O₅—ZnO-based low meltingglass sheet is set parallel to the glass-containing Al₂O₃ substrate 3with the GaN-based LED element 2 mounted thereon, and, in a nitrogenatmosphere, the pressure is brought to 60 kgf followed by hot pressingat a temperature of 465° C. The viscosity of the low melting glass underthe above conditions is 10⁸ to 10⁹ poises, and the low melting glass isbonded to the glass-containing Al₂O₃ substrate 3 through an oxidecontained therein. The glass-containing Al₂O₃ substrate 3 integratedwith the low melting glass is then set in a dicer for dicing to isolatethe rectangular luminescent device 1.

The following effects can be attained by the first embodiment.

-   (1) Processing at a temperature satisfactorily below the crystal    growth temperature can be realized by using low melting glass and    hot pressing in a highly viscous state.-   (2) High sealing strength can be provided by bonding the    glass-containing Al₂O₃ substrate 3 to the glass sealing part 6 by a    chemical bond through an oxide. Therefore, even a small package    having a small bonding area can be realized.-   (3) The coefficient of thermal expansion of the sealing glass is    similar to the coefficient of thermal expansion of the    glass-containing Al₂O₃ substrate. Therefore, bringing the    temperature to room temperature or low temperature after bonding at    a high temperature, a bonding failure such as separation or cracking    is less likely to occur. Further, glass is not cracked upon exposure    to tensile stress, and cracking is less likely to occur upon    exposure to compressive stress. The coefficient of thermal expansion    of the sealing glass is somewhat lower than that of the    glass-containing Al₂O₃ substrate. According to an experiment    conducted by the present inventor, neither separation nor cracking    occurs in a 1000-cycle liquid phase thermal shock test of −40°    C.⇄100° C. Further, the present inventor has conducted a basic    confirmation experiment of bonding a glass piece having a size of 5    mm×5 mm to a ceramic substrate. As a result, in a combination of    various coefficients of thermal expansion for both glass and ceramic    substrates, when the thermal expansion coefficient ratio of the    member having a lower coefficient of thermal expansion to the member    having a higher coefficient of thermal expansion is not less than    0.85, crack-free bonding could be realized. The similar coefficient    of thermal expansion means a thermal expansion coefficient    difference in the above range, although this depends upon the    rigidity and size of the member, or the stress absorbing layer in    the eighth embodiment and the like.-   (4) Flip chip bonding can eliminate the need to use any wire.    Therefore, any trouble does not occur in electrodes even in the case    of processing in a highly viscose state. The low melting glass    during sealing is hard and has a viscosity of 10⁸ to 10⁹ poises. On    the other hand, the epoxy resin before heat curing is liquid and has    a viscosity of about 5 poises. Thus, they are greatly different from    each other in physical properties. Accordingly, unlike sealing of    the face up-type LED element in which the electrode on the element    surface is electrically connected to an electric power supplying    member such as a lead through a wire, it is possible to prevent such    an unfavorable phenomenon that the wire is collapsed or deformed    during glass sealing. Further, unlike sealing of the flip chip-type    LED element in which the electrode on the surface of the element is    subjected to flip chip bonding to an electric power supplying member    such as a lead through a bump such as gold (Au), it is possible to    prevent such an unfavorable phenomenon that, upon application of    pressure to the LED element in its electric power supplying member    direction based on the viscosity of the glass, collapse of the bump    or short-circuiting between bumps occurs.-   (5) When the low melting glass and the glass-containing Al₂O₃    substrate 3 are set parallel to each other followed by hot pressing    in a highly viscose state, the low melting glass is parallely moved    on and brought to intimate contact with the surface of the    glass-containing Al₂O₃ substrate to seal the GaN-based LED element    2. Therefore, no void occurs.-   (6) The circuit pattern 4 for wiring of the glass-containing Al₂O₃    substrate 3 is drawn to the backside through the via holes 3A.    Therefore, a plurality of luminescent devises 1 can easily be    mass-produced based on dicer cutting by simply subjecting a    plurality of devices to sealing at a time with a low melting glass    sheet without the need to take any special measure for preventing    unfavorable phenomena such as the entry of glass into unnecessary    places and covering electric terminals with the glass. The low    melting glass is processed in a highly viscose state. Therefore,    unlike the case of resin, there is no need to take a sufficient    measure, and drawing of an external terminal to the backside    suffices for coping with mass production without relying upon via    holes.-   (7) Flip chip mounting of the GaN-based LED element 2 can overcome    problems involved in the realization of glass sealing and, at the    same time, has the effect of realizing a micro-luminescent device 1    having a size of 0.5 mm square. These effects can be attained by    virtue of unnecessary wire bonding space, the selection of the    member for the glass sealing part 6 and the member for the    glass-containing Al₂O₃ substrate 3 which are equal to each other in    coefficient of thermal expansion and strong bonding based on a    chemical bond which can prevent interfacial peeling even in the case    of bonding in a small space.

FIG. 2 shows a first variant of a luminescent device in the firstembodiment, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of the GaN-based LED element as alight source. In the following explanation, common constituent parts areidentified with the same reference numerals.

This luminescent device 1 is different from the first embodiment in thata face up-type GaN-based LED element 2 is connected to a circuit pattern4 by flip chip boding and, in addition, a white underfilling 7 isprovided for protecting the GaN-based LED element 2 in its electrode andthe Au stud bump 5.

The underfilling 7 may be composed of a filling material with a goodlight reflectivity such as boron nitride (BN) and is provided bypreviously potting the material in a glass-containing Al₂O₃ substrate 3before bonding of the GaN-based LED element 2 and conducting flip chipbonding of the GaN-based LED element 2 onto the underfilling.

As shown in FIG. 2(b), the GaN-based LED element 2 includes a lighttransparent electrode 27 such as ITO (indium tin oxide) provided on asurface of a p-type layer 24, and a p-electrode 25 provided on a surfaceof the light transparent electrode 27.

In the first variant, even in the case of the face up-type GaN-based LEDelement 2, light reflected and diffused by the underfilling 7 isradiated from the substrate 20 of the GaN-based LED element 2,contributing to improved light takeout efficiency. In the secondembodiment, the white underfilling 7 is selected for enhancing the lighttakeout efficiency. When the light takeout efficiency is immaterial,underfilling 7 having a color other than the white color may be used.

In the second variant, the surface of the glass sealing part 6 may betreated for improving the moisture resistance, resistance to acids andalkalis. In this case, surface treatment with MgF₂, SiO₂, or SiN iseffective. Treatment for reducing interfacial reflection may also becarried out, for example, by antireflective multilayered film or thelike. In this case, multilayered coating of TiO₂+SiO₂ is effective.

FIG. 3 is a longitudinal sectional view of another luminescent deviceusing underfilling as a third variant. In the luminescent device 1 inthe third variant, diamond which is highly thermally conductive is usedas the underfilling 7 for protecting the electrode of the GaN-based LEDelement 2 and the Au stud bumps 5. Other examples of highly thermallyconductive underfilling 7 include BN, aluminum nitride (AlN), andsilicon carbide (SiC). They are used as a filling material with anaverage particle diameter of a few microns to be mixed into a heatresistant ceramic coating material.

FIG. 4 is a longitudinal sectional view of a luminescent device providedwith a mold part made of a resin material as a fourth variant. In thisluminescent device 1, the luminescent device 1 explained in the firstembodiment is bonded to a lead frame 8, and, further, a mold part 9 thewhole of which is made of an epoxy resin is provided.

The mold part 9 is provided with a semispherical optical shape face 9Aformed by transfer molding.

According to this construction, an optical system can be easily formedin a glass sealing-type device, and, at the same time, the moistureresistance is further improved by surrounding the glass-containing Al₂O₃substrate 3 and the glass sealing part 6 by the mold part 9. The moldpart 9 may be made of a resin material other than the epoxy resin, forexample, silicone resin. A molding technique other than the transfermolding, for example, potting molding may also be applied. The mold partmay also be formed by an injection method using a resin material such asan acrylic resin or polycarbonate, and, in this case, the productivitycan be improved.

Further, a phosphor may be incorporated in the mold part 9. The phosphormay be, for example, a YAG phosphor, a silicate phosphor, or a mixtureof the YAG phosphor and the silicate phosphor at a predetermined ratio.

FIG. 5 is a longitudinal sectional view of a luminescent device in thesecond embodiment. This luminescent device 1 is different from thedevice in the first embodiment in that an SiO₂—Nb₂O₅-based glass sealingpart 6 is provided instead of the glass material used in the luminescentdevice 1 in the first embodiment, and an Ag-based circuit pattern 4 isprovided in the glass-containing Al₂O₃ substrate 3.

The SiO₂—Nb₂O₅-based glass sealing part 6 is made of SiO₂—Nb₂O₅-basedlow melting glass (coefficient of thermal expansion: 12.1×10⁻⁶/° C.,yield point: 507° C., refractive index: 1.69, internal transmittance:98% (470 nm)), and is molded into a rectangular form which has an upperface 6A and a side face 6B formed based on bonding of the glass sealingpart to the glass-containing Al₂O₃ substrate 3 by hot pressing in a moldfollowed by dicer cutting.

The glass-containing Al₂O₃ substrate 3 has a coefficient of thermalexpansion: 12.3×10⁻⁶/° C. and has via holes 3A. These via holes 3A areprovided for continuity of an Ag circuit pattern 4 by electroplating onthe surface and backside of the substrate.

In the second embodiment, the use of the SiO₂—Nb₂O₅-based low meltingglass can reduce moisture permeability and can improve light takeoutefficiency. Further, when the low melting glass having small moisturepermeability is used, Ag, a highly reflective material, can be used evenin the case where voltage is applied as in a circuit pattern inconducting flip chip mounting of a GaN-based LED element 2 or the like,and resin sealing is difficult due to a fear of migration as in the caseof pattern spacing of a few tens of microns.

FIG. 6 is a longitudinal sectional view of a luminescent device in thethird embodiment of the invention. This luminescent device 1 includes aface up-type GaN-based LED element 2, a glass-containing Al₂O₃ substrate3 with the GaN-based LED element 2 mounted thereon, a circuit pattern 4provided on the glass-containing Al₂O₃ substrate 3 made of W, an Au studbump 5 for electrically connecting the GaN-based LED element 2 to acircuit pattern 4, a wire 10 made of Au for electrically connecting theGaN-based LED element 2 in its electrode to the circuit pattern 4, aheat resistant inorganic material coating 11 for surrounding and coatingthe GaN-based LED element 2, the wire 10, and the circuit pattern 4, aninorganic white adhesive 12 for binding the GaN-based LED element 2 tothe circuit pattern 4, and a P₂O₅—ZnO-based glass sealing part 6 forsealing and bonding to the glass-containing Al₂O₃ substrate 3.

The heat resistant inorganic material coating 11 is a light transparentand porous SiO₂-based hard coating and functions to prevent deformationof the wire 10 in sealing of P₂O₅—ZnO-based glass.

The inorganic white adhesive 12 reflects light emitted from theGaN-based LED element 2 toward the substrate side and radiates the lightfrom the electrode formed face.

The method for manufacturing this luminescent device 1 will beexplained.

A glass-containing Al₂O₃ substrate 3 with via holes 3A is firstprovided. A W paste is screen printed on the surface of theglass-containing Al₂O₃ substrate 3 according to the circuit pattern.Next, the glass-containing Al₂O₃ substrate 3 with the W paste printedthereon is heat treated at 1500° C. to bake W to the substrate 3.Further, an Ni plating or an Au plating is provided on W to form acircuit pattern 4. Next, a GaN-based LED element 2 is bonded to thecircuit pattern 4 (surface, side) in the glass-containing Al₂O₃substrate 3 with the aid of an inorganic white adhesive 12. TheGaN-based LED element 2 in its p-electrode and n-electrode is thenelectrically connected to the circuit pattern 4 through a wire 10. ASiO₂-based coating material is then potted so as to surround theGaN-based LED element 2 and the wire 10. The assembly is then heattreated at 150° C. to form a porous heat resistant inorganic materialcoating 11. Next, a P₂O₅—ZnO-based low melting glass is set parallel tothe glass-containing Al₂O₃ substrate 3 with the GaN-based LED element 2mounted thereon, and the assembly is hot pressed under conditions ofpressure 60 kgf and temperature 415° C. or above. The glass-containingAl₂O₃ substrate 3 integrated with the low melting glass is then set in adicer followed by dicing to isolate rectangular luminescent devices 1.

In the third embodiment, a light transparent heat resistant inorganicmaterial coating 11 is provided on the wire 10. Therefore, glass sealingof the wire bonded GaN-based LED element 2 with the P₂O₅—ZnO-based lowmelting glass is possible in high yield and, thus, a glass sealing-typeluminescent device 1 can be realized.

The glass sealing can be realized without the provision of the heatresistant inorganic material coating 11. In this case, however,deformation of the wire 10 is unavoidable. Therefore, electricalshort-circuiting is likely to occur, and the yield is lowered. Further,the ball-shaped bonded part of the Au wire 10 is collapsed on theGaN-based LED element 2. Therefore, disadvantageously, electricalshort-circuiting is likely to occur, and, further, problems such ascovering of an Au film on the surface of the element, resulting ininhibition of takeout of light.

FIG. 7 is a longitudinal cross-sectional view showing a variant of theluminescent device in the third embodiment. This luminescent device 1 isdifferent from the device in the third embodiment in that anAlInGaP-based LED element 2 having an-electrode on its upper and lowerparts.

In the AlInGaP-based LED element 2, the upper electrode is electricallyconnected to the circuit pattern 4 through a wire 10, and the lowerelectrode is electrically connected to the circuit pattern 4 through anAg paste 13.

Thus, also in the LED element with an-electrode provided on its upperand lower surfaces, a glass sealing-type luminescent device 1 can berealized in a high yield by applying a heat resistant inorganic materialcoating 11 and conducting glass sealing with P₂O₅—ZnO-based low meltingglass.

FIG. 8 is a longitudinal sectional view showing a luminescent device inthe fourth embodiment. This luminescent device 1 is different from thedevice in the luminescent device 1 in the first embodiment in that theGaN-based LED element 2 has been formed based on scribing. The GaN-basedLED element 2 formed based on scribing has a sharp concave-convex on itsside face as the cut part, and, thus, the side face is covered by anelement coating material 14.

The element coating material 14 may be, for example, an SiO₂-basedcoating material. The SiO₂-based coating material is coated so as tocover the side face of the GaN-based LED element 2, and the coating isheat treated at 150° C. for curing.

In the fourth embodiment, the sharp concave-convex part formed in theGaN-based LED element 2 by scribing is likely to be a starting point ofcracking and is causative of void formation. Therefore, covering of theconcave-convex part with the element coating material 14 for smoothingcan prevent cracking. Further, void formation can also be prevented.

FIG. 9 is a longitudinal sectional view showing a first variant of theluminescent device in the fourth embodiment. This luminescent device 1is different from the device in the fourth embodiment in that theelement coating material 14 made of a SiO₂-based coating material isprovided so as to cover the whole periphery of the GaN-based LED element2.

The element coating material 14 has a coefficient of thermal expansionintermediate between the coefficient of thermal expansion of theGaN-based LED element 2 and the coefficient of thermal expansion of theP₂O₅—ZnO-based low melting glass. The above-defined coefficient ofthermal expansion of the element coating material 14 can preventcracking, for example, even when glass having a large coefficient ofthermal expansion is used or a large-size LED element is used.

In the first variant, cracking and void formation caused by the shape ofthe surface of the GaN-based LED element 2 can be suppressed, and,further, cracking derived from the difference in coefficient of thermalexpansion between the GaN-based LED element 2 and the low melting glasscan be prevented. When the efficiency of takeout of light emitted fromthe GaN-based LED element 2 is taken into consideration, the thicknessof the element coating material 14 is preferably as small as possible.

FIG. 10 is a longitudinal sectional view showing a second variant of theluminescent device in the fourth embodiment. This luminescent device 1is different from the device in the fourth embodiment in that aphosphor-containing phosphor layer 15 is provided so as to cover thewhole periphery of the GaN-based LED element 2.

The phosphor layer 15 comprises a YAG-based phosphor as a phosphor mixedin the element coating material 14 made of a SiO₂-based coating materialused in the first variant. A single type of phosphor or plural types ofphosphors may be mixed in the element coating material 14. Otherphosphors usable herein include silicate phosphors. Further, a mixtureof the YAG-based phosphor with the silicate phosphor may be contained inthe phosphor layer 15.

In the second variant, in addition to the favorable effects of the firstvariant, an additional effect can be attained. Specifically, since thephosphor is shielded from external moisture by glass sealing, adeterioration of the phosphor can be prevented, and stable wavelengthconversion can be realized for a long period of time.

FIG. 11 shows a luminescent device in the fifth embodiment, wherein (a)is a plan view of the luminescent device, (b) a side view of theluminescent device, and (c) a bottom view of the luminescent device.This luminescent device 1 includes a plurality of flip chip-typeGaN-based LED elements 2, a squarely formed glass-containing Al₂O₃substrate 3 having a multilayered structure with the GaN-based LEDelements 2 mounted thereon, a circuit pattern 4, made of tungsten (W)provided on the surface of the glass-containing Al₂O₃ substrate 3 andwithin the layers (an Ni, Au plating being further applied on thepattern on the substrate surface), an Au stud bump 5 for electricallyconnecting the GaN-based LED element 2 to the circuit pattern 4, aP₂O₅—ZnO-based glass sealing part 6 for sealing of the GaN-based LEDelement 2 and, in addition, bonding to the glass-containing Al₂O₃substrate 3, bottom circuit patterns 16A (anode), 16C (cathode) exposedfrom in-layer intermediate layer at four corners of the glass-containingAl₂O₃ substrate 3, and a heat dissipation pattern 17 made of a copperfoil for dissipating heat based on heat generation of the GaN-based LEDelement 2 into the exterior of the assembly. In this case, nine in totalof GaN-based LED elements 2 are arrayed (3×3) on the circuit pattern 4patterned on the substrate surface so as to have a circular outer shapethrough the Au stud bump 5.

The glass-containing Al₂O₃ substrate 3 has a multilayered structure within-layer wiring made of W, and, three GaN-based LED elements 2 in acolumn-wise direction shown in FIG. 11(b) are connected in series toform an element group. The anode in the element group is connected toone of the bottom circuit patterns 16A, and the cathode in the elementgroup is connected to the bottom circuit pattern 16C. Further, to, thecathode is connected the cathode in element groups formed for other twocolumns.

In the fifth embodiment, also when a plurality of GaN-based LED elements2 are used, a series/parallel circuit can easily be formed by using aceramic multilayered substrate, and, further, in electroplating, drawingof the wiring is also easy. Rapid thermal conduction of heat, producedbased on light emission from densely mounted nine GaN-based LED elements2, from the heat dissipation metal pattern to a heat sink or the likecan be realized by drawing an external electrical connection terminalfrom the intermediate layer and providing a metal pattern for heatdissipation on the bottom face.

FIG. 12 is a longitudinal sectional view showing a first variant of theluminescent device in the fifth embodiment. This luminescent device 1 isdifferent from the device in the fifth embodiment in that a phosphorlayer 15 is provided on the surface of the P₂O₅—ZnO-based glass sealingpart 6 to constitute a wavelength conversion-type luminescent device 1.

In the first variant, the provision of the phosphor layer 15 surroundingthe whole GaN-based LED element 2 in the P₂O₅—ZnO-based glass sealingpart 6 can realize a high-light output white luminescent device 1.Further, even though there is a variation in individual LED elementcharacteristics in the multi-element-type luminescent device 1, thedifference is less likely to be conspicuous and, thus, a luminescentdevice 1 having uniform luminescent characteristics can be realized.

FIG. 13 is a longitudinal sectional view showing a second variant of theluminescent device in the fifth embodiment. This luminescent device 1 isdifferent from the device in the fifth embodiment in that a blue orgreen light emitting flip chip-type GaN-based LED element 2 and a redlight emitting upper/lower electrode-type AlInGaP-based LED element 2are provided together followed by sealing by a P₂O₅—ZnO-based glasssealing part 6. The AlInGaP-based LED element 2, together with the wire10, is surrounded by the heat resistant inorganic material coating 11.

In the second variant, even when the flip chip-type LED element and theupper/lower electrode-type LED element are provided together, glasssealing by the P₂O₅—ZnO-based low melting glass is possible. Acombination of luminescent colors of the LED elements 2 may also bedesirably set.

FIG. 14 is a cross-sectional view of a luminescent device in the sixthembodiment. This luminescent device 1 includes an AlInGaP-based LEDelement 2 having an-electrode on its upper and lower parts, aglass-containing Al₂O₃ substrate 3 with the AlInGaP-based LED element 2mounted thereon, a circuit pattern 4 formed on the glass-containingAl₂O₃ substrate 3 made of W, an Au wire 10 for electrically connectingthe AlInGaP-based LED element 2 in its electrode to the circuit pattern4, a high refractive index material coating 11A of TiO₂ (refractiveindex: 2.4) for surrounding and coating the AlInGaP-based LED element 2,the wire 10, and the circuit pattern 4, an Ag paste 13 for bonding andelectrically connecting the AlInGaP-based LED element 2 to the circuitpattern 4, and an SiO₂—Nb₂O₅-based glass sealing part 6 for sealing theAlInGaP-based LED element 2 and bonded to glass-containing Al₂O₃substrate 3.

The SiO₂—Nb₂O₅-based glass sealing part 6 is made of SiO₂—Nb₂O₅-basedlow melting glass (coefficient of thermal expansion: 10.2×10⁻⁶/° C.,yield point: 543° C., refractive index: 1.92, internal transmittance:81% (470 nm), 91% (520 nm (in thickness 10 mm))) and has a semisphericloptical shape face 6D. In this SiO₂—Nb₂O₅-based glass sealing part 6,light, which is emitted from the AlInGaP-based LED element 2, is passedthrough the high refractive index material coating 11A and reaches thissealing part 6, enters the glass interface substantially perpendicularlyto minimize interface reflection and is radiated to the exterior of theassembly. The optical shape face 6D may be of a form other than thesemisphere so far as light emitted from the AlInGaP-based LED element 2enters at a critical angle or less to the interface of the glass sealingpart 6. Specifically, the optical shape face 6D may be in a hexahedronor octahedron form.

In the sixth embodiment, the AlInGaP-based LED element 2 is surroundedby the high refractive index material coating 11A made of TiO₂ with arefractive index of 2.4 and is sealed by the SiO₂—Nb₂O₅-based glasssealing part 6 having a refractive index of 1.92. Therefore, theoccurrence of interface reflection loss at the interface of the highrefractive index material coating 11A and the SiO₂—Nb₂O₅-based glasssealing part 6 can be suppressed, and the efficiency of takeout of lightfrom the LED element as the high refractive index medium can beimproved.

Further, since the SiO₂—Nb₂O₅-based glass sealing part 6 is formed in aconvex form, light emitted from the AlInGaP-based LED element 2 entersthe interface of the glass sealing part 6 and the air at an anglecorresponding to near vertical incidence, resulting in enhanced externalradiation efficiency.

FIG. 15 shows a first variant of the luminescent device in the sixthembodiment, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of a GaN-based LED element as alight source. This luminescent device 1 is different from the device inthe sixth embodiment in that a GaN-based LED element 2 provided with anSiC substrate 29 is used instead of the AlInGaP-based LED element 2 and,further, an optical shape face 6D made of an SiO₂ film 6E having aquarter-wavelength thickness is provided on the surface of theSiO₂—Nb₂O₅-based glass sealing part 6.

The SiC substrate 29 has on its bottom face an n-electrode 26 which iselectrically connected to the circuit pattern 4 through an Ag paste 13.

In the first variant, the provision of the SiO₂ film 6E having aquarter-wavelength thickness on the optical shape face 6D can reducereflection because light led to the optical shape face 6D interferes inthe SiO₂ film 6E.

FIG. 16 shows a second variant of the luminescent device in the sixthembodiment, wherein (a) is a longitudinal sectional view of theluminescent device and (b) a side view of a GaN-based LED element as alight source. This luminescent device 1 is different from the device inthe sixth embodiment in that a flip chip-type GaN-based LED element 2provided with a GaN substrate 30 is used instead of the AlInGaP-basedLED element 2.

In the second variant, by virtue of the use of the GaN-based LED element2 provided with the GaN substrate 30, light can be efficiently led tothe substrate surface without interface reflection within the LEDelement. The light led to the surface of the substrate is radiated tothe exterior of the device from the optical shape face 6D through theSiO₂—Nb₂O₅-based glass sealing part 6, whereby high external radiationefficiency can be realized.

FIG. 17 shows a luminescent device in the seventh embodiment, wherein(a) is a longitudinal sectional view of the luminescent device and (b) aside view of a GaN-based LED element as a light source. This luminescentdevice 1 is different from the devices in the first to sixth embodimentsin that, instead of the glass-containing Al₂O₃, Al₂O₃ is used as thesubstrate and a sealing glass material corresponding to the coefficientof thermal expansion of Al₂O₃ is used. FIG. 17 illustrates the statebefore splitting into individual devices. As shown in FIG. 17(a), eachof the luminescent devices 1 includes a flip chip-type GaN-based LEDelement 2, an Al₂O₃ substrate 3 with the GaN-based LED element 2 mountedthereon, a circuit pattern 4 provided on the Al₂O₃ substrate 3, an Austud bump 5 for electrically connecting the GaN-based LED element 2 tothe circuit pattern 4, and a B₂O₃—F-based glass sealing part 6 forsealing the GaN-based LED element 2 and bonded to the Al₂O₃ substrate 3.

As shown in FIG. 17(b), in order to prevent damage to the Au stud bump 5in the sealing of the B₂O₃—F-based glass and interelectrodeshort-circuiting, underfilling 7 is filled into a part between theGaN-based LED element 2 and the Al₂O₃ substrate 3.

The Al₂O₃ substrate 3 has via holes 3A, and the circuit pattern 4 on thesurface is electrically connected to the circuit pattern 4 on thebackside through the via holes 3A. Grooves 3B as a substrate splittingposition are formed at predetermined intervals.

In the circuit pattern 4, bonding patterns 4A, 4B for enhancing thestrength of bonding to the B₂O₃—F-based glass sealing part 6 areprovided on the surface on which the GaN-based LED element 2 is to bemounted, and the bonding pattern 4B serves also as a part of the circuitpattern 4 drawn out to the backside of the Al₂O₃ substrate 3.

The B₂O₃—F-based glass sealing part 6 is made of B₂O₃—F-based lowmelting glass (coefficient of thermal expansion: 6.9×10⁻⁶/° C., yieldpoint: 539° C., refractive index: 1.75, internal transmittance: 98% (470nm)) and is bonded to the surface of the Al₂O₃ substrate 3 by hotpressing a preform glass on which an optical shape face 6D and a smallthickness part 6B have previously been provided by preforming. The smallthickness part 6B is formed in such a thickness that damage such ascracking does not extend to the adjacent luminescent device 1 upon theapplication of a load to scribing part for splitting.

In the luminescent device 1, after the GaN-based LED element 2 ismounted and sealed by the B₂O₃—F-based glass sealing part 6, a load isapplied using the groove 3B in the Al₂O₃ substrate 3 as the splittingposition, whereby the Al₂O₃ substrate 3 is broken based on stressconcentration and, at the same time, the B₂O₃—F-based glass sealing part6 is split at the small thickness part 6B.

In the seventh embodiment, the use of a commonly widely used Al₂O₃substrate can reduce white light absorption and can improve lighttakeout efficiency. Further, the Al₂O₃ substrate is easily available andis inexpensive. Furthermore, since splitting into individual luminescentdevices 1 is carried out by applying a load to the scribing part, massproductivity is excellent. In the splitting into individual luminescentdevices 1 by dicing, upon cutting by a dicer, residual stain occurs inthe glass and, consequently, cracking sometimes occurs in theB₂O₃—F-based glass sealing part 6 upon exposure to heat shock. On theother hand, in the luminescent device 1 split based on scribing,residual strain is small and, thus, a failure such as cracking is lesslikely to occur.

SiO₂—B₂O₃—La₂O₃-based low melting glass (coefficient of thermalexpansion: 8.3×10⁻⁶/° C., yield point: 559° C., refractive index: 1.81,internal transmittance: 99% (470 nm)) may also be used as low meltingglass other than the B₂O₃—F-based glass.

Regarding a splitting method other than the scribing, splitting using alaser beam may also be adopted.

FIG. 18 is a longitudinal sectional view showing a first variant of theluminescent device in the seventh embodiment. This luminescent device 1is different from the device in the seventh embodiment in that theB₂O₃—F-based glass sealing part 6 is formed by flat B₂O₃—F-based lowmelting glass.

The B₂O₃—F-based SiO₂—B₂O₃ glass sealing part 6 has a scribing part 6Cat a position opposite to the groove 3B provided in the Al₂O₃ substrate3, and, upon the application of a load, the scribing part 6C cooperateswith the groove 3B to cause stress concentration, whereby theB₂O₃—F-based glass sealing part 6 and the Al₂O₃ substrate 3 are split.

The first variant renders the preform of the B₂O₃—F-based glass sealingpart 6 unnecessary to simplify the manufacturing process, contributingto excellent productivity.

Further, SiO₂—B₂O₃-based low melting glass can also be used as other lowmelting glass applicable to the glass sealing part 6.

FIG. 19 is a luminescent device of the eighth embodiment, wherein (a) isa longitudinal sectional view of the luminescent device and (b) a sideview of a GaN-based LED element as a light source. This luminescentdevice 1 is different from the device in the seventh embodiment in thatthis device is provided with BN underfilling 7 having excellent thermalconductivity on the lower part of the GaN-based LED element 2, an AlNsubstrate 3 with the GaN-based LED element 2 mounted thereon, and anSiO₂—B₂O₃-based glass sealing part 6, having a coefficient of thermalexpansion similar to AlN, for sealing the GaN-based LED element 2 andbonded to the AlN substrate 3.

The SiO₂—B₂O₃-based glass sealing part 6 is made of SiO₂—B₂O₃-based lowmelting glass (coefficient of thermal expansion: 4.9×10⁻⁶/° C., yieldpoint: 558° C., refractive index: 1.61, internal transmittance: 96% (380nm)) and has a coefficient of thermal expansion substantially equal tothe coefficient of thermal expansion (5×10⁻⁶/° C.) of the GaN-based LEDelement 2.

In the eighth embodiment, heat produced based on light emission from theGaN-based LED element 2 is passed through highly thermally conductiveunerfilling 7 and Au stud bump 5, is conveyed to the AlN substrate 3 asa high heat dissipation material and is then efficiently dissipated tothe outside of the device. Further, since main members such as theGaN-based LED element 2, the AlN substrate 3, and the SiO₂—B₂O₃-basedglass sealing part 6 are substantially equal to one another incoefficient of thermal expansion, separation and deterioration insealing properties derived from the difference in coefficient of thermalexpansion can be prevented.

For example, even when there is a difference in coefficient of thermalexpansion between the main members, the provision of a constructioncapable of relaxing the stress can absorb the internal stress and canprevent deterioration in sealing properties and separation.

FIG. 20 is a longitudinal sectional view showing a variant of theluminescent device in the eighth embodiment. This luminescent device 1is different from the device in the seventh embodiment in that a softmetal layer for absorbing the internal stress is provided on the surfaceof the GaN-based LED element 2 mounted circuit pattern 4.

FIGS. 21(a) to (e) are diagrams showing a process for forming a circuitpattern on the AlN substrate. At the outset, as shown in (a), aW-containing paste is screen printed according to the circuit pattern onboth sides of the AlN substrate 3 with via holes 3A previously formedtherein. Next, the AlN substrate 3 is sintered at a temperature above1500° C. to bake W to the AlN substrate 3. Thus, W is strongly bonded tothe AlN substrate 3. Alternatively, W may be formed by sputtering.Further, instead of W, a high melting metal such as Mo may be used.Next, as shown in (b), a nickel (Ni) layer 26 is provided by plating onthe circuit pattern 4 on the surface side of the AlN substrate 3. Next,as shown in (c), the AlN substrate 3 is heated at about 700° C. to reactNi with W. Thus, the circuit pattern 4 is strongly bonded onto the AlNsubstrate 3. Next, as shown in (d), an Au layer 4C is formed byelectroplating on the surface of the circuit pattern 4. As shown in (e),the GaN-based LED element 2 is then mounted at a predetermined positionthrough an Au stud bump 5.

SiO₂—B₂O₃-based low melting glass is hot pressed on the AlN substrate 3with the GaN-based LED element 2 mounted on the circuit pattern 4,followed by splitting into individual luminescent devices 1 based onscribing.

In the above variant, the strong circuit pattern 4 can be bonded to theAlN substrate 3. Further, the provision of the Au pattern 4C formounting the GaN-based LED element 2 on the circuit pattern 4 throughthe Au stud bump and the provision of the Ni pattern 4A for bonding tothe low melting glass can realize stud bump mounting and, at the sametime, can relax stress. In the glass, bonding is carried out through anoxide, and bonding to Au does not occur, but on the other hand, bondingto Ni takes place through an Ni oxide film on the Ni surface. Further,good bonding can also be realized between the glass and AlN. The thermalconductivity of the AlN substrate is so high that a difference intemperature between the AlN substrate and the glass is likely to occur,for example, immediately after lighting of the GaN-based LED element 2.Even in such a situation, stable glass sealing properties can berealized as a result of stress relaxation based on the elasticdeformation of the Au layer 4C can be provided.

FIG. 22 is a longitudinal sectional view of a luminescent device in theninth embodiment. This luminescent device 1 includes a flip chip-typeGaN-based LED element 2, an AlN submount 18 on which the GaN-based LEDelement 2 is mounted, a W circuit pattern 4 formed on the AlN submount18, a lead 19 made of a copper alloy having a stepped part 19A on whichthe AlN submount 18 is mounted, an Au stud bump 5 for electricallyconnecting the GaN-based LED element 2 to the circuit pattern 4, and aP₂O₅—F-based glass sealing part 6 for surrounding and integrally sealingthe GaN-based LED element 2 and the lead 19.

The AlN submount 18 has a metallized circuit pattern.

The P₂O₅—F-based glass sealing part 6 is made of P₂O₅—F-based lowmelting glass (coefficient of thermal expansion: 16.9×10⁻⁶/° C., yieldpoint: 363° C., refractive index: 1.54, internal transmittance: 99% (470nm)), and an optical shape face 6D, which is formed in a semisphericalform and functions to radiate light to a desired radiation range, isformed based on hot pressing.

Two P₂O₅—F-based low melting glass sheets are set parallel to each otherso as to sandwich a lead 19, formed in the lead frame, therebetween, andthe assembly is hot pressed in a nitrogen atmosphere under conditions ofpressure 10 kgf and temperature 410° C. or above. Under the aboveconditions, the viscosity of the low melting glass is 10⁸ to 10⁹ poises.

FIG. 23 is a diagram illustrating the state of glass sealing of the leadframe by hot pressing. In this drawing, a lead frame 31 is shown inwhich a pair of leads 311 made of a copper alloy sheet are led out in asingle direction. This lead frame 31 includes a lead 311 for fixing anAlN submount 18, an opening 312 provided on the support side of the lead311, an oval hole 313 for absorbing thermal deformation of the leadframe 31, and a positioning hole 314 for positioning the feed positionof the lead frame 31. The periphery of the lead 311 is removed as anopening 310 in punching out the copper alloy sheet.

The method for manufacturing the luminescent device 1 will be explained.

A lead frame 31 with a lead 19 having a stepped part 19A for mountingthe AlN submount 18 is first formed. An AlN submount 18 with a circuitpattern 4 formed thereon is then bonded to the lead frame 31. Next, aGaN-based LED element 2 is bonded by flip chip binding through an Austud bump 5 to the circuit pattern 4 provided on the surface of the AlNsubmount 18. Next, P₂O₅—F-based low melting glass is set parallel toeach other on and under the lead frame 31. The P₂O₅—F-based low meltingglass is then hot pressed using a mold (not shown). The P₂O₅—F-based lowmelting glass is molded individually in the small thickness part 6B andthe P₂O₅—F-based glass sealing part 6 based on hot pressing. Next, thelead 311 is cut for isolation of luminescent devices from the lead frame31.

The following effects can be attained by the ninth embodiment.

-   (1) Hot pressing is carried out using the P₂O₅—F-based low melting    glass in a highly viscose state. Therefore, glass sealing at a    temperature below the crystal growth temperature is possible.-   (2) Since hot pressing is carried out in a nitrogen atmosphere, each    member is less likely to be oxidized.-   (3) Since two glass sheets are set so as to sandwich a lead    therebetween, sealing can be carried out in a highly viscose state.-   (4) Since the P₂O₅—F-based low melting glass and the copper alloy    lead are substantially equal to each other in coefficient of thermal    expansion, bonding failures such as separation and cracking are less    likely to occur. Further, even though there is a small difference in    coefficient of thermal expansion, the internal stress can be    absorbed based on the plasticity of copper as a soft metal. In the    first to eighth embodiments, a ceramic substrate with a circuit    pattern formed thereon was used as electric power supplying means.    The coefficient of thermal expansion of generally available ceramic    substrates is somewhat lower than that of the low melting glass.    Although the correlation is not necessarily great, there is a    tendency that materials having a weak intermolecular bond have a    lower melting point and, at the same time, have a higher coefficient    of thermal expansion. On the other hand, when a metal lead is used    as the electric power supplying means, even a lower melting point    glass with a coefficient of thermal expansion of not less than    15×10⁻⁶/° C. can realize a luminescent device 1. When a material    having a high coefficient of thermal expansion is selected as the    low melting glass, the difference in coefficient of thermal    expansion between the glass and the GaN-based LED element becomes    large. Therefore, in this case, preferably, the measure for this    difference is also carried out.-   (5) Since flip chip mounting is adopted, damage to the electrode    part is less likely to occur.-   (6) In the structure, cracking derived from the difference in    coefficient of thermal expansion between members is less likely to    occur. Specifically, a stepped part having a shape corresponding to    the AlN submount is formed in the lead, and, in the direction of the    length of the AlN submount, the stress can be relaxed by the    plasticity of the soft metal lead. Further, glass is likely to cause    cracking upon exposure to tensile stress and is less likely to cause    cracking upon exposure to compressive stress. A GaN-based LED    element having a lower coefficient of thermal expansion is located    at the center part, and the periphery thereof is surrounded by the    lead having a higher coefficient of thermal expansion and the    P₂O₅—F-based low melting glass. Therefore, the stress is vertically    applied to each face of the GaN-based LED element, and compressive    stress occurs in the glass. Thus, even when the coefficient of    thermal expansion of the low melting glass is larger than that of    the LED element and the submount, glass sealing can be realized.-   (7) Heat generated from the GaN-based LED element is rapidly    radiated to the outside of the device through the AlN submount and    the lead. Further, since the coefficient of thermal expansion of the    glass is superior to the resin sealing material by a factor of about    10, heat dissipation from the glass is not negligible.-   (8) A large quantity of luminescent devices can be manufactured at a    time by conducting hot pressing to the lead frame for individual    glass sealing of leads and conducting tie bar cutting from the lead    frame, and, thus, excellent mass productivity can be realized.

The material for constituting the submount is not limited to AlN and maybe sapphire (Al₂O₃). When Al₂O₃ is used, the difference in coefficientof thermal expansion between Al₂O₃ and the glass material is small and,thus, the occurrence of cracking and separation can be suppressed.

Further, as shown in FIG. 24, a construction may be adopted in which aGaN-based LED element 2 is loaded on a Si submount 18 which functions asa Zener diode by an n layer 18B and a p layer 18C. In this case, theGaN-based LED element can be protected against electrostatic dischargedamage. For the wire 10 for electrically connecting the p layer 18C inthe Si submount 18 to the lead 19, damage caused by glass sealing can beavoided by protection with a protecting member such as theabove-described heat resistant inorganic material coating 11.

For the two glass sheets for sandwiching the lead therebetween, whiteglass may be used on the lower side. In this case, light emitted to thelower side can be reflected and radiated to the optical shape formationside.

The two glass sheets for sandwiching the lead therebetween may bedifferent from each other in viscosity. Specifically, P₂O₅—F-based lowmelting glass (coefficient of thermal expansion: 17.3×10⁻⁶/° C., yieldpoint: 310° C., refractive index: 1.51, internal transmittance: 99% (470nm) ) is used as the upper glass, and P₂O₅—F-based low melting glass(coefficient of thermal expansion: 16.9×10⁻⁶/° C., yield point: 363° C.,refractive index: 1.54, internal transmittance: 99% (470 nm)) is used asthe lower glass. In this case, at the time of hot pressing, the upperside is higher viscosity, and the lower side is lower viscosity. Thisfacilitates molding.

FIG. 25 is a luminescent device in the tenth embodiment, wherein (a) isa plan view, (b) a cross-sectional view taken on line A-A of (a), and(c) a perspective view of the lower glass. This luminescent device 1includes a face up-type GaN-based LED element 2, a lead 19 having a leadcup part 19B on which the GaN-based LED element 2 is mounted, a wire 10for electrically connecting the GaN-based LED element 2 to the lead 19,a silicone coating 35 for covering and protecting the GaN-based LEDelement 2 and the wire 10, and a P₂O₅—F-based glass sealing part 6 forintegrally sealing the lead 19 through the preformed upper glass 60A andlower glass 60B.

The lead cup part 19B is provided in a cone form by an inclined face 190and a bottom face 191 and is received in a lead receiving groove 60C ofthe lower glass 60B shown in (c). The lead receiving groove 60C isformed in preforming the lower glass 60B using a mold.

The method for manufacturing the luminescent device 1 will be explained.

At the outset, a lead frame (not shown) of copper provided with a pairof leads 19 having a silver plated surface is provided. Next, aGaN-based LED element 2 is mounted on the lead 19 in its lead cup part19B. The GaN-based LED element 2 is bonded to the lead cup face 19B onits bottom face 191. The pair of leads 19 are then electricallyconnected to the GaN-based LED element 2 on its electrode through a wire10. In such a state that the pair of leads 19 has been electricallyconnected to the GaN-based LED element 2, the assembly is received inthe lead receiving groove 60C in the preformed lower glass 60B. Asilicone resin coating 35 is then potted so as to cover the pair ofleads 19 and the GaN-based LED element 2. The upper glass 60A is thenprovided and is integrated with the lower glass 60B based on hotpressing. The luminescent device 1 is cut out from the lead frame.

The following effects can be attained by the tenth embodiment.

In the silicone resin, the molecular bond is cleaved by heat at about400° C. or above, and, consequently, gas is evolved. Since the siliconeresin coating 35 can be processed at 360° C. without heat decomposition,heat applied during the glass sealing can be absorbed in the siliconeresin to relax the stress. Further, the use of the preformed lower glass60B for receiving the lead cup part 19B can stabilize glass sealingstate of the pair of leads 19. A large quantity of luminescent devicescan be manufactured at a time by conducting hot pressing to the leadframe for individual glass sealing of leads and conducting tie barcutting from the lead frame, and, thus, excellent mass productivity canbe realized.

FIG. 26 is a cross-sectional view showing a first variant of theluminescent device in the tenth embodiment. This luminescent device 1 isdifferent from the device in the tenth embodiment in that theluminescent device 1 includes a flip chip-type GaN-based LED element 2(0.3 mm×0.3 mm), an AlN submount 18 on which the GaN-based LED element 2is mounted, and a pair of lead frames 19 having a stepped part 19A forreceiving the AlN submount 18.

The pair of lead frames 19 has an inclined face 19D above the steppedpart 19A, and light emitted from the GaN-based LED element 2 isreflected from the inclined face 19D for external radiation.

The AlN submount 18 has via holes 18A for electrically connecting thecircuit pattern 4 provided on the surface to the circuit pattern 4provided on the backside.

The method for manufacturing the luminescent device 1 will be explained.

A lead frame (not shown) provided with a pair of leads 19 is firstprovided. Next, an AlN submount 18 is electrically connected through anAg paste so as to be located in a stepped part 19A in the lead 19. AGaN-based LED element 2 is then bonded to the AlN submount 18 through anAu stud bump 5. In such a state that the pair of leads 19 areelectrically connected to the GaN-based LED element 2, the assembly isthen received in the lead receiving groove 60C of the preformed lowerglass 60B. Next, a silicone coating 35 is potted so as to cover the pairof leads 19 and the GaN-based LED element 2. An upper glass 60A is thenprovided and is integrated with a lower glass 60B by hot pressing. Theluminescent device 1 is then cut out from the lead frame.

In the first variant, light can be efficiently taken out from thesubstrate side by using the flip chip-type GaN-based LED element 2.

FIG. 27 is a cross-sectional view of a second variant of the luminescentdevice in the tenth embodiment. This luminescent device 1 is differentfrom the device in the tenth embodiment in that the luminescent device 1includes a flip chip-type GaN-based LED element (large size) 2, an AlNsubmount 18 on which the GaN-based LED element 2 is mounted, and a pairof lead frames 19 having a stepped part 19A for receiving the AlNsubmount 18. The size of the large-size GaN-based LED element 2 is 1mm×1 mm.

In the second variant, the construction using a large-size chip has beenexplained. Since the chip size is large, the difference in coefficientof thermal expansion between the P₂O₅—F-based glass AlN submount 18 andthe P₂O₅—F-based glass sealing part 6 is large. Even in this case, goodsealing properties are obtained.

FIG. 28 shows a luminescent device in the eleventh embodiment, wherein(a) is a side view and (b) a perspective view illustrating glasssealing. As shown in FIG. 28(a), in this luminescent device 1, a tubularbody 60D made of P₂O₅—F-based glass is heated to glass-seal theGaN-based LED element 2, the wire 10, and the pair of leads 19.

As shown in FIG. 28(b), the tubular body 60D is formed of a partiallycut-out tubular glass. The tubular body 60D is heated by a heatingdevice such as a burner (not shown) to melt the glass for glass sealingof the GaN-based LED element 2, the wire 10, and the pair of leads 19.

In the eleventh embodiment, the GaN-based LED element 2, the wire 10,and the pair of leads 19 can be glass-sealed based on the surfacetension of the melted glass. In this embodiment, glass sealing iscarried out by depositing the melted glass. Alternatively, hot pressingmay be carried out in such a state that the glass is in a melted state.

FIG. 29 is a longitudinal sectional view of a luminescent device in thetwelfth embodiment. This luminescent device 1 is different from theluminescent device 1 in the ninth embodiment in that a mold part 9 madeof an epoxy resin is provided.

The mold part 9 has a semispherical optical shape face 9A and is formedby transfer molding.

According to this construction, an optical system can easily be formedin the glass sealing-type device, and, at the same time, the moistureresistance is further improved by surrounding the glass sealing part 6by the mold part 9. The lead-out part is not directly from the glass,and, thus, cracking or breaking of glass caused by stress or the like atthe time of bending of the lead can be advantageously prevented. Themold part 9 may be made of other resin material other than the epoxyresin, for example, a silicone resin, and molding methods other thantransfer molding, for example, potting molding, can also be applied.Alternatively, the mold part 9 may be formed by an injection methodusing a resin material such as acrylic or polycarbonate resin, and, inthis case, the productivity can be improved.

Embodiments shown in FIGS. 30 to 55 will be explained in detail.

(Optical Element)

Optical elements include light emitting diodes, laser diodes, and otherlight emitting elements and photodetectors. The wavelength of light tobe received and the wavelength of light to be emitted in the opticalelement are not particularly limited, and, for example, group IIInitride-based compound semiconductor elements useful for lights rangingfrom ultraviolet light to green light, and GaAs-based semiconductorelements useful for red lights may be used.

Group III nitride-based compound semiconductor light emitting elementswhich emit short wavelengths pose a significant problem associated withthe sealing member. Group III nitride-based compound semiconductors arerepresented by general formula Al_(X)Ga_(Y)In_(1-X-Y)N where 0<X≦1,0≦Y≦1, and 0≦X+Y≦1. Among them, Al-containing group III nitride-basedcompound semiconductors include the so-called binary systems of AlN, andthe so-called ternary systems of Al_(x)Ga_(1-x)N and Al_(x)In_(1-x)Nwhere 0<x<1. In the group III nitride-based compound semiconductors andGaN, at least a part of the group III elements may be replaced withboron (B), thallium (Tl) or the like. At least a part of nitrogen (N)may also be replaced with phosphorus (P), arsenic (As), antimony (Sb),bismuth (Bi) or the like.

The group III nitride-based compound semiconductor may contain anydopant. n-type impurities usable herein include silicon (Si), germanium(Ge), selenium (Se), tellurium (Te), and carbon (C). p-type impuritiesusable herein include magnesium (Mg), zinc (Zn), beryllium (Be), calcium(Ca), strontium (Sr), and barium (Ba). After doping with the p-typeimpurity, the group III nitride-based compound semiconductor may beexposed to electron beams, plasma, or heat in an oven. This, however, isnot indispensable.

The group III nitride-based compound semiconductor layer is formed by anMOCVD (metal-organic vapor phase epitaxy) method. All the semiconductorlayers constituting the element are not always required to be formed bythe MOCVD method, and the MOCVD method may be used in combination with amolecular beam epitaxy method (MBE method), a halide vapor-phase epitaxymethod (HVPE method), sputtering, ion plating or the like.

Regarding the construction of the light emitting element, a homostructure, hetero structure, or double hetero structure with MISjunction, PIN junction or pn junction may be adopted. In the lightemitting layer, a quantum well structure (a single quantum wellstructure or a multiple quantum well structure) may also be adopted. Thegroup III nitride-based compound semiconductor light emitting elementmay be of a face-up type in which the main light receiving/emittingdirection (electrode face) is an optical axis direction in the opticaldevice, and a flip-chip type in which the main light receiving/emittingdirection is a direction opposite to the optical axis direction andreflected light is utilized.

The heat resistant temperature of the group III nitride-based compoundsemiconductor element is about 600° C., and the heat resistanttemperature of the GaAs-based semiconductor element is about 600° C.,and both the semiconductor elements are stable against the temperatureat which the low melting glass is molded.

(Electric Power Receiving and Supplying Means)

The optical device includes electric power receiving and supplyingmeans. The electric power receiving and supplying means is an electriccomponent that functions to supply electric power to the light emittingelement and to take out electric power produced in a photodetector uponexposure to light. The electric power receiving and supplying meansincludes a lead for connecting the optical device to electric wiring anda bonding wire for wiring the lead and the optical element. The bondingwire is in many cases made of a gold wire or a gold alloy wire. The heatresistant temperature of the bonding wire per se and bonding between thebonding wire and the lead or the optical element is 600° C. or above,and both the bonding wire per se and the bonding are stable against thetemperature at which the low melting glass is molded.

(First Sealing Member)

The first sealing member covers the optical element and at least a partof the electric power receiving and supplying means. In this invention,SiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based, P₂O₅—ZnO-based,SiO₂—B₂O₃—La₂O₃-based or SiO₂—B₂O₃-based glass is selected as the firstsealing member.

All of these types of low melting glass can be pressed at 350 to 600° C.The first sealing member in this invention can also be formed byspontaneous welding.

A phosphor material can also be dispersed in the first sealing material.An inorganic phosphor material powder may be used as the phosphormaterial and may be mixed in the low melting glass. Further, the lowmelting glass may also be doped with a rare earth ion to render theglass fluorescent. Any desired luminescent color including white lightcan be provided by properly combining a light emitting element with aphosphor material.

In the combination of the first sealing member with the optical element,preferably, the first sealing member has an Abbe number of 40 or lessand a refractive index of 1.6 or more, and the optical element has areceiving/emission wavelength of not more than 546.1 nm (wavelength ofe-radiation of Na). Specifically, for the external quantum efficiency oflight emitted within the high refractive index material, a higherrefractive index of the sealing material relative to the wavelength oflight to be emitted is more advantageous. The refractive index of theoptical material is defined by d-radiation of Na. In general, however,the refractive index increased with decreasing the wavelength, and thelevel of a change in refractive index with the wavelength of light isexpressed by the Abbe number. In particular, in a short-wavelengthemission-type light emitting element which poses a problem inconventional resin sealing, the selection of a material which is highlyrefractive in d-radiation of Na and undergoes a large change inrefractive index with wavelength, can prevent a lowering in light outputcaused by yellowing of the resin and, in addition, can realize sealingwith a material having a high refractive index for short wavelengthlight, and thus, high external quantum efficiency can be provided.

SiO₂—Nb₂O₅-based glass may be mentioned as low melting glass having suchoptical characteristics. Among others, SiO₂—Nb₂O₅—Na₂O glass ispreferred.

Preferably, in the light emitting element, the first sealing member isdisposed in at least a light receiving/emission direction to cover thelight emitting element for reliably preventing discoloration in thisdirection.

The first sealing member may be in any form without particularlimitation and properly designed according to optical characteristicsrequired of the optical device. In the case of a light emitting element,the first sealing member disposed in the light release direction ispreferably in a convex-lens form.

(Second Sealing Member)

In this invention, the optical element is sometimes sealed with aplurality of sealing members including the above first sealing member.Here the second sealing member covers the optical element from a partopposite to the main light receiving/emission direction.

As with the first sealing member, the second sealing member may also bemade of low melting glass selected from SiO₂—Nb₂O₅-based, B₂O₃—F-based,P₂O₅—F-based, P₂O₅—ZnO-based, SiO₂—B₂O₃—La₂O₃-based or SiO₂—B₂O₃-basedglass. The second sealing member and the first sealing member may be thesame or different.

When the members are different low melting glass materials, preferably,the refractive index of the first sealing member (provided in the mainlight receiving/emission direction of the optical element) is higherthan the refractive index of the second sealing member. According tothis construction, when a light emitting element is used as the opticalelement, the critical angle at the interface of the light emittingelement and the sealing member is increased to improve the lightefficiency.

As with the first sealing member, the second sealing member made of lowmelting glass can be formed by press molding or spontaneous welding.

As with the first sealing member, a phosphor material may also bedispersed in the second sealing member made of low melting glass.

The second sealing member may be made of a nontransparent material. Inaddition to low melting glass, for example, metal plates and ceramicplates may be mentioned as the second sealing member. In this case,preferably, the second sealing member is made of a material which canefficiently reflect light. When the second sealing member is made of amaterial other than the low melting glass, preferably, the coefficientof linear expansion of the first sealing member is between thecoefficient of linear expansion of the second sealing member and thecoefficient of linear expansion of the optical element. According tothis construction, even when the optical device is heat treated in asolder reflow oven or the like, the internal stress of the opticaldevice based on the difference in coefficient of linear expansionbetween dissimilar materials can be reduced.

This invention will be explained with reference to the followingexamples.

EXAMPLE 1

In this example, a face-up-type group III nitride-based compoundsemiconductor light emitting element 1010 shown in FIG. 30 was used asan optical element. This light emitting element emits blue light.

The specifications of each layer constituting the light emitting element1010 are as follows. Layers Composition p-type layer 1015 p-GaN:Mg Layer1014 including light Including InGaN layer emitting layer n-type layer1013 n-GaN:Si Buffer layer 1012 AlN Substrate 1011 Sapphire

The n-type layer 1013 made of GaN doped with Si as an n-type impurity isformed on the substrate 1011 through the buffer layer 1012. In thisexample, sapphire is used as the substrate 1011. The material for thesubstrate 1011, however, is not limited to sapphire, and examples ofmaterials usable herein include sapphire, spinel, silicon carbide, zincoxide, magnesium oxide, manganese oxide, zirconium boride, and group IIInitride-based compound semiconductor single crystals. The buffer layeris formed by MOCVD using AlN. The material for the buffer layer,however, is not limited to AlN, and other materials such as GaN, InN,AlGaN, InGaN and AlInGaN may also be used. For example, a molecular beamepitaxy method (MBE method), a halide vapor-phase epitaxy method (HVPEmethod), sputtering, or ion plating may be used for the formation of thebuffer layer. When the substrate is made of a group III nitride-basedcompound semiconductor, the provision of the buffer layer can beomitted.

The substrate and the buffer layer can be if necessary removed aftersemiconductor element formation.

In this example, the n-type layer 1013 is made of GaN. Alternatively,the n-type layer 1013 may be made of AlGaN, InGaN or AlInGaN.

Further, the n-type layer 1013 has been doped with Si as an n-typeimpurity. Other n-type impurities usable herein include Ge, Se, Te, andC.

The layer 1014 including a light emitting layer may comprise a quantumwell structure (a multiple quantum well structure or a single quantumwell structure), and the structure of the light emitting element may beof single hetero type, double hetero type, and homojunction type.

The layer 1014 including a light emitting layer may also include, on itsp-type layer 1015 side, a group III nitride-based compound semiconductorlayer with a broad bandgap doped with Mg or the like. This caneffectively prevent electrons injected into the layer 1014 including alight emitting layer from diffusing into the p-type layer 1015.

The p-type layer 1015 made of GaN doped with Mg as a p-type impurity isformed on the layer 1014 including a light emitting layer. The p-typelayer 1015 may also be made of AlGaN, InGaN or InAlGaN. Zn, Be, Ca, Sr,or Ba may also be used as the p-type impurity. After the introduction ofthe p-type impurity, the resistance can be lowered by a well-knownmethod such as electron beam irradiation, heating in an oven, or plasmairradiation. In the light emitting element having the aboveconstruction, each group III nitride-based compound semiconductor layermay be formed by MOCVD under conventional conditions, or alternativelymay be formed by a method such as a molecular beam epitaxy method (MBEmethod), a halide vapor-phase epitaxy method (HVPE method), sputtering,or ion plating.

An n-electrode 1018 has a two-layer structure of an Al layer and a Vlayer. After the formation of the p-type layer 1015, the p-type layer1015, the layer 1014 including a light emitting layer, and a part of then-type layer 1013 are removed by etching to expose the n-type layer1013, and the n-electrode 1018 is formed by vapor deposition on theexposed n-type layer 1013.

A light transparent electrode 1016, which is a gold-containing thinfilm, is stacked on the p-type layer 1015. A p-electrode 1017 is alsomade of a gold-containing material and is formed by vapor deposition onthe light transparent electrode 1016. After the formation of theindividual layers and electrodes by the above steps, the step ofisolating chips is carried out.

As shown in FIG. 31, in the light emitting element 1010, a lightemitting element 1010 is fixed onto a mount lead 1021 as electric powerreceiving and supplying means, and bonding wires 1023, 1024 aresuspended from the upper electrodes in the light emitting element 1010respectively to a mount lead 1021 and a sublead 1022 as other electricpower receiving and supplying means. The surface of the mount lead 1021is plated with silver from the viewpoint of efficiently reflecting lightfrom the light emitting element 1010. In order to ensure lightreflection efficiency, the light emitting element 1010 can also be fixedonto the mount lead 1021 with the aid of an inorganic white adhesive.Further, a high level of heat dissipation can be imparted by using acopper alloy close to pure copper. A gold wire is used as the bondingwire.

An assembly 1020 shown in FIG. 30 is set as a core in a pressing mold1025 as shown in FIG. 32. Low melting glass is previously set in each ofconcave parts 1026, 1027 in the pressing mold 1025, and the mold 1025 isthen closed to mold a sealing member 1028 (first sealing member) shownin FIG. 33. In this example, P₂O₅—F-based glass (Sumita Optical Glass,Inc.: trade name K-PG325) was selected as the low melting glass, and themolding temperature was brought to 430° C.

As a result, as shown in FIG. 33, the whole light emitting element 1010and a part of the lead parts 1021, 1022 are covered by a hemisphericalsealing member 1028. The shape of the sealing member 1028 can beproperly designed according to optical properties required of theoptical device 1002, and, for example, the sealing member 1028 may havea shell shape.

EXAMPLE 2

An optical device 1003 shown in FIG. 34 has the same construction as theoptical device 1001 shown in FIG. 33, except that the low melting glasscontains a fluorescent material. In FIGS. 33 and 34, like parts areidentified with the same reference numerals, and the explanation thereofwill be omitted. In this example, the sealing member 1038 is made of lowmelting glass doped with a rare earth element as the fluorescentmaterial.

The incorporation of an optional fluorescent material in the low meltingglass can realize control of the color of light emitted from the opticaldevice 1003.

EXAMPLE 3

An optical device 1004 shown in FIG. 35 has the same construction as theoptical device 1002 shown in FIG. 4, except that the sealing member 1028is covered by a shell-shaped cover 1048. This cover 1048 is made of anepoxy resin or other light transparent resin and is formed by molding.The provision of the cover 1048 can provide a large optical device.Thus, a wide variety of optical systems can be provided by preparing aglass sealing body having a standard shape and then using a resin forwhich equipment of mold and molding work are easier. In this case, thedensity of light emitted from the light emitting element is high, and aglass material is provided around the light emitting element whichcauses a temperature rise. Therefore, deterioration in the opticaloutput can be suppressed to such a level that is negligible. The sealingmember 1038 shown in FIG. 34 can also be covered by this cover 1048.Further, each of sealing members 1058, 1068, 1069, 1079 shown in FIGS.36, 38, and 39 which will be described later can also be covered by thiscover 1048. This cover 1048 can contain a fluorescent material.

EXAMPLE 4

An optical device 1005 shown in FIG. 36 includes a sealing member 1058formed by spontaneous adhesion. In FIGS. 33 and 36, like parts areidentified with the same reference characters, and the explanationthereof will be omitted.

The sealing member 1058 is formed as follows. As shown in FIG. 37, acylindrical body 1058 a made of low melting glass is provided and put onan assembly 1020 of a light emitting element 1010 and lead parts 1021,1022. This is placed in an oven to soften the cylindrical body 1058 a.As a result, the cylindrical body 1058 a covers, in a lens form by thesurface tension of the material, the assembly 1020.

According to this example, the need to use the pressing mold can beeliminated, and, thus, optical devices can be provided at low cost.

EXAMPLE 5

An optical device 1006 shown in FIG. 38 has the same construction as theoptical device shown in FIG. 33, except that the light emitting element1010 and the lead parts 1021, 1022 are covered by dissimilar types oflow melting glass. In FIGS. 33 and 38, like parts are identified withthe same reference characters, and the explanation thereof will beomitted.

In the optical device shown in FIG. 38, as with the optical devicedescribed above, a blue light emitting element is used as the lightemitting element. However, the upper side (a main light emissiondirection) of the light emitting element 1010 is sealed with a firstsealing member 6108 made of SiO₂—Nb₂O₅-based glass (refractive index1.8, Abbe number 25), and the lower side (a direction opposite to themain light emission direction) of the light emitting element 1010 issealed with a second sealing member 1069 made of P₂O₅—F-based glass.From the viewpoint of improving light takeout efficiency, a materialhaving a high refractive index is selected as the material for the firstsealing member 1068. Further, the restriction on the manufacture causedby this is relaxed by the second sealing member, and this constructioncan be actually prepared. As a result, the refractive index of the firstsealing member 1068 is higher than that of the second sealing member1069. A material having a small Abbe number is selected as the materialfor the first sealing member 1068 so that the actual refractive index ofthe first sealing member 1068 is larger than the blue light emittingelement.

The optical device 1006 shown in FIG. 38 can be formed by using the mold1025 shown in FIG. 32. In this case, the material filled into theconcave part 1026 is different from the material filled into the concavepart 1027.

When a red light emitting element is used, a material having a highrefractive index and a large Abbe number is selected as the material forthe first sealing member 1068, whereby a high refractive index can beactually selected. An example of this material is SiO₂—B₂O₃—La₂O₃-basedglass having a refractive index of 1.8 and an Abbe number of 45.

EXAMPLE 6

An optical device 1007 shown in FIG. 39 has the same construction as theoptical device shown in FIG. 38, except that a metallic thin sheet (Althin sheet) was used as the second sealing member 1079. In FIGS. 38 and39, like parts are identified with the same reference characters, andthe explanation thereof will be omitted. Light can be efficientlyreflected from the light emitting element 1010 by using a metallicmaterial as the second sealing member. The second sealing member 1079entirely functions as a reflector plate. In addition to the metallicthin sheet, for example, a resin sheet or the like may be used.

This optical device 1007 is manufactured as follows. As shown in FIG.40, the metallic thin sheet 1079 is applied to the backside of anassembly 1020 of the light emitting element 1010 and the lead parts1021, 1022. This assembly 1020 is set as a core in the mold 1025. Inthis case, the low melting glass is filled into only the upper concavepart 1026 in the pressing mold 1025. Thereafter, the mold is clamped toprovide the optical device 1007 shown in FIG. 39.

As in this example, when the material for the first sealing member 1068and the material for the second sealing member 1079 are different fromeach other, preferably, the value of the coefficient of linear expansionof the first sealing member is intermediate between the coefficient oflinear expansion of the second sealing member and the coefficient oflinear expansion of the light emitting element.

EXAMPLE 7

In this example, a flip chip-type light emitting element 1100 is used.As shown in FIG. 41, the flip chip-type light emitting element has thesame construction as the light emitting element shown in FIG. 30, exceptthat, in stead of the light transparent electrode 1016 and thep-electrode 1017, a p-electrode 1101 as a thick film is stacked on thewhole area of the p-type layer 1015. In FIGS. 30 and 41, like parts areidentified with the same reference characters, and the explanationthereof will be omitted.

The flip chip-type light emitting element 1100 is mounted on a mountlead 1021 through a submount 1110. The submount 1110 and the sublead1022 are wire connected through a bonding wire 1124 to form an assembly1120. A circuit pattern is formed in this submount 1110, and electrodes1018, 1101 in the light emitting element 1100 are electrically connectedto lead parts 1021, 1022 directly or through a bonding wire 1124. In thesame manner as in Example 1, a sealing member 1028 is formed using thisassembly 1120 as a core to provide an optical device 1008 shown in FIG.42. In a luminescent device provided with the flip chip-type lightemitting element, the necessary number of bonding wires which aredelicate in the sealing step is only one. Therefore, the process controlbecomes easy, and, further, the production yield is improved. Further,since the bonding wire is not in proximity to the light emitting elementin its light emitting face, the bonding wire does not affect externalradiation efficiency.

The same elements as in Example 1 are identified with the same referencecharacters for simplification of explanation.

The sealing members explained in Examples 2 to 6 can be applied to theassembly 1120 of the flip chip-type light emitting element 1100 shown inFIG. 41. Embodiments thereof are shown in FIGS. 42 to 45. Forsimplification of the explanation, the same elements as described aboveare identified with the same reference characters, and the explanationthereof will be omitted.

EXAMPLE 8

In this example, as shown in FIG. 47, circuit patterns 1201, 1202 aselectric power receiving and supplying means are formed on the surfaceof an inorganic material substrate 1200 made of AlN or the like. A flipchip-type light emitting element 1100 is mounted on the circuit patterns1201, 1202 through bumps 1205, 1206. The substrate 1200 is mounted onlead parts 1021, 1022 through a eutectic material. In the same manner asin Example 1, a sealing member 1028 is formed using this assembly 1220as a core to provide an optical device 1009 shown in FIG. 48.

The same elements as in Example 1 are identified with the same referencecharacters for simplification of the explanation thereof.

The sealing members explained in Examples 2 to 6 can be applied to theassembly 1220 shown in FIG. 47. Embodiments thereof are shown in FIGS.49 to 51. In FIGS. 49 to 51, for simplification of the explanation, thesame elements as described above are identified with the same referencecharacters, and the explanation thereof is omitted.

In the above embodiments, the whole assembly 1220 is covered by asealing member. Alternatively, as shown in FIG. 52, the light emittingelement 1100 and a part of the circuit patterns 1201, 1202 may becovered by a sealing member 1228. The optical device shown in FIG. 53can be used as chip LED.

In the optical device in this example, the thermally or mechanicallyweak bonding wire is absent, and any organic material is not included inthe device. Therefore, the low melting glass can be press molded at ahigher temperature. Further, stability against heat treatment in areflow oven or the like can be improved. Accordingly, the device can bemanufactured more easily, and the range of choice of the applicable lowmelting glass can also be broadened. Thus, the optical device can beprovided at lower cost.

Without limitation to the eutectic material, the optical element can bemounted through a gold bump. Also in this case, a stable wireless deviceconsisting of inorganic materials only can be formed.

EXAMPLE 9

An optical device in this example is shown in FIG. 54 (cross-sectionalview) and FIG. 55 (plan view).

This optical device 1230 includes a flip chip-type light emittingelement 1100, an AlN substrate 1231, a metal pattern 1236, and a sealingmember 1238.

In this example, the substrate 1231 is made of AlN. However, anymaterial can be used so far as at least the mounting face of the lightemitting element 1100 is made of an insulating material such as AlN. Forexample, the substrate may be such that the base part of the substrateis made of an aluminum plate and AlN is stacked onto the surface of thealuminum plate. In addition to AlN, for example, Al₂O₃ may be used asthe insulating material.

Through-holes 1231, 1232 are provided in the substrate 1231.

Substantially the whole area of the mounting face of the substrate 1231is covered by metal patterns 1235, 1236. In this example, the metalpatterns 1235, 1236 are formed by a metallization method. Therefore, thebonding force between the metal patterns 1235, 1236 and the substrate1231 is high, and increasing the area of contact between the substrate1231 and the metal patterns 1235, 1236 can further improve the bondingstrength between the substrate and the metal patterns. In this example,the metal patterns 1235, 1236 comprise tungsten plated with nickel, and,in the light emitting element mount part and the metal pattern exposedpart (part not sealed with low melting glass), gold plating is furtherprovided. The metal material has a high level of strength of bonding tothe insulating material on the substrate mount face and the sealingmember of low melting glass. Further, since the glass and the metalmaterial are substantially identical to each other in coefficient oflinear thermal expansion (approximately 10 to 20×10⁻⁶ (1/° C.)), thethermal shrinkage-derived stress is less likely to occur. The form ofthe metal pattern and the forming material may be properly selecteddepending upon the material of the substrate mount face and the materialof the sealing member.

The metal patterns 1235, 1236 function as electric power receiving andsupplying means for the light emitting element 1100. Alternatively,separately from the electric power receiving and supplying means, themetal pattern may be formed to ensure bonding strength between thesubstrate and the sealing member.

The flip chip-type light emitting element 1100 on its electrode face(lower side face in the drawing) is plated with a eutectic material.This is passed into a general-purpose reflow oven to solder the lightemitting element 1100 to the metal patterns 1235, 1236.

Here since the eutectic material plating is widely and thinly applied onthe surface of the electrode in the light emitting element 1100, heatdissipation to the substrate side is excellent. Further, even when thespacing between the p-electrode and the n-electrode is small as in theflip chip-type light emitting element, there is no fear ofshort-circuiting.

The sealing member 1238 is made of low melting glass transparent towavelength in the light emitting element 1100. Low melting glassselected from SiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based,P₂O₅—ZnO-based, SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-based low meltingglasses can be adopted as the low melting glass.

The sealing member 1238 may be molded under the reduced pressure in anitrogen atmosphere.

According to the optical device 1230, the adhesion between the lowmelting glass constituting the sealing member 1238 and the metalconstituting the metal patterns 1235, 1236 is high, and, further, a highlevel of adhesion between the above metal and the AlN substrate 1231 isalso ensured. Therefore, the sealing member 1238 is strongly bonded tothe substrate 1231, and interfacial peeling hardly occurs. Further, inthis optical device, the thermally or mechanically brittle bonding wireis absent, and, in addition, no organic material is contained in thedevice. Therefore, the low melting glass can be pressed at highertemperatures. Further, the device is stable against heat treatment in areflow oven or the like. Accordingly, the device can be manufacturedmore easily, and the range of choice of the applicable low melting glasscan also be broadened.

Embodiments shown in FIGS. 56 to 64 will be explained in detail.

(Optical Element)

Optical elements include light emitting diodes, laser diodes, and otherlight emitting elements and photodetectors. The wavelength of light tobe received and the wavelength of light to be emitted in the opticalelement are not particularly limited, and, for example, group IIInitride-based compound semiconductor elements useful for lights rangingfrom ultraviolet light to green light, and GaAs-based semiconductorelements useful for red lights may be used. Other optical elementsusable herein include those made of SiC, AlInGaP and the like.

Group III nitride-based compound semiconductor light emitting elementswhich emit short wavelengths pose a significant problem associated withthe sealing member. Group III nitride-based compound semiconductors arerepresented by general formula Al_(x)Ga_(y)In_(1-x-y)N where 0<x≦1,0≦y≦1, and 0≦x+y≦1. Among them, Al-containing group III nitride-basedcompound semiconductors include the so-called binary systems of AlN, andthe so-called ternary systems of Al_(x)Ga_(1-x)N and Al_(x)In_(1-x)Nwhere 0<x<1. In the group III nitride-based compound semiconductors andGaN, at least a part of the group III elements may be replaced withboron (B), thallium (Tl) or the like. At least a part of nitrogen (N)may also be replaced with phosphorus (P), arsenic (As), antimony (Sb),bismuth (Bi) or the like.

The group III nitride-based compound semiconductor may contain anydopant. n-type impurities usable herein include silicon (Si), germanium(Ge), selenium (Se), tellurium (Te), and carbon (C). p-type impuritiesusable herein include magnesium (Mg), zinc (Zn), beryllium (Be), calcium(Ca), strontium (Sr), and barium (Ba). After doping with the p-typeimpurity, the group III nitride-based compound semiconductor may beexposed to electron beams, plasma, or heat in an oven. This, however, isnot indispensable.

The group III nitride-based compound semiconductor layer is formed by anMOCVD (metal-organic vapor phase epitaxy) method. All the semiconductorlayers constituting the element are not always required to be formed bythe MOCVD method, and the MOCVD method may be used in combination with amolecular beam epitaxy method (MBE method), a halide vapor-phase epitaxymethod (HVPE method), sputtering, ion plating or the like.

Regarding the construction of the light emitting element, a homostructure, hetero structure, or double hetero structure with MISjunction, PIN junction or pn junction may be adopted. In the lightemitting layer, a quantum well structure (a single quantum wellstructure or a multiple quantum well structure) may also be adopted. Thegroup III nitride-based compound semiconductor light emitting elementmay be of a face-up type in which the main light receiving/emittingdirection (electrode face) is an optical axis direction in the opticaldevice, and a flip-chip type in which the main light receiving/emittingdirection is a direction opposite to the optical axis direction andreflected light is utilized.

The epitaxial growth temperature of the group III nitride-based compoundsemiconductor element is about 1050° C., and, regarding the epitaxialgrowth temperature of the GaAs-based semiconductor element, the heatresistant temperature is 600° C. or above. In both the cases, the use oflow melting glass can realize processing without heat damage.

(Inorganic Material Substrate)

In the optical device of this invention, the above-mentioned opticalelement is mounted on an inorganic material substrate. The base materialand the form of the inorganic material substrate may be properlyselected depending upon applications of the optical device. For example,rectangular plates of AlN, Al₂O₃, glass-containing Al₂O₃ or the like maybe used.

Any substrate may be used so far as at least the surface of thesubstrate is made of the base material. For example, a substrate may beused in which the center part is made of Al or Al alloy, and the surfacethereof is surrounded by AlN.

(Metal Pattern)

A metal pattern is formed on the inorganic material substrate andfunctions to electrically connect each electrode in the optical elementto an external circuit for receiving electric power from the opticalelement or supplying electric power to the optical element.Specifically, when the optical element is a light emitting element,electric power is applied from an external circuit to the opticalelement, while when the optical element is a photodetector, electricpower generated in the optical element is output to an external circuit.

In addition to electric power supplying/receiving function, the metalpattern according to the invention functions also as an adhesive layerfor stable adhesion of the inorganic sealing member to the inorganicmaterial substrate. The sealing member is disposed so as to surround theoptical element. Therefore, when the metal pattern is also formed in anarea surrounding the optical element, the area of the metal patterninterposed between the sealing member and the inorganic materialsubstrate can be maximized. The metal pattern surrounding the opticalelement is not limited to a continuous pattern and may be noncontinuous.The whole noncontinuous metal pattern is not always required to bear theelectric power supplying/receiving function.

The metal pattern further functions to reflect light. Therefore, whenthe metal pattern is provided so as to surround the optical element,light emitted from the optical element can be wholly reflected from themetal pattern, contributing to improved light takeout efficiency. Forexample, a black substrate of AlN disadvantageously absorbs lightemitted from the optical element, and a substrate of Al₂O₃ isdisadvantageously transparent to light emitted from the optical element.In this case, when the optical element is surrounded by the metalpattern, the light emitted from the optical element can be efficientlyreflected from the metal pattern and can be led to the outside of thedevice.

The material for metal pattern formation is properly selected dependingupon the material for the sealing member and the material for theinorganic material substrate so that the material for metal patternformation is bonded with good boding strength to the sealing member andthe inorganic material substrate. The metal pattern may have amultilayered structure. For example, W, W\Ni (Ni being stacked on W),W\Ni\Ag (Ni and Ag being stacked in that order on W), and copper foilsmay be adopted as the material for metal pattern formation.

Upon heating, the W layer enters in a wedge form into the sealing memberand the inorganic material in the substrate to form strong bondingbetween the sealing member and the inorganic material in the substrate.When the Ni layer is formed on the W layer, upon heating, a chemicalbond is formed between the Ni layer and the sealing member, whereby theNi layer and the sealing member are strongly boned to each other.

The Ag layer is a high-reflectance layer for improving the lightreflection efficiency of the metal pattern and is preferably partiallyformed on a peripheral site of the optical element. Further, an Au layermay be formed as bonding means on the optical element mount part. Theoptical element can be bonded to the metal pattern through the Au layer.

An Au bump may be used as bonding means. In addition to the Au bump,mount bonding means using a eutectic material such as solder bumps orsolder plating may also be used.

From the reducing the heat distortion level of the substrate, the metalpattern is preferably formed on substantially the whole area of theoptical element mount face (surface) of the substrate.

When the metal pattern is formed so as to extend to the backside of thesubstrate, a through-hole (via hole) is formed in the substrate, and thematerial for the metal pattern can be extended through the hole toconnect the pattern on the substrate surface to the pattern on thebackside of the substrate. An electric terminal is drawn from theoptical element mount face of the substrate to the backside thereof.Therefore, there is no need particular to provide a part, not covered bythe sealing member of the optical element for the electric terminal, onthe optical element mount face side of the substrate, and the whole areacan be sealed with a plate-shaped sealing member. Therefore, the massproductivity is excellent. In this case, when any through-hole is notprovided in the substrate, the sealing member of the optical element onthe optical element mount face side does not reach the backside thereof.

The method for metal pattern formation is not particularly limited. Inthe working example, a paste of W was screen printed on an inorganicmaterial substrate, and the print was then fired to form a metal patternof W on the inorganic material substrate. This W layer was plated withan Ni layer to form a metal pattern of W\Ni, followed by heat treatment.In the case of W\Ni\Ag, the Ni layer formed by plating is further platedwith Ag.

Alternatively, these metal layers may be formed by sputtering or otherwell known methods.

(Sealing Member)

The inorganic sealing member is not particularly limited so far as it istransparent to the wavelength of received or emitted light in theoptical element and can protect the optical element. When the fact thatthe heat resistant temperature of the optical element is about 600° C.is taken into consideration, however, the adoption of low melting glasshaving a melting point (softening point) below the heat resistanttemperature is preferred.

In addition to lead glass and chalcogenide glass, SiO₂—Nb₂O₅-based,B₂O₃—F-based, P₂O₅—F-based, P₂O₅—ZnO-based, SiO₂—B₂O₃—La2O₃-based orSiO₂—B₂O₃-based glasses may be adopted as the low melting glass. All ofthese low melting glasses can be pressed at 350 to 600° C.

A fluorescent material can also be dispersed in the sealing member. Aninorganic fluorescent material powder can be used as the fluorescentmaterial and can be mixed into the low melting glass. Further, rareearth ions can be doped into the low melting glass to yieldfluorescence. A proper combination of a light emitting element with afluorescent material can produce desired luminescent colors includingwhite light.

In the combination of the sealing member with the optical element,preferably, the Abbe number of the sealing member is 40 or less, therefractive index is 1.6 or more, and the wavelength of light receptionand light emission of the optical element is brought to not more than546.1 nm (wavelength of e radiation of Na). Specifically, regarding theexternal quantum efficiency of light emitted within the high refractiveindex material, a higher refractive index of the sealing material withrespect to the wavelength of emitted light is more advantageous. Therefractive index of the optical material is defined by d radiation ofNa. In general, however, the refractive index increases with reducingthe wavelength, and the level of a change in refractive index as afunction of light wavelength is indicated by the Abbe number. Inparticular, in the light emitting element of short wavelength emissionwhich poses a problem associated with the conventional resin sealing,selecting a material which is high in refractive index in d radiation ofNa and causes a significant change in refractive index with respect tothe wavelength can prevent a lowering in output of light caused byyellowing of the resin. In addition, in essence, regarding shortwavelength light, sealing with a high refractive index material can berealized, and high external quantum efficiency can be provided.

SiO₂—Nb₂O₅-based glass may be mentioned as the low melting glass havingthe above optical properties. Among others, SiO₂—Nb₂O₅—Na₂O glass ispreferred.

When a sealing member of a low melting glass sheet is put on an opticalelement followed by heating for softening, the light emitting elementcan be surrounded by the sealing member. This heating is preferablycarried out under a reduced pressure atmosphere to prevent the entry ofair into between the sealing member and the optical element. Uponheating, a chemical reaction takes place at the interface of the lowmelting glass and the metal pattern, whereby both the materials arestrongly bonded to each other.

The following examples further illustrate this invention.

EXAMPLE 10

In this example, a flip chip-type group III nitride-based compoundsemiconductor light emitting element 2010 shown in FIG. 56 was used asan optical element. This light emitting element emits blue light.

The specifications of each layer constituting the light emitting element2010 are as follows. Layers Composition p-type layer 2015 p-GaN:Mg Layer2014 including light Including InGaN layer emitting layer n-type layer2013 n-GaN:Si Buffer layer 2012 AlN Substrate 2011 Sapphire

The n-type layer 2013 made of GaN doped with Si as an n-type impurity isformed on the substrate 2011 through the buffer layer 12. In thisexample, sapphire is used as the substrate 2011. The material for thesubstrate 2011, however, is not limited to sapphire, and examples ofmaterials usable herein include sapphire, spinel, silicon carbide, zincoxide, magnesium oxide, manganese oxide, zirconium boride, and group IIInitride-based compound semiconductor single crystals. The buffer layeris formed by MOCVD using AlN. The material for the buffer layer,however, is not limited to AlN, and other materials such as GaN, InN,AlGaN, InGaN and AlInGaN may also be used. For example, a molecular beamepitaxy method (MBE method), a halide vapor-phase epitaxy method (HVPEmethod), sputtering, or ion plating may be used for the formation of thebuffer layer. When the substrate is made of a group III nitride-basedcompound semiconductor, the provision of the buffer layer can beomitted.

The substrate and the buffer layer can be if necessary removed aftersemiconductor element formation.

In this example, the n-type layer 2013 is made of GaN. Alternatively,the n-type layer 2013 may be made of AlGaN, InGaN or AlInGaN.

Further, the n-type layer 2013 has been doped with Si as an n-typeimpurity. Other n-type impurities usable herein include Ge, Se, Te, andC.

The layer 2014 including a light emitting layer may comprise a quantumwell structure (a multiple quantum well structure or a single quantumwell structure), and the structure of the light emitting element may beof single hetero type, double hetero type, and homojunction type.

The layer 2014 including a light emitting layer may also include, on itsp-type layer 2015 side, a group III nitride-based compound semiconductorlayer with a broad bandgap doped with Mg or the like. This caneffectively prevent electrons injected into the layer 2014 including alight emitting layer from diffusing into the p-type layer 2015.

The p-type layer 2015 made of GaN doped with Mg as a p-type impurity isformed on the layer 2014 including a light emitting layer. The p-typelayer 2015 may also be made of AlGaN, InGaN or InAlGaN. Zn, Be, Ca, Sr,or Ba may also be used as the p-type impurity. After the introduction ofthe p-type impurity, the resistance can be lowered by a well-knownmethod such as electron beam irradiation, heating in an oven, or plasmairradiation.

In the light emitting element having the above construction, each groupIII nitride-based compound semiconductor layer may be formed by MOCVDunder conventional conditions, or alternatively may be formed by amethod such as a molecular beam epitaxy method (MBE method), a halidevapor-phase epitaxy method (HVPE method), sputtering, or ion plating.

An n-electrode 2018 has a two-layer structure of an Al layer and a Vlayer. After the formation of the p-type layer 2015, the p-type layer2015, the layer 2014 including a light emitting layer, and a part of then-type layer 2013 are removed by etching to expose the n-type layer2013, and the n-electrode 2018 is then formed on the exposed n-typelayer 2013 by vapor deposition.

A p-electrode 2016 is stacked on the p-type layer 2015 by vapordeposition. After the formation of the individual layers and electrodesby the above steps, the step of isolating chips is carried out.

Next, an inorganic material substrate for mounting this light emittingelement 2010 is provided.

A W-containing paste is screen printed on both sides of the inorganicmaterial substrate 2021 of AlN before firing to form patterns 2023, 2024shown in FIG. 57. As shown in FIG. 57(b), a through-hole 2025 is formedin the substrate 2021. A pattern 2023 of the mount face (surface) iselectrically connected to a pattern 2024 on the backside through thethrough-hole 2025.

Thereafter, AlN is sintered at a temperature above 1500° C., and the Wpaste is baked onto the substrate 2021, whereby W is strongly bonded tothe substrate. This W can also be formed by sputtering. Alternatively,instead of W, a high melting metal such as Mo may be used.

Next, the top of the W pattern 2023 on the surface side of the substrate2021 is plated with an Ni layer 2026, and the assembly is heated atapproximately 700° C. to react Ni with W, whereby the metal pattern isstrongly bonded onto the AlN substrate 2021.

Next, as shown in FIG. 58, the light emitting element 2010 is mounted ona predetermined position through gold bumps 2027, 2028. The bump 2027 isconnected to the n-electrode 2018 in the light emitting element 2010,and the bump 2028 is connected to the p-electrode 2016 in the lightemitting element 2010. The light emitting element 2010 in such a stateas shown in FIG. 58(a), the light emitting element 2010 is surrounded bythe metal pattern 2023.

Next, as shown in FIG. 59, a low melting glass sheet as the sealingmember is put on the surface side of the substrate 2021. This assemblyis heated in a reduced pressure atmosphere for fusing to seal the lightemitting element 2010, whereby Ni on the surface of the metal pattern isstrongly chemically bonded to the low melting glass 2029 through theoxide on the Ni surface. Further, the occurrence of residual air bubblesat the time of sealing can be prevented.

When the light emitting element 2010 is of a flip chip type, the bondingwire can be omitted. Also in this respect, the mechanical stability isgood. Thus, the optical device having the above construction is suitablefor a mass production process.

Finally, the substrate 2021 is divided at a parting line D to providethe optical device of this example.

EXAMPLE 11

An optical device of another example is shown in FIGS. 60 to 63.

FIG. 60 is a plan view of this optical device. In this optical device,the pattern on the substrate surface (mount face) side is divided into afirst part (a circular part) 2103 and a second part (a bonded part)2104, 2105. A plurality of holes 2107 are formed in the first part 2103.An electrically conductive part 2108 extended to the periphery of thesubstrate is formed in the first part 2103. This electrically conductivepart 2108 is used for the application of an electric field duringplating.

The first part 2103 is a laminate of a W layer and an Ni layer formed inthe same manner as in Example 10, and a strong bond among substrate2110—first part 2103—sealing member 2140 is provided by applying aninorganic sealing member thereto. The second part 2104, 2105 of Cuformed by plating is extended through a first substrate 2111.

In the substrate 2110 in this example, Al₂O₃ is used as the basematerial, and the first substrate 2111 is applied to the secondsubstrate 2112. AlN, glass-containing Al₂O₃ and other inorganicmaterials may be used as the base material for each of the substrates.The base material for the first substrate 2111 may be different from thebase material for the second substrate 2112.

Through-holes 2107 are formed in the base material for the firstsubstrate 2111, and a metal layer in the first part 2103 as the metalpattern is also stacked on circumferential face of the holes 2107.

Metal patterns 2120, 2121, 212 shown in FIG. 62 are formed on thesurface of the second substrate 2112. The circular metal pattern 2120with a notch is located so as to face the hole 2107 in the firstsubstrate 111. As with the first part 2103 in the first metal pattern,this metal pattern 2120 is formed of a laminate of a W layer and a Nilayer. According to the metal pattern 2120 having the aboveconstruction, a satisfactory strength of bonding to an inorganicmaterial (such as low melting glass) of the sealing member which hasentered the bottom of the hole 2107 can be provided.

Metal patterns 2121, 2122 formed at the center of the second substrate2112 are provided at positions which face respectively to the secondparts 2104, 2105 in the metal pattern of the first substrate 2111. Whenthe first substrate 2111 is applied to the second substrate 2112, themetal patterns 2121, 2122 are electrically connected to the second parts2104, 2105, respectively. In the metal patterns 2121, 2122, an Au layerwas further stacked on a laminate of a W layer and a Ni layer. Theprovision of the Au layer can improve the strength of bonding betweenthe metal patterns 2121, 2122 and the second parts 2104, 2105.

Through-holes 2125, 2126 are formed in the second substrate 2112.Wide-area metal patterns 2131, 2132 are formed on the backside of thesecond substrate 2112. The metal pattern 2121 on the surface side of thesecond substrate 2112 is electrically connected to the metal pattern2131 on the backside through the electrically conductive metal materialfilled into the through-hole 2125, whereby the supply of electric powerto or reception of electric power from one of the electrodes in theelement 2010 can be carried out from the metal pattern 2131 through themetal pattern 2104 on the surface of the first substrate 2111. Likewise,the metal pattern 2122 on the surface side of the second substrate 2112is electrically connected to the metal pattern 2132 on the backsidethrough the electrically conductive metal material filled into thethrough-hole 2126, whereby the supply of electric power to or receptionof electric power from the other electrode in the element 2010 can becarried out from the metal pattern 2132 through the metal pattern 2105on the surface of the first substrate 2111.

Electrically conductive parts 2135, 2136 are formed respectively in themetal patterns 2131, 2132 formed on the backside of the second substrate2112. The electrically conductive parts 2135, 2136 are used at the timeof plating of the metal patterns 2131, 2132.

In the metal patterns 2131, 2132 on the backside of the second substrate2112, an Au layer was further stacked on a laminate of a W layer and aNi layer. The provision of the Au layer can improve the strength ofbonding between the metal patterns 2131, 2132 and an external electrode.The metal material within the through-holes 2125 and 2126 is formedtogether with the formation of the metal patterns 2131, 2132 and themetal patterns 2121, 2122 on the surface side.

In this example, the first substrate 2111 is separately provided fromthe second substrate 2112. They are then bonded to each other to form aninorganic material substrate 2110. The first substrate 2111 and thesecond substrate 2112 are bonded to each other by any method withoutparticular limitation, for example, with the aid of an adhesive.

When the substrate 2110 is divided, a metal pattern can be formed in theparted face, resulting in improved degree of freedom of circuit design.When the hole 2107 is extended through the substrate 2110, in the caseof some sealing member material, the material is adhered to the lowermold supporting the substrate 2110, leading to a fear of deteriorationin demolding. As in this example, when the hole 2107 has a closed end,the contact between the material for the sealing member and the lowermold can be prevented. Further, when the hole 2107 is a through-hole,negative pressure for releasing air between the sealing member and thesubstrate surface cannot be applied to the whole area of the substratewithout difficulties. On the other hand, when the hole 2107 has a closedend, even in the case where air stays between the sealing member and thesubstrate, air refuges in the hole, the occurrence of air bubblesbetween the sealing member and the substrate can be prevented. Cloggingof one opening part in the through-hole in the first substrate 2111 withthe second substrate 2112 to form the closed-end hole 2107 is superiorin mass productivity to the formation of a closed-end hole in a singletimber.

The sealing member 2140 made of an inorganic light transparent materialis covered on the surface of the substrate 2110. The material for thesealing member 2140 is of course strongly bonded to the metal pattern2103 on the surface of the substrate 2110, and, at the same time, inthis example, the material for the sealing member 2140 sneaks in thehole 2107, resulting in physical engagement between the material for thesealing member 2140 and the substrate 2110, whereby, even when there isa large difference in coefficient of thermal expansion between thesealing member 2140 and the substrate 2110, the deformation of both thematerials can be physically suppressed and, consequently, the separationof the sealing member 2140 from the substrate 2110 can be more reliablyprevented.

Thus, since the provision of concaves and convexes on the substratesurface covered by the sealing member can cause physical engagementbetween the sealing member and the substrate, the separation of thesealing member from the substrate can be more reliably prevented. Inaddition to the closed-end hole of this example, a groove orthrough-hole can also be used as the concave-convex. Further, rougheningof the substrate surface (Ra=not less than 0.5 μm) can realize physicalengagement between both the materials. When the surface of the basematerial in the substrate is roughened, the roughness is reflected intothe surface of the metal pattern when the metal pattern is formed on thesubstrate. Further, the concave-convex can also be formed by providingholes only in the metal pattern 2103, that is, the formation of themetal pattern 2103, for example, in a lattice form.

The action of the concave-convex is also effective in the case where thesealing member made of an inorganic light transparent material iscovered directly on the base material of the inorganic materialsubstrate without through any metal pattern.

FIG. 64 shows an example in which a closed-end hole 2257 is formed inthe substrate of the optical element of Example 10. As shown in FIGS. 64and 60, preferably the holes, that is, concaves-convexes, are evenlydistributed on the surface of the substrate from the viewpoint ofensuring engagement between the sealing materials and theconcaves-convexes in the whole area of the substrate surface to preventthe separation of the sealing material from the concave-convex.

Embodiments shown in FIGS. 65 to 74 will be explained in detail.

(Optical Element)

Optical elements include light emitting diodes, laser diodes, and otherlight emitting elements and photodetectors. The wavelength of light tobe received and the wavelength of light to be emitted in the opticalelement are not particularly limited, and, for example, group IIInitride-based compound semiconductor elements useful for lights rangingfrom ultraviolet light to green light, and GaAs-based semiconductorelements useful for red lights may be used. Other optical elementsusable herein include those made of SiC, AlInGaP and the like.

Group III nitride-based compound semiconductor light emitting elementswhich emit short wavelengths pose a significant problem associated withthe sealing member. Group III nitride-based compound semiconductors arerepresented by general formula Al_(X)Ga_(Y)In_(1-X-Y)N where 0<X≦1,0≦Y≦1, and 0≦X+Y≦1. Among them, Al-containing group III nitride-basedcompound semiconductors include the so-called binary systems of AlN, andthe so-called ternary systems of Al_(x)Ga_(1-x)N and Al_(x)In_(1-x)Nwhere 0<x<1. In the group III nitride-based compound semiconductors andGaN, at least a part of the group III elements may be replaced withboron (B), thallium (Tl) or the like. At least a part of nitrogen (N)may also be replaced with phosphorus (P), arsenic (As), antimony (Sb),bismuth (Bi) or the like.

The group III nitride-based compound semiconductor may contain anydopant. n-type impurities usable herein include silicon (Si), germanium(Ge), selenium (Se), tellurium (Te), and carbon (C). p-type impuritiesusable herein include magnesium (Mg), zinc (Zn), beryllium (Be), calcium(Ca), strontium (Sr), and barium (Ba). After doping with the p-typeimpurity, the group III nitride-based compound semiconductor may beexposed to electron beams, plasma, or heat in an oven. This, however, isnot indispensable.

The group III nitride-based compound semiconductor layer is formed by anMOCVD (metal-organic vapor phase epitaxy) method. All the semiconductorlayers constituting the element are not always required to be formed bythe MOCVD method, and the MOCVD method may be used in combination with amolecular beam epitaxy method (MBE method), a halide vapor-phase epitaxymethod (HVPE method), sputtering, ion plating or the like.

Regarding the construction of the light emitting element, a homostructure, hetero structure, or double hetero structure with MISjunction, PIN junction or pn junction may be adopted. In the lightemitting layer, a quantum well structure (a single quantum wellstructure or a multiple quantum well structure) may also be adopted. Thegroup III nitride-based compound semiconductor light emitting elementmay be of a face-up type in which the main light receiving/emittingdirection (electrode face) is an optical axis direction in the opticaldevice, and a flip-chip type in which the main light receiving/emittingdirection is a direction opposite to the optical axis direction andreflected light is utilized.

The epitaxial growth temperature of the group III nitride-based compoundsemiconductor element is about 1050° C., and, regarding the epitaxialgrowth temperature of the GaAs-based semiconductor element, the heatresistant temperature is 600° C. or above. In both the cases, the use oflow melting glass can realize processing without heat damage.

(Inorganic Material Substrate)

In the optical device of this invention, the above-mentioned opticalelement is mounted on an inorganic material substrate. The base materialand the form of the inorganic material substrate may be properlyselected depending upon applications of the optical device. For example,rectangular plates of AlN, Al₂O₃, glass-containing Al₂O₃ or the like maybe used.

Any substrate may be used so far as at least the surface of thesubstrate is made of the base material. For example, a substrate may beused in which the center part is made of Al or Al alloy, and the surfacethereof is surrounded by AlN.

(Metal Pattern)

A first metal pattern and a second metal pattern are formed on aninorganic material substrate.

The first metal pattern electrically connects each electrode in theoptical element to an external circuit, whereby electric power isreceived from and supplied to the optical element. Specifically, whenthe optical element is a light emitting element, electric power isapplied to the optical element from the external circuit. On the otherhand, when the optical element is a photodetector, electric powergenerated in the optical element is taken out to the external circuit.

The second metal pattern functions as an adhesive layer for stablybonding the inorganic sealing member to the inorganic materialsubstrate. Since the sealing member is disposed so as to surround theoptical element, the second metal pattern is also disposed so as tosurround the first metal pattern on which the optical element ismounted. This can maximize the area of the second metal patterninterposed between the sealing member and the inorganic materialsubstrate. The second metal pattern is not limited to a continuouspattern and may be noncontinuous.

The first metal pattern may be continuous to the second metal pattern.When the first metal pattern is insulated from the second metal pattern,however, electric field plating of materials optimal for respectivefunctions can be carried out by independently applying the electricfield.

The metal layer also functions to reflect light, and, thus, light fromthe optical element can be fully reflected to improve light takeoutefficiency by surrounding the optical element with the first metalpattern and the second metal pattern. For example, a black substrate ofAlN disadvantageously absorbs light from the optical element, and asubstrate of Al₂O₃ is disadvantageously transparent to light emittedfrom the optical element. In this case, when the optical element issurrounded by the metal pattern, the light from the optical element canbe efficiently reflected from the metal pattern and can be led to theoutside of the device.

In order to improve reflection efficiency of light, preferably, thesurface of the first metal pattern formed closer to the optical elementis made of a metal layer with a high refractive index such as an Aglayer or the like.

In the material for first metal pattern formation, the surface layershould be compatible with a bonding material for bonding the opticalelement. For example, when Au bumps are used as the bonding material,the surface layer in the first metal pattern is made of Au or Ag. Layersother than the surface layer are preferably made of a material common tothese layers and the second metal pattern from the viewpoint ofimproving productivity.

In addition to Au bumps, eutectic materials such as solder bumps andsolder plating can be used as a bonding material for bonding the opticalelement to the substrate.

The Ag layer has high light reflectance and, thus, in the first metalpattern, is preferably partially formed in the site on the periphery ofthe optical element.

The material for the second metal pattern formation is properly selecteddepending upon the material for the sealing member and the material forthe inorganic material substrate so that the material for metal patternformation is bonded with good boding strength to the sealing member andthe inorganic material substrate. The metal pattern may have amultilayered structure. For example, W, W\Ni (Ni being stacked on W),W\Ni\Ag (Ni and Ag being stacked in that order on W), and copper foils(strength of bonding to the glass-containing Al₂O₃ substrate can beprovided through an oxide, and the substrate has a coefficient ofthermal expansion (13×10⁻⁶ (1/° C.)) close to the inorganic sealingmember) may be adopted as the material for metal pattern formation.

Upon heating, the W layer enters in a wedge form into the sealing memberand the inorganic material in the substrate to form strong bondingbetween the sealing member and the inorganic material in the substrate.When the Ni layer is formed on the W layer, upon heating, a chemicalbond is formed between the Ni layer and the sealing member, whereby theNi layer and the sealing member are strongly boned to each other.

The surface of the second metal pattern is preferably made of a materialhaving good wettability by the sealing member in a softened state. Atleast one of Ni, Cr, Ti, Cu or alloys thereof may be mentioned as thistype of material.

The second metal pattern for joining the substrate surface to thesealing member is preferably formed in the largest possible area on thesubstrate surface.

The second metal pattern which should occupy a large area on thesubstrate surface is preferably made of a material having a coefficientof thermal expansion intermediate between the coefficient of thermalexpansion of the sealing member (coefficient of thermal expansion:small) and the coefficient of the thermal expansion of the inorganicmaterial substrate (coefficient of thermal expansion: large). This canreduce the difference in coefficient of thermal expansion between thesealing member and the inorganic material substrate. Upon cooling of thehigh temperature state adopted in covering optical element with thesealing member to room temperature, the sealing member and the inorganicmaterial substrate are shrunken on a level depending upon thecoefficient of thermal expansion of each of the sealing member and theinorganic material substrate. When there is a significant difference incoefficient of thermal expansion between the sealing member and theinorganic material substrate, however, there is a fear of causingdeformation of the substrate or separation of the sealing member fromthe substrate. The interposition of a second metal pattern intermediatebetween the coefficient of the substrate and the coefficient of thesealing member can relax stress based on the difference in coefficientof thermal expansion between the substrate and the sealing member.

When the sealing member and the substrate are made of low melting glassand AlN, respectively, the coefficient of thermal expansion is17.3×10⁻⁶/° C. for low melting glass and 4.5×10⁻⁶/° C. for AlN. In thiscase, Ni (coefficient of thermal expansion: 12.8×10⁻⁶/° C.) having acoefficient of thermal expansion intermediate between the sealing memberand the substrate is preferably adopted as a material for metal patternformation.

From the viewpoint of reducing the thermal deformation level of thesubstrate, the formation of the second metal pattern on a large area ofthe optical element mount face (surface) of the substrate is preferred.More preferably, a metal pattern made of an identical or similarmaterial is also formed in a large area on the backside of the substrateto further suppress the thermal deformation of the substrate.

In forming the metal pattern material on the substrate surface so as toextend to the backside of the substrate, the pattern on the substratesurface can be connected to the pattern on the backside of the substrateby providing a through-hole (via hole) in the substrate and filling thematerial for the metal pattern into the through-hole. Since the electricterminal is drawn from the optical element mount face of the substrateto the backside, there is no particular need to provide a portion, notcovered by the sealing member of the optical element, for the electricterminal on the optical element mount face side of the substrate and thewhole area can be sealed with a sealing member sheet. Therefore, themass productivity is excellent. In this case, when no through-hole isprovided in the substrate, the sealing member of the optical element onthe optical element mount face side does not reach the backside. Whenthe through-hole is formed on the optical element mount position, theheat from the optical element can be released to the outside of thedevice through the metal pattern material within the through-hole. Thiscan improve heat dissipation efficiency and is particularly suitable forthe group III nitride-based compound semiconductor light emittingelement having a large calorific value.

The method for first and second metal pattern formation is notparticularly limited. In the working example, however, a paste of W wasscreen printed on an inorganic material substrate, and the print wasthen fired to form a metal pattern of W on the inorganic materialsubstrate. This W layer was plated with a Ni layer to form a metalpattern of W\Ni, followed by heat treatment. In the case of W\Ni\Ag, theNi layer formed by plating is further plated with Ag.

Alternatively, these metal layers may be formed by sputtering or otherwell known methods.

A metallic thin film such as a Cu foil can also be bonded onto thebackside of the substrate where a complicated and accurate pattern formis not required.

(Sealing Member)

The inorganic sealing member is not particularly limited so far as it istransparent to the wavelength of received or emitted light in theoptical element and can protect the optical element. When the fact thatthe heat resistant temperature of the optical element is about 600° C.is taken into consideration, however, the adoption of low melting glasshaving a melting point (softening point) below the heat resistanttemperature is preferred.

In addition to lead glass and chalcogenide glass, SiO₂—Nb₂O₅-based,B₂O₃—F-based, P₂O₅—F-based, P₂O₅—ZnO-based, SiO₂—B₂O₃—La₂O₃-based orSiO₂—B₂O₃-based glasses may be adopted as the low melting glass. All ofthese low melting glasses can be pressed at 350 to 600° C.

A fluorescent material can also be dispersed in the sealing member. Aninorganic fluorescent material powder can be used as the fluorescentmaterial and can be mixed into the low melting glass. Further, rareearth ions can be doped into the low melting glass to yieldfluorescence. A proper combination of a light emitting element with afluorescent material can produce desired luminescent colors includingwhite light.

In the combination of the sealing member with the optical element,preferably, the Abbe number of the sealing member is 40 or less, therefractive index is 1.6 or more, and the wavelength of light receptionand light emission of the optical element is brought to not more than546.1 nm (wavelength of e radiation of Na). Specifically, regarding theexternal quantum efficiency of light emitted within the high refractiveindex material, a higher refractive index of the sealing material withrespect to the wavelength of emitted light is more advantageous. Therefractive index of the optical material is defined by d radiation ofNa. In general, the refractive index increases with reducing thewavelength, and the level of a change in refractive index as a functionof light wavelength is indicated by the Abbe number. In particular, inthe light emitting element of short wavelength emission which poses aproblem associated with the conventional resin sealing, selecting amaterial which is high in refractive index in d radiation of Na andcauses a significant change in refractive index with respect to thewavelength can prevent a lowering in output of light caused by yellowingof the resin. In addition, in essence, regarding short wavelength light,sealing with a high refractive index material can be realized, and highexternal quantum efficiency can be provided.

SiO₂—Nb₂O₅-based glass may be mentioned as the low melting glass havingthe above optical properties. Among others, SiO₂—Nb₂O₅—Na₂O glass ispreferred.

When a sealing member of a low melting glass sheet is put on an opticalelement followed by heating for softening, the light emitting elementcan be surrounded by the sealing member. This heating is preferablycarried out under a reduced pressure atmosphere to prevent the entry ofair into between the sealing member and the optical element. Uponheating, a chemical reaction takes place at the interface of the lowmelting glass and the second metal pattern, whereby both the materialsare strongly bonded to each other.

Concaves-convexes may be formed in the sealing member in a softenedstate put on top of the optical element. For example, a concave part(thin thickness part) can be provided in the sealing member along thesplitting line of the inorganic material substrate to facilitate thesplitting work. Further, in this case, the sealing member is formed in afine lattice form by convex parts corresponding to chips and concavesalong the splitting lines. The thermal deformation does not correspondto the size of the sheet before concave-convex formation but to the sizeof the fine lattice, and, thus, the thermal deformation of the sealingmember can be reduced. Even when there is a significant difference incoefficient of thermal expansion between the sealing member and thesubstrate, the separation between the substrate and the sealing membercan be prevented. Further, a problem of the warpage of the substrate canbe reduced.

When the convex part of the sealing member is formed in a convex lensform, light from the light emitting element can be allowed to focus inan optical axis direction. Further, light from the outside of the devicecan be allowed to focus on the photodetector. In this case, a highrefractive index material is preferably used as the material for thesealing member.

The sealing member in a softened state is preferably applied to theoptical element under the reduced pressure from the viewpoint ofpreventing air from being trapped within the sealing member. Concavesand convexes in the sealing member can be formed by applying a sealingmember sheet to the optical element and then pressing the assemblyduring a period in which the sealing member is maintained in a softenedstate, or reheating the assembly to soften the sealing member forpressing.

This invention will be explained with reference to the followingexamples.

EXAMPLE 12

In this example, a flip chip-type group III nitride-based compoundsemiconductor light emitting element 3010 shown in FIG. 65 was used asan optical element. This light emitting element emits blue light.

The specifications of each layer constituting the light emitting element3010 are as follows. Layers Composition p-type layer 3015 p-GaN:Mg Layer3014 including light Including InGaN layer emitting layer n-type layer3013 n-GaN:Si Buffer layer 3012 AlN Substrate 3011 Sapphire

The n-type layer 3013 made of GaN doped with Si as an n-type impurity isformed on the substrate 3011 through the buffer layer 3012. In thisexample, sapphire is used as the substrate 3011. The material for thesubstrate 3011, however, is not limited to sapphire, and examples ofmaterials usable herein include sapphire, spinel, silicon carbide, zincoxide, magnesium oxide, manganese oxide, zirconium boride, and group IIInitride-based compound semiconductor single crystals. The buffer layeris formed by MOCVD using AlN. The material for the buffer layer,however, is not limited to AlN, and other materials such as GaN, InN,AlGaN, InGaN and AlInGaN may also be used. For example, a molecular beamepitaxy method (MBE method), a halide vapor-phase epitaxy method (HVPEmethod), sputtering, or ion plating may be used for the formation of thebuffer layer. When the substrate is made of a group III nitride-basedcompound semiconductor, the provision of the buffer layer can beomitted.

The substrate and the buffer layer can be if necessary removed aftersemiconductor element formation.

In this example, the n-type layer 3013 is made of GaN. Alternatively,the n-type layer 3013 may be made of AlGaN, InGaN or AlInGaN.

Further, the n-type layer 3013 has been doped with Si as an n-typeimpurity. Other n-type impurities usable herein-include Ge, Se, Te, andC.

The layer 3014 including a light emitting layer may comprise a quantumwell structure (a multiple quantum well structure or a single quantumwell structure), and the structure of the light emitting element may beof single hetero type, double hetero type, and homojunction type.

The layer 3014 including a light emitting layer may also include, on itsp-type layer 3015 side, a group III nitride-based compound semiconductorlayer with a broad bandgap doped with Mg or the like. This caneffectively prevent electrons injected into the layer 3014 including alight emitting layer from diffusing into the p-type layer 3015.

The p-type layer 3015 made of GaN doped with Mg as a p-type impurity isformed on the layer 3014 including a light emitting layer. The p-typelayer 3015 may also be made of AlGaN, InGaN or InAlGaN. Zn, Be, Ca, Sr,or Ba may also be used as the p-type impurity. After the introduction ofthe p-type impurity, the resistance can be lowered by a well-knownmethod such as electron beam irradiation, heating in an oven, or plasmairradiation.

In the light emitting element having the above construction, each groupIII nitride-based compound semiconductor layer may be formed by MOCVDunder conventional conditions, or alternatively may be formed by amethod such as a molecular beam epitaxy method (MBE method), a halidevapor-phase epitaxy method (HVPE method), sputtering, or ion plating.

An n-electrode 3018 has a two-layer structure of an Al layer and a Vlayer. After the formation of the p-type layer 3015, the p-type layer15, the layer 3014 including a light emitting layer, and a part of then-type layer 3013 are removed by etching to expose the n-type layer3013, and the n-electrode 3018 is formed by vapor deposition on theexposed n-type layer 3013.

A p-electrode 3016 is stacked on the p-type layer 3015 by vapordeposition. After the formation of the individual layers and electrodesby the above steps, the step of isolating chips is carried out.

Next, an inorganic material substrate for mounting the light emittingelement 3010 is provided.

A base material for an inorganic material substrate 3021 in this exampleis AlN, and metal patterns 3023, 3024 are provided on respective upperand lower sides thereof. As shown in FIG. 66, the upper pattern 3023comprises first metal patterns 3025 n, 3025 p and a second metal pattern26. The first metal pattern 3025 n is connected to the optical element3010 in its n-electrode 3018 through the Au bump 3027. The first metalpattern 3025 p is connected to the optical element in its p-electrode3016 through an Au bump 3028. As shown in FIG. 67, the first metalpattern 25 n is electrically connected to the metal pattern 3024 n onthe backside of the substrate through a through-hole 3031 formed in thebase material of the inorganic material substrate 3021. Likewise, thefirst metal pattern 3025 p is electrically connected to a metal pattern3024 p on the backside of the substrate through a through-hole 3032. Asshown in FIG. 68 (an enlarged view of the principal part of FIG. 67),the through-holes 3031, 3032 are filled with Cu by plating.

The second metal pattern 3026 is elongated from the first metal patterns3025 n, 3025 p and is formed in a circular region surrounding the firstmetal patterns 3025 n, 3025 p.

As shown in FIG. 69, the metal patterns 3024 n and 3024 p on thebackside are preferably formed in the largest possible area. Thus, thedeformation level of the substrate 3021 upon exposure to heat historycan be brought to a value closer to the deformation level of the sealingmember 3029 by bonding of the large-area pattern made of a metalmaterial having a coefficient of thermal expansion intermediate betweenthe sealing member and the substrate to the backside of the substrate3021. Therefore, the warpage of the substrate 3021 and the separationbetween the sealing member and the substrate can be more reliablyprevented.

Each metal pattern is formed as follows. At the outset, a W-containingpaste is coated on both sides of the inorganic material substrate 3021with through-holes before firing and the through-holes, for example, byscreen printing. Thereafter, AlN is sintered at a temperature above1500° C., and the W paste is baked onto the substrate 3021, whereby W isstrongly bonded to the substrate. This W can also be formed bysputtering. Alternatively, instead of W, a high melting metal such as Momay be used.

Next, a Ni layer is formed on the W pattern by plating, followed byheating at about 700° C. to react Ni with W, whereby the metal patternis strongly bonded onto the AlN substrate 3021.

Ni is strongly chemically bonded to the sealing member made of aninorganic light transparent material. Since the inorganic material forthe sealing member in a softened state has good wettability by Ni, thematerial for the sealing member comes into contact with the whole areaof the second electrode pattern to prevent the occurrence of air bubblesand, at the same time, high bonding strength can be provided between thesealing member and the second electrode pattern.

In the first metal patterns 3025 n, 3025 p, preferably, good bonding tothe top of the Ni layer through Au bumps can be realized, and a highreflectance Ag layer is formed. When light emitting element has areflective face on its bottom, taking into consideration only bondingthrough Au bumps suffices for good results, and, for example, withrespect to a blue light emitting element, an Au layer may be formed onthe Ni layer.

Since through-holes 3031, 3032 are formed on positions just under thefirst metal patterns 3025 n, 3025 p, heat from the optical element 10can be efficiently released to the outside of the device (backside ofthe substrate 3021) through the metal material within the through-holes.

Next, as shown in FIG. 67, the light emitting element 3010 is mounted ata predetermined position through Au bumps 3027, 3028. The bump 3027 isconnected to the light emitting element 3010 in its n-electrode 3018,and the bump 3028 is connected to the light emitting element 3010 in itsp-electrode 3016. In such a state as shown in FIG. 66, the lightemitting element 3010 is surrounded by the first metal patterns 3025 nand 3025 p.

Next, as shown in FIG. 67, a low melting glass sheet as the sealingmember is put on the surface side of the substrate 3021, and theassembly is heated in a reduced pressure atmosphere to fuse the lowmelting glass to the substrate 3021, thereby sealing the light emittingelement 3010. Thus, Ni on the surface of the metal pattern and the lowmelting glass 3039 are chemically and strongly bonded to each otherthrough an oxide on the Ni surface. Further, the occurrence of residualair bubbles at the time of sealing can be prevented.

When the low melting glass sheet has softened, preferably, the assemblyis pressed to form concaves and convexes thereon. The concave part inthe sealing member 3039 is allowed to conform to the splitting line 3037(notch) in the substrate 3021, the substrate splitting work becomeseasy. The convex part in the sealing member 3039 is preferably in a lensform to improve light takeout efficiency.

In the above series of production process, the light emitting element3010 is connected to the first metal patterns 3025 n and 3025 p throughgold bumps 3027, 3028 having a melting point above the processingtemperature, and, thus, there is no fear of causing the bumps 3027, 3028to be softened by the sealing temperature. Therefore, even when force isapplied to the light emitting element during sealing work, the positionof the light emitting element 3010 is not deviated from thepredetermined position. When a flip chip-type light emitting element isadopted as the light emitting element 3010, the provision of the bondingwire is omitted. Also in this point, mechanical stability is ensured.Therefore, it can be said that the optical device having the aboveconstruction is suitable for a mass production process.

Further, the coefficient of thermal expansion of the Ni layer occupyinga major part of the layer thickness of the metal pattern is 12.8×10⁻⁶/°C. which is intermediate between the coefficient of thermal expansion ofAlN (4.5×10⁻⁶/° C.) and the coefficient of thermal expansion of lowmelting glass 3039 (17.3×10⁻⁶/° C).

Thus, the interposition of the metal pattern between the inorganicsealing member 3039 and the inorganic material substrate 3021 canrealize a strong bond between the sealing member 3039 and the substrate3021 and, at the same time, can reduce stress caused by a difference incoefficient of thermal expansion between the sealing member 3039 and thesubstrate 3021. Therefore, unfavorable phenomena such as warpage andcracking in the substrate 3021 and separation of the sealing member 3039from the substrate 3021 can be reliably prevented.

Finally, the substrate 3021 is split in the splitting line 3037 toprovide optical devices of this example.

Variants of this example are shown in FIGS. 70 to 73. In FIG. 22 andFIGS. 70 to 73, like parts are identified with the same referencecharacters, and the explanation thereof will be omitted.

In the optical device shown in FIG. 69, the second metal pattern 3041 isin a rectangular circular form.

In the optical device shown in FIG. 70, the second metal pattern 43 isnoncontinuous.

In the example shown in FIG. 72, instead of the sapphire substrate, aGaN substrate 3011 a or SiC was adopted as the substrate for the flipchip-type light emitting element. Since the substrate for the elementhas a higher refractive index than the sapphire substrate, combiningthis substrate with a high refractive index sealing member (such as lowmelting glass) can improve light takeout efficiency.

Chamfering the peripheral part of the GaN substrate 3011 a can furtherimprove the efficiency of light takeout from the optical element 3010.

Further, in the example shown in FIG. 72, Al₂O₃ which has a largercoefficient of thermal expansion (coefficient of thermal expansion:6.7×10⁻⁶) and is more inexpensive than AlN was adopted as the basematerial for the inorganic material substrate 3051.

In the example shown in FIG. 73, glass-containing Al₂O₃ was adopted asthe base material for the inorganic material substrate 3061. Further, aCu foil was adhered to the whole area of the substrate 3061. Cu wasfilled into the through-holes 3031 and 3032 by plating. Upon heating ofthe inorganic material substrate 3061 to 1000° C., Cu is chemicallybonded to Al₂O₃. The formation of a Cu layer, having a coefficient ofthermal expansion similar to the glass, in a large area on the backsideof the glass-containing Al₂O₃ substrate can prevent problems of thewarpage of the substrate and the separation between the sealing memberand the substrate.

The base (Cu foil) for the first metal pattern is identical to the base(Cu foil) for the second metal pattern, and only light emitting elementmount areas 3025 n, 3025 p are plated with Ag and Au. This can be easilycarried out by masking the second metal pattern area.

For example, a construction may be adopted in which an identical base Cufoil is plated with Ni, and, with respect to a blue light emittingelement, a reflective layer of a second metal pattern may be provided.Thus, the first metal patterns 3025 n, 3025 p may not be separated fromthe second metal pattern 3026.

EXAMPLE 13

An optical device of this example is shown in FIG. 74. A light emittingelement 3100 used in this example is of a type which has an-electrode inits upper and lower parts. Therefore, the provision of the bonding wire3101 is necessary.

A through-hole 3111 is formed in the inorganic material substrate 3110made of AlN, and Cu is filled into the through-hole 3111 by plating. Ametal pattern of W\Ni is formed in a large area on both sides of thesubstrate 3110. This metal pattern is formed in the same manner as inExample 12.

One electrode in the light emitting element 3100 is mounted on the firstmetal pattern 3113 a on the through-hole 3111 from the viewpoint ofimproving heat lead-out efficiency. A bonding wire 3101 is drawn fromthe other electrode and is bonded to the second metal pattern 3113 b.

On the other hand, a spacer sheet 3120 made of low melting glass isprovided. Holes within which the light emitting element 3100 and thebonding wire 3101 are placed are formed in the spacer 3120. The spacer3120 may be put on top of the substrate 3110 without interference to thelight emitting element 3100 and the bonding wire 3101 (state shown inFIG. 74). In this state, a sealing member 3130 made of low melting glassis mounted. In this case, there is a fear of causing the bonding wire3101 to be deformed by the material for the sealing member. Thisdeformation, however, is regulated by the spacer 3120. Therefore,cutting or short-circuiting of the bonding wire 3101 can be prevented.

From the viewpoint of protecting the bonding wire 3101, preferably, thespacer 3120 sneaks to the lower side of the bonding wire 3101.

Next, embodiments shown in FIGS. 75 to 83 will be explained in detail.

(Light Emitting Element)

Light emitting elements include light emitting diodes, laser diodes, andother light emitting elements. The emission wavelength of the lightemitting element is not particularly limited. For example, group IIInitride-based compound semiconductor elements useful for lights rangingfrom ultraviolet light to green light, and GaAs-based semiconductorelements useful for red lights may be used. Other light emittingelements usable herein include those made of SiC, AlInGaP and the like.

As described above, the group III nitride-based compound semiconductorlight emitting element provided with an insulating substrate has aproblem associated with waste heat. When this light emitting element isused, for example, as a white light source, high output is particularlyrequired.

Group III nitride-based compound semiconductors are represented bygeneral formula Al_(X)Ga_(Y)In_(1-X-Y)N where 0<X≦1, 0≦Y≦1, and 0≦X+Y≦1.Among them, Al-containing group III nitride-based compoundsemiconductors include the so-called binary systems of AlN, and theso-called ternary systems of Al_(x)Ga_(1-x)N and Al_(x)In_(1-x)N where0<x<1. In the group III nitride-based compound semiconductors and GaN,at least a part of the group III elements may be replaced with boron(B), thallium (Tl) or the like. At least a part of nitrogen (N) may alsobe replaced with phosphorus (P), arsenic (As), antimony (Sb), bismuth(Bi) or the like.

The group III nitride-based compound semiconductor may contain anydopant. n-type impurities usable herein include silicon (Si), germanium(Ge), selenium (Se), tellurium (Te), and carbon (C). p-type impuritiesusable herein include magnesium (Mg), zinc (Zn), beryllium (Be), calcium(Ca), strontium (Sr), and barium (Ba). After doping with the p-typeimpurity, the group III nitride-based compound semiconductor may beexposed to electron beams, plasma, or heat in an oven. This, however, isnot indispensable.

The group III nitride-based compound semiconductor layer is formed by anMOCVD (metal-organic vapor phase epitaxy) method. All the semiconductorlayers constituting the element are not always required to be formed bythe MOCVD method, and the MOCVD method may be used in combination with amolecular beam epitaxy method (MBE method), a halide vapor-phase epitaxymethod (HVPE method), sputtering, ion plating or the like.

Regarding the construction of the light emitting element, a homostructure, hetero structure, or double hetero structure with MISjunction, PIN junction or pn junction may be adopted. In the lightemitting layer, a quantum well structure (a single quantum wellstructure or a multiple quantum well structure) may also be adopted. Thegroup III nitride-based compound semiconductor light emitting elementmay be of a face up-type in which the main light emitting direction(electrode face) is an optical axis direction in the luminescent device,and a flip chip-type in which the main light emitting direction is adirection opposite to the optical axis direction and reflected light isutilized.

(Submount)

The base material for the submount may be properly selected dependingupon the applications of the luminescent device so far as it is highlythermally conductive. For example, inorganic materials such as AlN,Al₂O₃, SiC, Si₃N₄, and Si may be selected.

The inorganic material for the formation of the submount has acoefficient of thermal expansion intermediate between the semiconductormaterial in the light emitting element and the metal material in thelead frame. Accordingly, even when large heat history is applied duringthe manufacturing process of the luminescent device (for example, whenthe submount is soldered to the first and second lead frames), thestress caused by the coefficient of thermal expansion of the lightemitting element and the lead frame can be relaxed.

The submount may be in any form so far as one end of the submount can beset in a first concave part formed in the first lead frame, and theother end can be set in a second concave part formed in the second leadframe.

When a flip chip-type light emitting element is adopted, the wire isomitted. Accordingly, the application of a large current to the lightemitting element becomes possible. Consequently, high-brightnessemission of the light emitting element can be realized and, in addition,the heat of the light emitting element can be efficiently dissipated.Further, the omission of the wire can improve the impact resistance ofthe luminescent device.

Instead of the wire, a wiring pattern such as a through-hole or a sidemetal is formed in the submount. Each electrode in the light emittingelement mounted on the upper surface of the submount is electricallyconnected through this wiring pattern to the first lead frame and thesecond lead frame. The surface layer in the material for metal patternformation should be compatible with the bonding material for bonding thelight emitting element. For example, when Au bumps are used as thebonding material, the surface layer of the metal pattern is made of Auor Ag.

In addition to the Au bump, eutectic materials such as solder bumps orsolder plating may be used as a bonding material for bonding the lightemitting element to the wiring pattern in the submount.

(First Lead Frame and Second Lead Frame)

The first concave part is formed at the one end of the first lead frame,and the second concave part is formed at one end of the second leadframe. The first concave part and the second concave part can be formedby forming a groove by cutting or etching in the thickness-wisedirection in the first and second lead frames. Alternatively, the firstand second concave parts may be formed by pressing the material for thefirst lead frame and the material for the second lead frame. A methodmay also be adopted in which convex parts are provided on the surface ofthe first and second lead frames and a part surrounded by the convexparts is used as the concave part.

The concave part functions as a receiving seat for the submount, and theshape and the depth thereof are properly designed according to thesubmount.

One end of the submount is set to the first concave part, and the otherend is set to the second concave part. The submount and the first andsecond lead frames are mechanically fixed, for example, by solder (forexample, Pb—Sn or Au—Sn) or Ag paste made of a metallic eutecticmaterial.

The submount mounting position is stabilized by reducing the marginbetween the submount and the peripheral wall of the first and secondconcaves, for example, when the submount and the first and secondconcave parts are in a substantially fitted state, whereby displacementof the light emitting element can be prevented. Thus, light distributioncharacteristics in the case where the light emitting element has beensealed with a lens-shaped sealing member are stabilized.

In such a state that the submount is set in the first and secondconcaves, when the submount is substantially level with the height ofthe first and second lead frames, light released laterally from thelight emitting element can be easily controlled to improve the lighttakeout efficiency.

Further, when the submount is substantially level with the height of thefirst and second lead frames and the gap between the submount and thefirst and second lead frames is small (fitted state), that is, when thesubmount and the first and second lead frames are substantially flushwith each other, the efficiency of reflection by the lead frames canalso be improved.

This invention will be explained with reference to the followingexamples.

A light emitting element 10 is a group III nitride-based compoundsemiconductor light emitting element. FIG. 75 is a typical diagramshowing the construction of this element. As shown in FIG. 75, in thelight emitting element 4010, a plurality of group III nitride-basedcompound semiconductor layers are stacked on a sapphire substrate.Specifications of each layer constituting the light emitting element4010 are as follows. Layers Composition p-type semiconductor layerp-GaN:Mg 4015 Layer 4014 including light Including InGaN layer emittinglayer n-type semiconductor layer n-GaN:Si 4013 Buffer layer 4012 AlNSubstrate 11 Sapphire

The n-type semiconductor layer 4013 made of GaN doped with Si as ann-type impurity is formed on the substrate 4011 through the buffer layer4012. In this example, sapphire is used as the substrate 4011. Thematerial for the substrate 4011, however, is not limited to sapphire,and examples of materials usable herein include sapphire, spinel,silicon, silicon carbide, zinc oxide, gallium phosphide, galliumarsenide, magnesium oxide, manganese oxide, and group III nitride-basedcompound semiconductor single crystals. The buffer layer is formed byMOCVD using AlN. The material for the buffer layer, however, is notlimited to AlN, and other materials such as GaN, InN, AlGaN, InGaN andAlInGaN may also be used. For example, a molecular beam epitaxy method(MBE method), a halide vapor-phase epitaxy method (HVPE method),sputtering, ion plating or electron shower may be used for the formationof the buffer layer. When the substrate is made of a group IIInitride-based compound semiconductor, the provision of the buffer layercan be omitted.

The substrate and the buffer layer can be if necessary removed aftersemiconductor element formation.

In this example, the n-type semiconductor layer 4013 is made of GaN.Alternatively, the n-type semiconductor layer 4013 may be made of AlGaN,InGaN or AlInGaN.

Further, the n-type semiconductor layer 4013 has been doped with Si asan n-type impurity. Other n-type impurities usable herein include Ge,Se, Te, and C.

The n-type semiconductor layer 4013 may have a two-layer structure of alow-electron concentration n layer on the side of a layer 4014 includinga light emitting layer and a high electron concentration n+ layer on theside of a buffer layer 12.

The layer 4014 including a light emitting layer may comprise a quantumwell structure (a multiple quantum well structure or a single quantumwell structure), and the structure of the light emitting element may beof single hetero type, double hetero type, and homojunction type.

The layer 4014 including a light emitting layer may also include, on itsp-type semiconductor layer 4015 side, a group III nitride-based compoundsemiconductor layer with a broad bandgap doped with an acceptor such asMg or the like. This can effectively prevent electrons injected into thelayer 4014 including a light emitting layer from diffusing into thep-type layer 4015.

The p-type semiconductor layer 4015 made of GaN doped with Mg as ap-type impurity is formed on the layer 4014 including a light emittinglayer. The p-type semiconductor layer 4015 may also be made of AlGaN,InGaN or InAlGaN. Zn, Be, Ca, Sr, or Ba may also be used as the p-typeimpurity.

Further, the p-type semiconductor layer 4015 may have a two-layerstructure of a low hole concentration p-layer on the side of the layer4014 including a light emitting layer and a high hole concentration p+layer on the electrode side.

In the light emitting diode having the above construction, each groupIII nitride-based compound semiconductor layer may be formed by MOCVDunder conventional conditions, or alternatively may be formed by amethod such as a molecular beam epitaxy method (MBE method), a halidevapor-phase epitaxy method (HVPE method), sputtering, ion plating orelectron shower.

An n-electrode 4018 has a two-layer structure of an Al layer and a Vlayer. After the formation of the p-type semiconductor layer 4015, thep-type semiconductor layer 4015, the layer 4014 including a lightemitting layer, and a part of the n-type semiconductor layer 4013 areremoved by etching, and the n-electrode 4018 is formed by vapordeposition on the n-type semiconductor layer 4013.

A p-electrode 4016 is a gold-containing film and is stacked on thep-type semiconductor layer 4015 by vapor deposition.

After the formation of the individual semiconductor layers andelectrodes by the above steps, the step of isolating chips is carriedout.

As shown in FIG. 76A, the submount 4020 is an insulating sheet-likemember of AlN. Surface electrodes 4021, 4022 are formed on the uppersurface, and backside electrodes 4023, 4024 are formed on the backside.These electrodes 4021, 4022, 4023, and 4024 comprise titanium, Ni, andAu stacked in that order, and continuity is made through a through-hole4025 (filled with an electrically conductive metal).

In the submount 4020 in this example, the surface electrodes 4021, 4022are made conductive to the backside electrodes 4023, 4024 throughthrough-holes. The continuity between these electrodes may also be madeby providing a metal layer (a side metal) on the side face of thesubmount 4020.

An n-electrode in the light emitting element 4010 is electricallyconnected to the surface electrode 4021 through an Au bump 4031, and ap-electrode is electrically connected to the surface electrode 4022through an Au bump 4032. A solder ball may be used instead of the bump.

A groove 4043 and a groove 4044 are formed by cutting on the edge of thefirst lead frame 4041 and the edge of the second lead frame 4042 whichare opposite to each other. The grooves 4043, 4044 have such a form thatboth ends of the submount 4020 can be fitted substantially withoutleaving any gap, whereby the position of the submount 4020 is specified.The first and second lead frames 4041, 4042 and the submount 4020 arefixed with the-aid of solder (such as Sn—Ag-based cream solder) 4035.

In this example, the depth of the groove 4043 and the groove 4044 wasregulated so that the surface of the first and second lead frames 4041,4042 is substantially level with the surface of the submount 4020. Thiscan facilitate the regulation of light (particularly laterally releasedlight) emitted from the light emitting element 4010.

Further, a construction may also be adopted in which the depth of thegroove is increased to reflect light emitted from the light emittingelement 4010 by the side wall of the groove.

Thereafter, as shown in FIG. 77, the light emitting element 4010 iscovered by the sealing member 4051 to prepare a luminescent device 4050of this example. The inclusion of a fluorescent material in the sealingmember 4051 can produce any desired luminescent color such as white. Thesealing member 4051 is properly selected from those transparent to lightemitted from the light emitting element, for example, depending uponapplications of the luminescent device. Examples thereof include organicmaterials such as epoxy resins, polyimides, and silicone elastomers andinorganic materials such as low melting glass. In this example, thesealing member 4051 is molded using an imide resin which can withstandreflow, followed by soldering of the submount 4020 to the first andsecond lead frames 4041, 4042.

Another embodiment of the sealing member 4053 is shown in FIG. 78. Inthis example, the end of the first and second lead frames 4041, 4042 andthe submount 4020 are also covered by the sealing member 4053. Thesealing member 4053 is formed by fixing the submount 4022 into the firstand second lead frames 4041, 4042 and then conducting molding. An epoxyresin may be adopted as the molding material.

In the luminescent device 4050 in this example having the aboveconstruction, heat generated in the light emitting element 4010 isconveyed substantially evenly to the first and second lead frames 4041,4042 through the submount 4020. Accordingly, the heat transfer path issatisfactorily ensured to improve heat dissipation efficiency.

The position of the submount 4020, that is, the position of the lightemitting element 4010, is specified by the groove 4043 and the groove4044. Therefore, stable light distribution characteristics can berealized in the luminescent device.

Variants of each element in this example will be explained. Partsidentical to those shown in FIG. 77 and 78 are identified with the samereference characters, and the explanation thereof will be omitted.

In the example shown in FIG. 80, the groove 4045 in the first lead frame4041 is shorter, and the groove 4046 in the second lead frame 4042 islonger. According to this construction, the member (peripheral wall ofthe groove 4046) of the second lead frame 4042 is located just under thelight emitting element 4010. Thus, the distance from the light emittingelement 4010 to the lead frame is the shortest, and heat can be moreefficiently released from the light emitting element 4010.

In the example shown in FIG. 80, the groove 4047 and the groove 4048 areopen to the side face of the lead frames 4041, 4042. This can furtherfacilitate setting of the submount 4020 in the groove 4047 and thegroove 4048.

In the example shown in FIG. 81, a groove 4049 was formed in the sidedirection of the first lead frame 4041. As can be seen from thisexample, the direction and position of formation of the groove in thelead frame is any direction and position and may be properly selecteddepending upon the applications of the luminescent device.

In the example shown in FIG. 82, concave parts 4061, 4062 are formed onthe front end of the first and second lead frames 4041, 4042 bypressing. As with the embodiment shown in FIG. 76, a submount can be setin the concave parts 4061, 4062.

In the example shown in FIG. 83,

-shaped convexes 4071, 4072 were formed by pressing on the front end ofthe first and second lead frames 4041, 4042. The parts surrounded by theconvexes 4071, 4072 constitute concaves 4073, 4074. As with theembodiment shown in FIG. 76, a submount is set in the concave parts4073, 4074.

FIG. 84 is a cross-sectional view showing the construction of theluminescent device in the thirteenth embodiment. This luminescent device5010 includes a substrate part 5011 as a power supply member, an LEDelement 5012 mounted on the upper surface of the substrate part 5011, abuffer layer 5013 sealed so as to cover the LED element 5012 on theupper surface of the substrate part 5011, and a sealing member 5014formed so as to cover the upper surface of the buffer layer 5013 and thesubstrate part 5011.

The substrate part 5011 includes a ceramic substrate 5011 a (aninsulating substrate) with a high expansion coefficient, wiring layers5011 b, 5011 c, 5011 d and 5011 e formed in a predetermined pattern onthe upper surface of the ceramic substrate 5011 a, wiring layers 5011 f,5011 g formed in a predetermined pattern on the lower surface of theceramic substrate 5011 a, an Au plating film 5011 h covered on thesurface of the wiring layer 11 c, an Au plating film 5011 i covered onthe surface of the wiring layer 5011 d, an Au plating film 5011 jcovered on the surface of the wiring layer 5011 f, an Au plating film5011 k covered on the surface of the wiring layer 5011 g, a through-hole5111 for connecting the wiring layer 5011 b to the wiring layer 5011 f,and a through-hole 5011 m for connecting the wiring layer 5011 d to thewiring layer 5011 g.

The ceramic substrate 5011 a may be made of, for example,glass-containing Al₂O₃ material (coefficient of thermal expansion:13.2×10⁻⁶/° C.). The wiring layers 5011 b, 5011 d, 5011 j, 5011 gfunction as electrodes for supplying electric power. The Au platingfilms 5011 h, 5011 i, 5011 j, 5011 k are provided for improvingconnectivity, electrical conductivity, and corrosion resistance. In thesubstrate part 5011, before mounting the LED element 5012, the wiringlayers 5011 b to 5011 g, the Au plating films 5011 h, 5011 i, 5011 j,the Au plating film 5011 k, and the through-holes 5111, 5011 m should bepreviously formed in the ceramic substrate 5011 a.

For example, the LED element 12 is made of a semiconductor such as GaNor AlInGaP, and the chip size is, for example, 0.3×0.3 mm (standardsize) or 1×1 mm (large size). The buffer layer 5013 is made of asilicone resin. The sealing member 5014 is made of, for example,“K-PSK100” (coefficient of thermal expansion: 11.4×10⁻⁶/° C.)manufactured by Sumita Optical Glass, Inc.

The sealing member 5014 is made of a glass material which is transparentto light and has a low melting point. The LED element 5012 has on itslower surface electrodes 5012 a, 5012 b for power supply, and theelectrodes 5012 a, 5012 b are soldered onto a predetermined wiring layerin the substrate part 11.

Assembling of the luminescent device 10 will be explained.

At the outset, the LED element 5012 is positioned so that the electrodes5012 a, 5012 b are placed on the wiring layers 5011 c, 5011 d in thesubstrate part 5011. The wiring layer 5011 c is soldered to theelectrode 5012 a, and the wiring layer 5011 d is soldered to theelectrode 5012 b.

Next, a liquid silicone resin material is dropped from just above thecenter part of the LED element 5012 for coating in a layer form on theupper surface and the whole side face of the LED element 5012 to form abuffer layer 13.

Next, in such a state that the buffer layer 5013 has been formed, thesubstrate part 5011 and the LED element 5002 are placed in an atmosphereof about 150° C. to subject the buffer layer 5013 to primary curing.

Next, a sealing member 5014 made of a glass material is sealed on thesurface of the buffer layer 5013 and the surface of the substrate part5011. A mold is used for sealing of the sealing member 5014, and moldinginto a semi-circular shape as shown in FIG. 84 is carried out in apredetermined temperature atmosphere by a press. Thus, the luminescentdevice 5010 is completed. During the glass sealing, in the siliconeresin, the chemical bond is broken by heat to form SiO₂. In this case,however, any blackening phenomenon does not occur, and light absorptiondoes not occur.

In the luminescent device 5010 having the above construction, forexample, when the wiring layer 5011 f is located on the anode side ofthe LED element 5012, a positive side of a direct current source (notshown) is connected to the wiring layer 5011 f, and a negative side isconnected to the wiring layer 5011 g. When a forward voltage is appliedto the LED element 12 through the bump 2 electrically connected to a padelectrode 5108 and an n-type electrode 5109, carrier recombination ofhole and electron occurs within the light emitting layer in the LEDelement 5012 resulting in light emission. Output light is radiated tothe outside of the LED element 5012 through the sapphire substrate 5101.This light practically passes through the sealing member 5014 and goesto the outside of the sealing member 5014, and a part of the light isreflected from the inner surface and goes to the outside of the sealingmember 5014.

The following effects can be attained by the thirteenth embodiment.

(1) Sealing of the whole area with the sealing member 5014 made of aglass material can reduce light attenuation caused by yellowing orcoloring which is a problem associated with resin sealing.

(2) The provision of the buffer layer 5013 around the LED element 5012can relax external force which is applied to the LED element 5012through a high viscose glass material at the time of sealing of thesealing member 5014. That is, due to the interposition of the bufferlayer 5013, the LED element 5012 does not come into direct contact withthe sealing member 5014. Therefore, stress produced by heat expansionand heat shrinkage can be absorbed by the buffer layer 13.

(3) Glass sealing of the LED element 5012 through the buffer layer 5013can prevent the occurrence of cracks near the LED element 5012. Theconstruction in which the buffer layer 5013 is provided is particularlyeffective in a large (1 mm×1 mm) LED element 5012 in which the area ofcontact with the sealing member 5014 is large.

(4) Short-circuiting between-electrodes caused by collapse of the bump5002 can be prevented by surrounding the LED element 5012 by the bufferlayer 5013. Further, since the buffer layer 5013 can suppress thebreaking of the bump shape, inclination of the optical axis of the LEDelement 5012 by glass sealing can be prevented.

(5) When the LED element 5012 is formed by scribing a wafer, fineconcaves and convexes are formed on the side face of the scribed LEDelement 5012. In the glass sealing-type luminescent device 5010, theconcaves and convexes cause a stress unequal part, at the interface ofthe LED element 5012 and the sealing member 5014, which is causative ofmicrocracking. In this case, microcracking can be prevented upon heatingshrinkage of the sealing member 5014 by providing a buffer layer 5021 onthe side face as the scribing face of the LED element 5012.

FIG. 85 is a cross-sectional view showing a variant of the luminescentdevice in the thirteenth embodiment. This luminescent device 5020 isdifferent from the luminescent device in the thirteenth embodiment inthat the buffer layer 5021 is provided only on the side face of the LEDelement 5012. This construction also can reduce short-circuitingbetween-electrodes caused by collapse of the bump 5002 and stressattributable to heat shrinkage of the sealing member 5014. Further,since the buffer layer is not provided on the substrate side of the LEDelement 12, the takeout of light emitted from the LED element 5012 isnot inhibited.

FIG. 86 is a cross-sectional view showing a luminescent device in thefourteenth embodiment. A luminescent device 5030 shown in FIG. 86 is ofa face up type and includes a substrate part 31 as a power supplymember, an LED element 5032 mounted on the upper surface of thesubstrate part 31, a buffer layer 5033 sealed so as to cover the wholeLED element 5032, a sealing member 5034 formed so as to cover the uppersurface of the buffer layer 33 and the substrate part 31, and wires 5035a, 5035 b for connecting the electrode on the LED element 5032 to thewiring layer on the substrate part 5031.

The substrate part 5031 includes a ceramic substrate 5031 a as aninsulating substrate using the same material as the substrate part 5011shown in FIG. 84, wiring layers 5031 b, 5031 c formed in a predeterminedpattern on the upper surface of the ceramic substrate 5031 a, wiringlayers 5031 d, 5031 e formed in a predetermined pattern on the lowersurface of the ceramic substrate 5031 a, a through-hole 5031 f forconnecting the wiring layer 5031 b to the wiring layer 5031 d, and athrough-hole 5031 g for connecting the wiring layer 5031 c to the wiringlayer 5031 e. An Au plating film (not shown) is provided on the surfaceof the wiring layers 5031 b to 5031 e.

The ceramic substrate 5031 a may be made of, for example, aglass-containing Al₂O₃ material. The wiring layers 5031 b to 5031 efunction as an-electrode for supplying electric power. Regarding thesubstrate part 5031, before mounting the LED element 5032, the wiringlayers 5031 b to 5031 e and the through-holes 5031 f, 5031 g should bepreviously formed on the ceramic substrate 5031 a. The sealing member5034 is made of a glass material which is transparent to light and has alow melting point.

The LED element 5032 is fixed on the wiring layer 5031 c with the aid ofan adhesive or the like. One electrode (not shown) on the upper surfaceof the LED element 5032 is connected to the wiring layer 5031 b througha wire 5035 a, and the other electrode (not shown) on the upper surfaceof the LED element 5032 is connected to the wiring layer 5031 c througha wire 5035 b.

The buffer layer 5033 is provided so as to cover the exposed surface ofthe LED element 5032 and the wires 5035 a, 5035 b.

The sealing member 5034 is molded in a semispherical shape so as tocover the surface of the buffer layer 5033, and the wiring layer exposedon the upper surface of the substrate part 5031 and a part of theexposed part of the substrate part 5031.

Assembling of the luminescent device 5030 will be explained.

At the outset, the substrate part 5031 comprising the wiring layers 5031b to 5031 e and the through-holes 5031 f, 5031 g formed on the ceramicsubstrate 5031 a is provided. The LED element 5032 is mounted on thewiring layer 5031 c in its predetermined position.

Next, the LED element 5032 is bonded to the wiring layers 5031 b, 5031 cthrough the wires 5035 a, 5035 b.

Next, a liquid silicone material is dropped to a predetermined thicknessso as to cover the exposed face of the LED element 5032 and the wires5035 a, 5035 b.

The LED element 5032 and the wires 5035 a, 5035 b are placed in anatmosphere of about 150° C. to subject the buffer layer 5033 to primarycuring. Thereafter, a sealing member 5034 is formed by molding of aglass material around the buffer layer 5033. Thus, the luminescentdevice 5030 is completed.

In this luminescent device 5030, for example, when the wiring layer 5031d is located on the anode side of the LED element 5032, a positive sideof a direct current source (not shown) is connected to the wiring layer5031 d, and a negative side is connected to the wiring layer 5031 e.Upon energization, the LED element 5032 emits light. This light goes outfrom the upper surface of the LED element 5032 in the drawing. A majorpart of the light is passed through the sealing member 5034 to theoutside of the device, and another part of the light is internallyreflected within the sealing member 5034 and then goes out to theoutside of the sealing member 5034.

In the fourteenth embodiment, the buffer layer 5033 is provided aroundthe LED element 5032 in the luminescent device 5030 on which the LEDelement 5032 is mounted in a face up manner. Therefore, an unfavorablephenomenon can be prevented in which, during sealing of the glassmaterial, the wires 5035 a, 5035 b are deformed or collapsed resultingin short-circuiting between-electrodes. As with the first embodiment,cracking near the LED element 5012 attributable to a high level ofthermal expansion of the sealing member 5034 can be prevented.

For example, when the buffer layer 5033 is not provided, setting thetemperature after glass sealing to a high value causes damage to the LEDelement. Therefore, there is restriction on the temperature, and theglass sealing is carried out in such a state that the glass is highlyviscose. As a result, the application of external force to the wires5035 a, 5035 b is unavoidable, and it is difficult to maintain the wires5035 a, 5035 b in a desired position. For example, when the wire 5035 ais collapsed by pressing of the glass material, the wiring layers 5031 band 5031 c cause short circuiting. In this case, light emission does notoccur, and, in addition, there is an influence on the power supply side(not shown). Incidentally, this problem does not occur in the resinmaterial.

In the face up-type LED element, the presence of the wire as the metalmember on the upper surface per se functions as the buffer material.Disadvantageously, however, the wire collapses leading to an electricalshort-circuiting problem. Therefore, even when any element like thebuffer material is absent, the provision of any electrical shortcircuiting preventive element through the prevention of collapse and thelike is important.

FIG. 87 is a cross-sectional view showing a luminescent device in thefifteenth embodiment of the invention. In this luminescent device 5040,a submount 5043 on which an LED element 5041 is mounted is mounted onlead parts 5044 a, 5044 b. In FIG. 87, the submount is shown in anon-cross-sectional state.

This luminescent device 5040 includes an LED element 5041 in which abump 5042 is provided on the mounting face, a submount 5043 on which theLED element 5041 is mounted, lead parts 5044 a, 5044 b as a power supplymember on which the submount 5043 is mounted, a buffer layer 5045provided so as to cover the exposed face of the LED element 5041, and asealing member 5046 made of light transparent glass to seal the bufferlayer 5045 and the periphery of the buffer layer 5045.

The submount 5043 is made of, for example, AlN (aluminum nitride) with ahigh level of thermal conductivity, and the electrode 5043 a connectedto the bump 5042 is formed on the mounting face side of the LED element5041. An electrode 5043 b connected to a pair of lead parts 5044 a, 5044b is formed on the opposite side (face on the lead frame side). Athrough-hole 5043 c is provided within the submount 5043 to connect theelectrode 5043 a to the electrode 5043 b.

Lead parts 5044 a, 5044 b are formed as a part of the lead frame so asto face each other while providing a predetermined gap therebetween onthe inner side of the strip part on both sides, and a pair of lead partsare allocated to one LED element. A part of the front end part of thelead parts 5044 a, 5044 b is formed in a small thickness so as toprovide a level difference, and the submount 5043 is mounted in thislevel different part.

The buffer layer 5045 is provided based on the same material andprocessing as the buffer layers 5013, 5021 and 5033 shown in theabove-described other embodiments.

As with the above-described other embodiments, the sealing member 5046is made of a glass material which is transparent to light and has a lowmelting point.

In this luminescent device 5040, when the lead part 5044 a is a positive(+) power supply terminal, the current supplied to the lead part 5044 apasses through the lead part 5044 a, one electrode 5043 b, onethrough-hole 5043 c, one electrode 5043 a, and one bump 42 and flows tothe anode of the LED element 5041. The current output from the cathodeof the LED element 41 passes through the other bump 5042, the otherelectrode 5043 a, the other through-hole 5043 c, and the other electrode5043 b and flows to the lead part 5044 b, whereby the LED element 5041emits light.

Assembling of the luminescent device 5040 will be explained.

At the outset, a submount 5043 on which electrodes 5043 a, 5043 b and athrough-hole 5043 c have been previously formed is provided. An LEDelement 5041 is mounted on the submount 5043 in its predeterminedposition through a bump 5042, whereby the LED element 5041 iselectrically connected and mechanically fixed.

Next, the LED element 5041 mounted on the submount 5043 is disposedwithin a recess provided at the front end part of the lead parts 5044 a,5044 b so that energization direction is identical.

Next, a liquid silicone material is dropped to a predetermined thicknessso as to cover the periphery of the LED element 5041.

The LED element 5032, the submount 5043, and the lead parts 5044 a, 5044b are placed in an atmosphere of about 150° C. to perform primarycuring, thereby forming the buffer layer 5045 around the LED element5032.

The glass sheet for forming the sealing member 5045 is disposed on andunder the LED element 5041. Further, a mold is disposed on the upperside and lower side of the LED element 5041.

Next, a glass sheet is molded into a predetermined form by pressingusing the molds in an atmosphere of a predetermined temperature. Thus, aluminescent device 5040 is completed. Finally, the other end of the leadparts 5044 a, 5044 b is separated from the lead frame for isolation intoindividual luminescent devices 5040.

In the fifteenth embodiment, in sealing the LED element 5041 mounted onthe submount 5043 with a high level of thermal conductivity by a glassmaterial, the buffer layer 5045 can prevent cracking or separationaround the LED element 5041 and the submount 5043 due to a difference incoefficient of thermal expansion.

In the luminescent device 5040, a phosphor may be mixed in the bufferlayer 5045. In this case, wavelength conversion takes place based onmixing of excitation light emitted from the phosphor excited by lightemitted from the LED element 5041 with light emitted from the LEDelement 5041. For example, Ce (cerium):YAG (yttrium aluminum garnet),which is excited by blue light emitted from the LED element 5041 andemits yellow light, may be mentioned as the phosphor.

FIG. 88 is a cross-sectional view showing a luminescent device in thesixteenth embodiment of the invention. This luminescent device 5050 hasa construction comprising a heat dissipating member mounted on theluminescent device 5040 shown in FIG. 87. That is, this luminescentdevice is characterized in that a heat dissipating member 5051 using ametallic material having a high level of thermal conductivity such ascopper is mounted on the lower part of the submount 5052 such as AlN.

The luminescent device 5050 includes a heat dissipating member 5051which, functions as a radiator, a submount 5052 mounted on the heatdissipating member 5051, lead parts 5053 a, 5053 b of which the frontend is mounted on a level difference part on both ends of the submount5052, an LED element 5041, which has a pair of bumps 5042 for powersupply on its lower surface and is mounted on the submount 5052, abuffer layer 5054 provided so as to cover the exposed face of the LEDelement 5041, and a sealing member 5055 made of low-melting transparentglass for sealing the buffer layer 5054 and the periphery of the bufferlayer 5054.

The submount 5052 is worked in a small thickness so as to cause a leveldifference in a predetermined range on both ends, and the front end ofthe lead parts 5053 a, 5053 b is mounted on the small thickness part.The front end is connected to the side face of the wiring patterns 5052a, 5052 b by soldering or the like. Further, wiring patterns 5052 a,5052 b in contact with a pair of bumps 5042 are provided on the submount5052 from the upper surface toward the side face.

The buffer layer 5054 has stress buffering and wavelength conversionfunction imparted by mixing a phosphor in a Si-based alkoxide andsintering the mixture to form a phosphor-containing SiO₂ in a porousstate as the buffer layer.

As explained in the fifteenth embodiment, Ce (cerium):YAG (yttriumaluminum garnet) and the like may be used as the phosphor.

The luminescent device 5050 in the sixteenth embodiment may be assembledas explained in the fifteenth embodiment, and, thus, overlappedexplanation thereof will be omitted. That is, after the part above thesubmount 5052 in FIG. 88 is completed, the heat dissipating member 5051may be mounted on the lower face with the aid of an adhesive.

The following effects can be attained by the sixteenth embodiment.

(1) Since the heat dissipating member 5051 for promoting heatdissipation is provided on the lower part of the submount 5052, heatgenerated upon lighting of the LED element 5041 can be efficientlydiffused to the outside of the device, and the occurrence of thermalexpansion and thermal shrinkage upon a temperature rise of the sealingmember 5055 made of a glass material and the like can be suppressed toprevent the occurrence of cracking.

(2) Mixing the phosphor in the buffer layer 5054 can realize wavelengthconversion and, at the same time, can improve light takeout efficiency.

In the above embodiments, a reflecting surface may be formed on thesurface of the substrate parts 5011, 5031 and the lead parts 5044 a,5044 b, 5053 a, 5053 b to enhance light outgoing efficiency.

A method may also be adopted in which a phosphor is mixed in a part ofthe LED elements 5012, 5032 within the sealing members 5014, 5034, thatis, in the upper part of the LED elements 5012, 5032, or a phosphor forwavelength conversion may be mixed in the buffer layers 5013, 5033.

When the buffer layer 5054 is made of a TiO₂-based ceramic material, therefractive index is as high as 2.4. Therefore, efficiency of takeout oflight from the LED element 5041 can be enhanced.

In the above embodiments, one LED element was provided within onesealing member. Alternatively, however, two or more LED elements may beprovided to constitute a multi-emission-type luminescent device. In thiscase, a plurality of LED elements to be mounted may be different fromeach other in emission color, or alternatively the plurality of LEDelements may be identical to each other in emission color. Further,regarding the drive mode of the LED elements, all of the plurality ofLED elements may be connected in parallel, or alternatively a pluralityof LED element groups may be connected in parallel. Further, a pluralityof LED elements may be connected in series, or alternatively all the LEDelements may be connected in series.

Further, “K-PSK100” manufactured by Sumita Optical Glass, Inc. was usedas the sealing member 5014. The sealing member, however, is not limitedto this only and may be other glass so far as the glass can be softenedat such a temperature that can realize sealing without causing thermaldamage to the light emitting element.

In the above embodiments, the form of the sealing members 5014, 5034,5046, 5055 is semispherical. The invention, however, is not limited tothe form shown in the drawings, and any form such as a form not havingany lens part, a polygonal form, or a cylindrical form may be adopted.

Further, in molding the sealing members 5014, 5034, 5046, 5055, themolding method is not limited to pressing using a glass sheet. Othersealing methods, for example, a method in which fused glass is fed to aportion near the LED element and heat molding is carried out in a moldmay be adopted.

Further, the buffer layer 5054 is not always required to be porous andmay be any layer so far as it has cushioning effect, insulatingproperties and heat resistance, for example, it is brittle and absorbsstress, and the coefficient of thermal expansion is intermediate betweenthat of the LED element and that of the sealing glass.

FIG. 89 is a cross-sectional view showing the construction of theluminescent device in the seventeenth embodiment of the invention. Thisluminescent device 6010 includes a substrate part 6011 as a power supplymember, an LED element 6012 which has at least a pair of bumps 6012 a,6012 b for power supply made of Au and is mounted on the upper surfaceof the substrate part 6011, an insulating layer 6013 filled into betweenthe lower face of the LED element 6012 and the substrate part 6011, anda sealing member 6014 formed so as to cover the LED element 6012 and theupper surface of the substrate part 6011.

The substrate part 6011 includes a ceramic substrate 6011 a, wiringlayers 6011 b, 6011 c, 6011 d and 6011 e formed in a predeterminedpattern on the upper surface of the ceramic substrate 6011 a, wiringlayers 6011 f, 6011 g formed in a predetermined pattern on the lowersurface of the ceramic substrate 6011 a, an Au plating film 6011 hcovered on the surface of the wiring layer 6011 c, an Au plating film6011 i covered on the surface of the wiring layer 6011 d, an Au platingfilm 6011 j covered on the surface of the wiring layer 6011 f, an Auplating film 6011 k coated on the surface of the wiring layer 6011 g, athrough-hole 6111 for connecting the wiring layer 6011 b to the wiringlayer 6011 f, and a through-hole 6011 m for connecting the wiring layer6011 d to the wiring layer 6011 g.

The ceramic substrate 6011 a may be made of, for example,glass-containing Al₂O₃ material (coefficient of thermal expansion:13.2×10⁻⁶/° C.). The wiring layers 6011 c, 6011 d, 6011 f, 6011 gfunction as electrodes for supplying electric power. The Au platingfilms 6011 h, 6011 i, 6011 j, 6011 k are provided for improvingconnectivity, electrical conductivity, and corrosion resistance. In thesubstrate part 6011, before mounting the LED element 6012, the wiringlayers 6011 b to 6011 g, the Au plating films 6011 h, 6011 i, 6011 j,the Au plating film 6011 k, and the through-holes 6011 l, 6011 m arepreviously formed in the ceramic substrate 6011 a.

For example, the LED element 6012 is made of a semiconductor such as GaNor AlInGaP, and the chip size is, for example, 0.3×0.3 mm (standardsize) or 1×1 mm (large size). The LED element 6012 has on its lowersurface electrodes 6012 a, 6012 b for power supply, and the electrodes6012 a, 6012 b are soldered to a predetermined wiring layer in thesubstrate part 6011.

The insulating layer 6013 is made of a silicone material, or diamond,BN, SiC or AlN power containing insulating material. When a siliconeresin is used as the silicone material, upon exposure to a hightemperature involved in sealing of the sealing member 6014, the chemicalbond is cleaved to form SiO₂ which functions as a heat resistantinsulator. Instead of SiO₂ formed from the silicone resin, ceramicsformed from Si-based, Ti-based or other alkoxides may also be used. Thediamond has a high level of thermal conductivity. BN, SiC, and AlN areinferior to diamond in thermal conductivity but are more inexpensive.Diamond, BN, and SiC are transparent or white and have a feature of lowlight absorption.

The sealing member 6014 is made of a glass material which is transparentto light and has a low melting point, and, for example, “K-PSK100”manufactured by Sumita Optical Glass, Inc. (coefficient of thermalexpansion: 11.4×10⁻⁶/° C.) may be used. According to an experimentconducted by the inventors, in order to provide good bonding betweenceramic and glass, the ceramic substrate 6011 a and the sealing member6014 should be substantially identical to each other in coefficient ofthermal expansion (the thermal expansion coefficient difference ratiobeing within 15%), and, in this case, the thermal expansion coefficientratio is 0.86.

Assembling of the luminescent device 6010 will be explained.

Positioning is carried out so that bumps 6012 a, 6012 b of Au are put onthe wiring layers 6011 c, 6011 d. The LED element 6012 is provided onthe substrate part 6011, and the insulating layer 13 is then formed, forexample, by dropping or filling.

Next, the LED element 6012, the exposed area of the insulating layer6013, and the exposed area of the substrate part 6011 are sealed withthe sealing member 6014 by the glass material. A mold is used forsealing of the sealing member 6014, and molding into a semicircular formas shown in FIG. 89 is carried out at a predetermined temperatureatmosphere by pressing. In this sealing, the silicone material as theinsulating layer 6013 is converted to SiO₂, and the lower surface of theLED element 6012 and the bumps 6012 a, 6012 b are fixed. Therefore, forexample, the deformation of bumps 6012 a, 6012 b and short-circuitingbetween bumps can be avoided. Thus, the luminescent device 6010 iscompleted.

In this luminescent device 6010, for example, when the wiring layer 6011f is located on the anode side of the LED element 6012, a positive sideof a direct current source (not shown) is connected to the wiring layer6011 f, and a negative side is connected to the wiring layer 6011 g.When a forward voltage is applied to the LED element 6012 through thebump 6002 electrically connected to a p-type electrode and an n-typeelectrode (not shown), in the active layer of the LED element 6012,carrier recombination of hole and electron occurs, resulting in lightemission. Output light is radiated to the outside of the LED element6012. This light practically passes through the sealing member 6014 andgoes to the outside of the sealing member 6014, and a part of the lightis reflected from the inner surface and goes to the outside of thesealing member 6014.

The following effects can be attained by the seventeenth embodiment.

(1) Sealing of the whole area with the sealing member 6014 made of aglass material can reduce light attenuation caused by yellowing orcoloring which is a problem associated with resin sealing.

(2) By virtue of the provision of the heat resistant insulating layer 13on the lower side of the LED element 6012, during sealing of the sealingmember 14, an unfavorable phenomenon can be prevented in which thesealing member 6014 presses in a high temperature state the bumps 6012a, 6012 b to damage the LED element 6012. That is, deformation orbreaking of bumps 6012 a, 6012 b under high temperature and highpressure conditions of the sealing member 14 which causesshort-circuiting between bumps can be prevented.

(3) When a diamond, BN, SiC or AlN powder-containing insulating materialis used, the effect of dissipating heat generated from the LED element6012 can be expected. Therefore, heat dissipating properties can beimproved.

FIG. 90 is a cross-sectional view showing the construction of aluminescent device in the eighteenth embodiment. This luminescent device6020 is of a metal lead type in which a light emitting element ismounted on a lead frame using a submount 6022. The luminescent device6020 includes an LED element 6021 in which bumps 6021 a, 6021 b areprovided on the mounting face, a submount 6022 on which this LED element6021 is mounted, lead parts 6023 a, 6023 b as a power supply member onwhich the submount 6022 is mounted, an insulating layer 6024 filled intobetween the upper surface of lead parts 6023 a, 6023 b and the lowersurface of the LED element 6021, and a sealing member 6025 made of alight transparent glass for sealing the end of the insulating layer 6024and the front end of the lead parts 6023 a, 6023 b including the surfaceof the LED element 6021.

The submount 6022 is made of, for example, AlN (aluminum nitride) with ahigh level of heat conductivity. A wiring layer 6022 a connected to onebump 6021 a is provided on the upper face, side face, and lower face soas to provide a

-shaped form, and, on the opposite side, the wiring layer 6022 bconnected to the bump 6021 b is provided on the upper face, side face,and lower face so as to provide a

-shaped form.

If necessary, the submount 6022 may incorporate a circuit such as aZener diode for element destruction preventive purposes. Further,instead of the wiring layers 6022 a, 6022 b, wiring means comprising acombination of electrodes provided on the upper and lower faces with athrough-hole for communication of the upper and lower electrodes witheach other may be used.

The lead parts 6023 a, 6023 b are made of a copper-based or iron-basedmetal and are provided so as to face each other while providing apredetermined space therebetween on the inner side of the strip part onboth sides as a part of a lead frame (not shown), and a pair of leadparts are provided for each one LED element. A part of the front end ofthe lead parts 6023 a, 6023 b is formed in a small thickness so as toform a level difference, and a submount 6022 is mounted in this leveldifference part.

As with the insulating layer 6013 in the seventeenth embodiment, theinsulating layer 6024 may be made of a silicone material, or a diamondor AlN powder-containing insulating material. For example, the processof conversion of the silicone material to SiO₂ by cleaving of thechemical bond upon sealing of the sealing member 6025, and the heatdissipating effect attained by using a diamond, BN, SiC, or AlNpowder-containing insulating material are the same as those in the caseof the insulating layer 6013.

As with the above embodiments, the sealing member 6025 is made of aglass material which is transparent to light and has a low meltingpoint.

In this luminescent device 6020, when the lead part 6023 a is a positive(+) power supply terminal, current supplied to the lead part 6023 a ispassed through the lead part 6023 a, the wiring layer 6022 a, and thebump 6021 a and flows to the anode of the LED element 6021. Further, thecurrent output from the cathode of the LED element 21 is passed throughthe bump 6021 b and the wiring layer 6022 b and flows to the lead part6023 b, whereby the LED element 6021 emits light.

Assembling of the luminescent device 6020 will be explained.

At the outset, a submount 6022 with wiring layers 6022 a, 6022 bpreviously formed thereon is provided. Bumps 6021 a, 6021 b are formedat predetermined positions on the submount 6022. The LED element 6021 ismounted thereon. The bump 6021 a and bump 6021 b are connected to thewiring layer 6022 a and the wiring layer 6022 b, respectively, forelectrical connection and mechanical fixation.

Next, the LED element 6021 mounted on the submount 6022 is disposedwithin the recess at the front end of the lead parts 6023 a, 6023 b sothat the energization direction is made identical. Alternatively, afterthe LED element 21 is mounted on the submount 6022, the submount 6022may be mounted on the lead parts 6023 a, 6023 b.

Next, a silicone material as the insulating layer 6024 is filled intobetween the lower face of the LED element 6021 and the upper face of thesubmount 6022 (this filling may be carried out before mounting thesubmount 22 on the lead parts 6023 a, 6023 b). In this state, theassembly is carried in the mold. A glass sheet (not shown) for theformation of the sealing member 25 is disposed on and under the LEDelement 6021, and molding into a semispherical shape is carried out at apredetermined temperature by pressing. In this sealing, the siliconematerial is converted to SiO₂ to form an insulating layer 6024 whichfixes the lower face of the LED element 6021 and the bumps 6012 a, 6012b. Therefore, for example, the deformation of bumps 6012 a, 6012 b andshort-circuiting between bumps can be avoided. Thus, the luminescentdevice 6020 is completed. Finally, the other end of the lead parts 6023a, 6023 b is isolated from a lead frame (not shown) into individualluminescent devices 6020.

In the eighteenth embodiment, the use of lead parts 6023 a, 6023 bhaving excellent adhesion to the glass material and the provision of theinsulating layer 6024 on the lower side of the LED element 6021 canavoid damage to the LED element 6021 by the sealing member 6025 at thetime of sealing of the sealing member 6025, and, thus, deformation,movement, short-circuiting or the like in the bumps 6021 a, 6021 b canbe prevented. Further, sealing of the whole assembly with the sealingmember 6025 made of a glass material can prevent light attenuationcaused by yellowing or coloration as in the case where the sealingmember is made of a resin material.

FIG. 91 is a cross-sectional view showing a luminescent device in thenineteenth embodiment. As with the eighteenth embodiment, thisluminescent device 6030 is of a metal lead type in which a lightemitting element is mounted on a lead frame using a submount. Here aswith FIG. 90, only the construction of the principal part is shown, and,further, a submount 6032 is shown in a non-cross sectional state. Thisembodiment is different from the eighteenth embodiment in the structureof the submount and the construction and formation area of theinsulating layer.

This luminescent device 30 includes an LED element 6031 provided withbumps 6031 a, 6031 b on its mounting face, a submount 6032 on which theLED element 6031 is mounted, lead parts 6033 a, 6033 b as a power supplymember in which the submount 6032 is mounted at the front end thereof,an insulating layer 6034 in which a phosphor 6034 a has been mixed andwhich is formed by filling or dropping so as to cover the whole area ofthe LED element 6031, and a sealing member 6035 made of a lighttransparent glass for sealing the front end of the lead parts 6033 a,6033 b including the upper face of the LED element 6031.

The submount 6032 is made of, for example, AlN (aluminum nitride) with ahigh level of thermal conductivity, and electrodes 6032 a, 6032 bconnected to the bumps 6031 a, 6031 b are formed on the mounting faceside of the LED element 6031. Electrodes 6032 c, 6032 d connected to apair of lead parts 6033 a, 6033 b are formed on the opposite face (leadframe side). Through-holes 6032 e, 6032 f are provided within thesubmount 6032 for connection of the electrode 6032 a to the electrode6032 c and connection of the electrode 6032 c to the electrode 6032 d.

The lead parts 6033 a, 6033 b are made of a copper-based or iron-basedmetal and are provided so as to face each other while providing apredetermined space therebetween on the inner side of the strip part onboth sides as a part of a lead frame (not shown), and a pair of leadparts are provided for each one LED element. A part of the front end ofthe lead parts 6033 a, 6033 b is formed in a small thickness so as toform a level difference, and a submount 6032 is mounted in this leveldifference part.

The insulating layer 6034 is composed mainly of a silicone material, anda phosphor 6034 a is mixed in the silicone material. The formationprocess of SiO₂ by cleaving of the chemical bond of the siliconematerial upon sealing of the sealing member 6025, and, for example, theheat dissipating effect attained by using a diamond or AlNpowder-containing insulating material are the same as those in the caseof the insulating layer 6013.

For example, when the LED element 6021 is a blue light emitting element,Ce (cerium):YAG (yttrium aluminum garnet), which is excited by bluelight emitted from the LED element and emits yellow light, is used asthe phosphor 6034 a.

As with the above embodiments, the sealing member 6035 is made of aglass material which is transparent to light and has a low meltingpoint.

In this luminescent device 6030, when the lead part 6033 a is a positive(+) power supply terminal, current supplied to the lead part 6033 a ispassed through the lead part 6033 a, the electrode 6032 c, thethrough-hole 6032 e, the electrode 6032 a, and the bump 6031 a and flowsto the anode of the LED element 6031. Further, the current output fromthe cathode of the LED element 6031 is passed through the bump 6031 b,the electrode 6032 b, the through-hole 6032 f, and the electrode 6032 dand flows to the lead part 6033 b, whereby the LED element 6031 emitslight.

Assembling of the luminescent device 6030 will be explained.

At the outset, a submount 6032 with electrodes 6032 a to 6032 d andthrough-holes 6032 e, 6032 f previously formed thereon is provided.Bumps 6031 a, 6031 b are formed at predetermined positions on thesubmount 6032. The LED element 6031 is mounted thereon, whereby the LEDelement 6031 is electrically connected to the electrodes 6032 a, 6032 bthrough the bumps 6031 a, 6031 b and, at the same time, is mechanicallyfixed.

Next, the LED element 6031 mounted on the submount 6032 is disposedwithin the recess at the front end of the lead parts 6033 a, 6033 b sothat the energization direction is made identical. Alternatively, afterthe submount 6032 is mounted on the lead parts 6033 a, 6033 b, the LEDelement 6031 may be mounted on the submount 6032.

Next, an insulating layer 6034 with a phosphor 6034 a mixed therein isformed so as to extend to the upper face, side face, and upper face ofthe submount 6032 by dropping or filling.

The assembly is carried in the mold. A glass sheet (not shown) for theformation of the sealing member 35 is disposed on and under the LEDelement 6031, and molding into a semispherical shape is carried out at apredetermined temperature by pressing. Thus, the luminescent device 6030is completed. In this sealing, the silicone material is converted toSiO₂ to form an insulating layer 6034 which fixes the lower face of theLED element 6031 and the bumps 6031 a, 6031 b. Therefore, for example,the deformation of bump 6012 a and short-circuiting between bumps can beavoided. Finally, the other end of the lead parts 6033 a, 6033 b isisolated from a lead frame into individual luminescent devices.

The following effects are attained by the nineteenth embodiment.

(1) The provision of the insulating layer 6034 can avoid damage to theLED element 6031 by the sealing member 6035 at the time of sealing ofthe sealing member 6035, and, thus, deformation, movement,short-circuiting or the like in the bumps 6031 a, 6031 b can beprevented.

(2) Since the phosphor 6034 a is mixed in the insulating layer 6034,light absorption by the electrode on the lead part (or the wiring layeron the submount) can be reduced. In general, Au plating is provided onthe electrode and the wiring layer. This Au plating has a high level ofblue or purple light absorption. The provision of the phosphor-mixedinsulating layer 6034, however, can realize wavelength conversion oflight emitted from the side face of the LED element to prevent lightabsorption on the Au plating face.

(3) Wavelength conversion is also possible for light emitted from theupper face of the LED element 6031.

Further, since the whole assembly is sealed with the sealing member 6035made of a glass material, light attenuation caused by yellowing orcoloring, which is a problem in the case where the sealing member is aresin material, can be prevented.

Instead of the submount 6032, a submount 6022 having “

”-shaped wiring layers 6022 a, 6022 b shown in FIG. 90 may be used.Contrary to this, instead of the submount 6022 shown in FIG. 90, thesubmount 6032 shown in FIG. 91 may be used.

FIG. 92 is a plan view showing the bump forming face of an LED elementof a standard size. This LED element 6031 is an LED element having asize of 0.3 mm square and includes a small pattern 6042 with a bump 6041connected to an n-electrode mounted thereon, a large pattern 6043connected to a p-electrode, and bumps 6044 a, 6044 b mounted on thislarge pattern 6043. The higher the output of the LED element 6031 is,the larger the current is. Accordingly, plural bumps are provided on thep-electrode side so as to cope with a large current capacity.

FIG. 93 is a plan view showing the bump forming face of the large-sizeLED element. This LED element 6031 is an LED element having a size of 1mm square and includes a wiring pattern 6054 on which bumps 6052 a, 6052b are provided, and a wiring pattern 6055 on which bumps 6053 a to 6053p are provided. Since the large-size LED element has a larger emissionarea than the standard size, larger current flows. Accordingly, in orderto have uniform light emission on the light emitting face, dependingupon the form, area of the wiring patterns 6054, 6055, for each wiringpattern, plural bumps are provided as electrode contacts.

As shown in FIGS. 92 and 93, in the LED element for electricalconnection through bumps, the bumps are likely to collapse upon exposureto temperature and pressure at the time of glass sealing. In particular,as shown in FIG. 93, when a number of bumps 6053 a to 6053 p areprovided, the distance between bumps is so small that deformation ofbumps is more likely to cause short-circuiting. In this LED element6031, the insulating layer 6034 covers the bump forming face to ensureinsulation between the bumps and can withstand the pressure applied atthe time of glass sealing to suppress the deformation of bumps 6053 a to6053 p. As a result, the sealing member 6035 made of a glass materialcan be formed.

In the above embodiments, the bumps 6012 a, 6012 b are made of Au. Thematerial for the bumps, however, is not limited to Au, and bumps formedby soldering may be used. Further, instead of bumps, solder platingformed in-electrodes may be used. When “K-PSK100” manufactured by SumitaOptical Glass, Inc. is used, sealing is carried out at a temperatureabove 400° C. and the viscosity of glass during processing is so highthat even Au bumps collapse. On the other hand, in the case of a hybridlow-melting glass as an inorganic-organic mixture, sealing at a lowertemperature is possible. As in solder bumps, when the melting point isbelow the sealing temperature, short-circuiting between-electrodesoccurs even at a lower pressure. This invention is effective to overcomethis problem.

Further, in the above embodiments, a phosphor layer for wavelengthconversion may be formed on the upper part of the LED elements 6012,6032 within the sealing members 6014, 6025, 6035.

Furthermore, in the above embodiments, one LED element was providedwithin one sealing member. Alternatively, however, two or more LEDelements may be provided to constitute a multi-emission-type luminescentdevice. In this case, a plurality of LED elements to be mounted may bedifferent from each other in emission color, or alternatively theplurality of LED elements may be identical to each other in emissioncolor. Further, regarding the drive mode of the LED elements, all of theplurality of LED elements may be connected in parallel, or alternativelya plurality of LED element groups may be connected in parallel. Further,a plurality of LED elements may be connected in series, or alternativelyall the LED elements may be connected in series.

In the above embodiments, the sealing members 6014, 6025, 6035 are in adome form. The invention, however, is not limited to the form shown inthe drawings, and any form such as a form not having any lens part, apolygonal form, or a cylindrical form may be adopted.

Further, the method for molding the sealing members 6014, 6025, 6035 isnot limited to the molding method using a glass sheet by pressing, andother sealing methods may also be used.

FIG. 94 is a cross-sectional view showing the construction of aluminescent device in the twentieth embodiment of the invention. Ingeneral, the lead frame is provided with a strip (not shown) to bothsides of which the outer side of each lead part is connected. Ingeneral, plural LED elements are mounted on the lead frame. Here onlyone of the plural LED elements is shown. Further, in FIG. 94, thesubmount is shown in a non-cross sectional state.

The luminescent device 7010 is of a metal lead mounting type andincludes a GaN-based LED element 7001 (coefficient of thermal expansion:4.5 to 6×10⁻⁶/° C.) which is subjected to flip chip bonding through abump 7002 onto the mounting face, a submount 7003 on which the LEDelement 7001 is mounted, lead parts of Cu (coefficient of thermalexpansion 15 to 17×10⁻⁶/° C., thermal conductivity 400 W·m⁻¹·k⁻¹) 7004A,7004B as a power supply member on which the submount 3 is mounted, and asealing member 7005 made of transparent glass for sealing the LEDelement 7001 and the periphery around the LED element 7001.

The submount 7003 is made of, for example, AlN (aluminum nitride:coefficient of thermal expansion 5×10⁻⁶/° C., thermal conductivity 180W·m⁻¹·k⁻¹). Electrodes 7031A, 7031B connected to the bump 7002 areformed on the mounting face side of the LED element 1, and electrodes7032A, 7032B for connection to a pair of lead parts 7004A, 7004B areformed on the opposite face (lead frame side face). The level of themounting face of the LED element 7001 on the upper face of the leadparts 7004A, 7004B is lower by one step than the other part, and thesubmount 7003 is disposed within this recess. A through-hole 7033 isprovided within the submount 7003 for connection of the electrodes7031A, 7031B to the electrodes 7032A, 7032B.

The sealing member 7005 is formed by heat fusing a glass sheet, which istransparent and has a low melting point and a coefficient of thermalexpansion close to the lead parts 7004A, 7004B (or within apredetermined difference in coefficient of thermal expansion), andconstitutes a light transparent glass part for sealing the LED element7001, the submount 7003, and a part of the lead parts 7004A, 7004B.

When the lead part 7004A is a positive (+) power supply terminal,current supplied to the lead part 7004 is passed through a lead part7004A, one of electrodes 7032A, 7032B, one via hole 7033, one ofelectrodes 7031A, 7031B, and one bump 7002 and flows to the anode of theLED element 7001. Further, the current output from the cathode of theLED element 7001 is passed through the other bump 7002, the other one ofthe electrodes 7031A, 7031B, the other via hole 7033, and the other oneof the electrodes 7032A, 7032B and flows to the lead part 704B, wherebythe LED element 7001 emits light.

FIG. 95 is a plan view showing such a state that a submount has beenmounted on a lead frame. The LED element 7001 is mounted at the centerpart of the submount 7003. The lead parts 7004A, 7004B are formed as apart of the lead frame so as to face each other while providing apredetermined gap therebetween on the inner side of the strip part onboth sides, and a pair of lead parts are allocated to one LED element.

FIG. 96 is a diagram showing a state just before glass sealing using amold and is a diagram taken on line A-A of FIG. 95. The method for themanufacture of the luminescent device 7010 will be explained inconjunction with FIGS. 94 to 96.

The LED element 7001 provided with bumps 7002 is positioned on thesubmount 7003, followed by reflow for electrical connection of the bumps7002 to the electrodes 7031 and mechanical fixation.

Next, the LED element 7001 mounted on the submount 7003 is disposedwithin a recess provided at the front end of the lead parts 7004A, 7004Bso that energization direction is identical. A submount in whichelectrodes 7031A, 7031B, electrodes 7032A, 7032B and via holes 7033 havebeen previously formed is used as the submount 7003.

Next, a lead frame 7006 is carried in a mold, and glass sheets 7007,7008 are disposed respectively on and under the LED element 7001. Theglass sheets 7007, 7008 are for sealing member 7005 formation and hassuch a size that a plurality of LED elements 7001 are simultaneouslysealed.

Next, an upper mold 7011 is disposed so as to cover the glass sheet7007. Further, a lower mold 7012 is disposed so as to cover the glasssheet 7008. The glass sheets 7007, 7008 are then heated at 450° C. in avacuum atmosphere for softening, and, in this state, the upper mold 7011and the lower mold 7012 are moved in a direction indicated by an arrowshown in FIG. 95 to apply pressure to the glass sheets 7007, 7008. As aresult, the glass sheets 7007, 7008 are molded into a dome like thesealing member 7005 shown in FIG. 94 along the upper mold 7011 in itsconcave part 7011A and the lower mold 7012 in its concave part 7012A.

Next, unnecessary parts such as the strip part in the lead frame 7004are removed to isolate individual luminescent devices 7010 from the leadframe 7004.

In the luminescent device 7010, when a forward voltage is appliedthrough the bump 7002 electrically connected to the pad electrode 7108and the n-type electrode 7109, carrier recombination of hole andelectron occurs within the active layer in the LED element 7001resulting in light emission. The output light is emitted through thesapphire substrate 7101 to the outside of the LED element 7001. Thisoutput light is then radiated to the outside of the device through thesealing member 7005.

The following effects can be attained by the twentieth embodiment.

(1) Since the whole LED element 7001 having a lower coefficient ofthermal expansion has been sealed with and surrounded by the sealingmaterial 7005 made of a glass material having a larger coefficient ofthermal expansion, the internal stress produced based on a difference incoefficient of thermal expansion is regulated so as to be directed tothe center of the LED element 7001. That is, even when internal stressbased on heat shrinkage of the glass material occurs after glasssealing, the internal stress functions as compressive force directed tothe center direction of the LED element 1. Therefore, the glass materialhaving strength against the compression can realize glass sealingstructure without breaking.

(2) The LED element 7001 having a lower coefficient of thermal expansionis mounted on the submount 7003 having a lower coefficient of thermalexpansion, and the assembly is mounted on the lead parts 7004A, 7004Bhaving a higher coefficient of thermal expansion. Accordingly, for theglass material constituting the sealing member 7005, the adhesion toboth the LED element 7001 having a lower coefficient of thermalexpansion and the lead parts 7004A, 7004B having a higher coefficient ofthermal expansion are required. In this case, a glass material having acoefficient of thermal expansion close to that of the LED element 7001is preferably selected for sealing. The lead parts 7004A, 7004B made ofa soft metal such as Cu is more elastic than the glass material.Therefore, if the difference in coefficient of thermal expansion betweenthe lead parts, and the LED element 1 and the submount 3 is in the rangeof 150% to 400%, then the stress based on the heat shrinkage differencecan be structurally absorbed while maintaining good adhesion to theglass material. This indicates that cracking or other unfavorablephenomenon does not occur even in the case where the lead parts 7004A,7004B are sandwiched by the glass material for sealing.

(3) Even in the case where the electric power applied to the LED element7001 is so large that the temperature of the generated heat is increaseddue to the electric power, the heat generated from the LED element 7001can be released to the outside of the device, whereby a lowering inemission efficiency can be effectively prevented. In particular, thiscan be realized by bringing the thermal conductivity of the submount7003 and the lead parts 7004A, 7004B to not less than 100 W·m⁻¹·k⁻¹.

(4) Since the sealing member 7005 is formed using the low melting glasssheets 7007, 7008, the time necessary for heating can be shortened and,in addition, the use of a simple heating device becomes possible. Thiscan facilitate glass sealing.

(5) A failure such as cracking is less likely to occur duringprocessing. Therefore, a high level of glass sealing properties can bestably maintained for a long period of time, there is no deteriorationin luminescence characteristics even in water and under highly humidconditions, and, thus, excellent durability can be realized for a longperiod of time.

In the first embodiment, a construction using a GaN-based LED element7001 as the LED element 7001 has been explained. However, it should benoted that the LED element is not limited to the GaN-based LED elementand other LED elements may also be used.

Further, in the above embodiments, a construction in which the submount7003 made of AlN is mounted on the lead parts 7004A, 7004B made of Cuhas been explained. Alternatively, for example, a construction may alsobe adopted in which a submount 3 made of Si (coefficient of thermalexpansion 170 W·m⁻¹·k⁻¹) is mounted on a lead part made of brass(coefficient of thermal expansion 106 W·m⁻¹·k⁻¹).

Further, the method for the formation of the sealing member 7005 is notlimited to one in which plural LED elements 7001 and submounts 7003 aresealed at a time with a glass sheet, and a method may also be adopted inwhich a melted glass material is fed to a part around the LED element7001 and the submount 7003 followed by heat pressing using an upper mold7011 and a lower mold 7012 to form the sealing member. Further, theglass material used is also not limited to a transparent glass materialand may be a colored glass material so far as the glass material istransparent to light.

Further, the sealing member 7005 may be in various forms depending uponspecifications or the like. Examples of forms usable herein includeround, elliptical, or quadrilateral forms and, further, forms with orwithout a lens.

In the above twentieth embodiment, the flip chip-type luminescent deviceusing a metal lead as a power supply member has been explained. However,it should be noted that application to other types of luminescentdevices is possible. For example, application to a face up (FU)-typeluminescent devices using wire bonding is possible.

FIG. 97 is a cross-sectional view showing a variant of the luminescentdevice in the twentieth embodiment. The construction of this luminescentdevice 7010 is that, in order to prevent cracking caused by heatexpansion and heat shrinkage of the sealing member 7005, an inclinedpart 7003A is provided by removing a corner part of the submount 7003.The use of this submount 3 can realize a glass sealing luminescentdevice 7010 which, in addition to advantageous effects attained by thetwentieth embodiment, is advantageously less likely to cause cracking.

FIG. 98 is a cross-sectional view showing a face up-type luminescentdevice in the twenty-first embodiment of the invention. This luminescentdevice 7040 includes lead parts 7004A, 7004B as a power supply memberdisposed horizontally on a straight line at the front end whileproviding a space therebetween, a GaN-based LED element 7041 mounted onthe upper face of the front end of the lead part 7004A through anadhesive or the like, a wire 7042 for connecting two electrodes (notshown) on the LED element 7041 to the lead parts 7004A, 7004B, and asealing member 7005 made of a glass material for sealing LED element7041 and the front end part of the lead parts 7004A, 7004B.

The sealing member 7005 is made of a glass material which istransparent, has a low melting point, and has a coefficient of thermalexpansion in a predetermined value range. In particular, in the face uptype, when a wire is used, in the glass sealing, the heat softened wire7042 and wire connection 7042A are likely to be collapsed upon exposureto pressure, and, consequently, for example, short-circuiting is likelyto occur. For this reason, the use of a glass material having the lowestpossible melting point is preferred.

Assembling of the luminescent device 7040 will be explained.

At the outset, in such a state before the separation of the lead frame,the LED element 7041 is mounted on the upper face of the front end ofthe lead part 7004A. Next, one electrode on the upper face of the LEDelement 7041 and the upper face of the lead part 7004A are connected toeach other through a wire 7042, and, further, the other electrode on theupper face of the LED element 7041 and the upper face of the lead part7004B are connected to each other through a wire 7042. Next, asexplained above in connection with the twentieth embodiment, the moldingof the glass material is carried out using a mold to form a sealingmember 7005 having a predetermined shape. Finally, unnecessary parts inthe lead frame 7004 are removed to isolate individual luminescentdevices 7040 from the lead frame 7004.

In FIG. 98, for example, when the lead part 7004A is on the anode side,a positive side of a direct current source (not shown) is connected tothe lead part 7004A, and a negative side is connected to the lead part7004B. Upon this energization, the LED element 7041 emits light. Thislight is emitted from the upper face of the LED element 7041 andpractically passes through the sealing member 7005 and goes to theoutside of the sealing member 7005, and a part of the light isinternally reflected and goes to the outside of the sealing member 7005.

In the twenty-first embodiment, in addition to the advantageous effectsof the twentieth embodiment, even in the case of the face up-typeluminescent device 7040, the occurrence of separation or cracking can beprevented by taking into consideration the values of coefficient ofthermal expansion of the lead parts 7004A, 7004B and the sealing member7005 and using the low melting glass material.

In the above embodiments, a reflecting surface may be formed on thesurface of the lead parts 7004A, 7004B for enhancing light outgoingefficiency.

Further, a wavelength conversion part using a phosphor or the likeexcited by a predetermined wavelength light may be provided within thesealing member 7005 on the upper part of the LED elements 7001, 7042.

In the above embodiments, one LED element was provided within onesealing member. Alternatively, however, two or more LED elements may beprovided to constitute a multi-emission-type luminescent device.Regarding the type of the luminescent device in this case, theconstruction shown in FIG. 94 which is of a flip chip bonding type issuitable. In this case, a plurality of LED elements to be mounted may bedifferent from each other in emission color, or alternatively theplurality of LED elements may be identical to each other in emissioncolor.

Further, regarding the drive mode of the LED elements, all of theplurality of LED elements may be connected in parallel, or alternativelya plurality of LED element groups may be connected in parallel. Further,a plurality of LED elements may be connected in series, or alternativelyall the LED elements may be connected in series.

Further, in the above embodiments, the sealing member 7005 is in asemispherical form having a lens part on its top part. However, itshould be noted that the sealing member 7005 is not limited to the formshown in the drawings, and any form such as a form not having any lenspart, a polygonal form, or a cylindrical form may be adopted.

Furthermore, the glass sheet has been used in molding the sealing member7005. The method for sealing member formation is not limited to themethod using a glass sheet, and other sealing methods may also be used.

FIG. 99 shows a flip chip-type luminescent device in the twenty-secondembodiment of the invention, wherein (a) is a cross-sectional view and(b) a side view as viewed from the right side face of (a). Parts havingthe same construction as those in the twentieth embodiment areidentified with the same reference numerals. The construction of thisluminescent device 7010 is that, as shown in FIG. 99(a), the submountelement 7003 is mounted on a heat dissipating part 7050 made of Cufollowed by integral sealing with a sealing member 7005 made of lowmelting glass. A lens 7005A is provided in the sealing member 7005.

The submount element 7003 is received in a groove part 7051 provided inthe heat dissipating part 7050, and a wiring pattern 7053 provided onits surface and the LED element 7001 in its electrode are electricallyconnected to each other through the bump 7002 to constitute a part ofthe power supply part. After connection to the LED element 7001, thewiring pattern 7053 is soldered to the lead parts 7004A, 7004B made ofCu, a soft metal. As shown in FIG. 99(b), the lead part 7004B is placedin the groove part 7051 through a glass material 7052 which isrectangular in section and is in a rod form, and, in this state ofinsulation from the heat dissipating part 7050, the sealing member 5 isheat pressed. In this case, the lead part 7004A is also treated in thesame manner as in the lead part 7004B. The lead parts 7004A, 7004B areintegrated in such a state that the lead parts 7004A, 7004B areinsulated from the heat dissipating part 7050 by the glass material 7052and sealing member 7005 which have been melted based on heat pressing.

In the twenty-second embodiment, the heat dissipating part 7050 on whichthe submount element 7003 has been mounted is integrally sealed by thesealing member 7005 made of a glass material. Therefore, in addition toadvantageous effects in the first embodiment, the dissipation of heatconveyed from the submount element 7003 can be advantageously enhanced,and, thus, a luminescent device 7001 can be provided in which excellentheat dissipation can be realized in glass sealing, as well as, forexample, in the case where the quantity of heat generated from the LEDelement 7001 by the flow of large current is increased, and packagecracks derived from a thermal expansion coefficient difference are lesslikely to occur.

In the twenty-second embodiment, the construction using the heatdissipating part 7050 made of Cu has been explained. However, othermaterials, which have good thermal conductivity and are small in adifference in coefficient of thermal expansion from the sealing member7005, for example, Cu alloys and aluminum may also be used. When theheat dissipating part 7050 is made of aluminum, the difference incoefficient of thermal expansion between the heat dissipating part 7050,and the LED element 7001 and the submount 7003 is about 500%.

FIG. 100 shows a face up-type luminescent device in the twenty-thirdembodiment of the invention, wherein (a) is a cross-sectional view and(b) a side view as viewed from the right side face of (a). Partsidentical to those in the twenty-first embodiment are identified withthe same reference numerals. In this luminescent device 70040, as shownin FIG. 100(a), the LED element 7040 is bonded to the center of the heatdissipating part 50 made of Cu. Lead parts 7004A, 7004B and the LEDelement 7040 in its electrode for supplying electric power to the LEDelement 7040 are electrically bonded to each other through a wire 7042.The LED element 7040, the wire 7042, and the lead parts 7004A, 7004B arecovered by a silicone coating part 7060 made of a silicone resin so asto withstand heat at the time of low melting glass sealing. The sealingmember 7005 covers the silicone coating part 7060 and, in addition, isintegrated with the heat dissipating part 7050. A lens 7005A is formedin the sealing member 7005.

In the twenty-third embodiment, even in the case of a face up-typeluminescent device 7040, glass sealing while preventing the deformationof the electrode in the LED element 7041 and the wire 7042 caused by thepressure of the glass sealing becomes possible by covering the peripheryof the LED element 7041 with the heat resistant and elastic siliconecoating part 7060. Therefore, a luminescent device 7001 can be realizedwhich, in addition to advantageous effects attained by the twenty-firstembodiment, is excellent in LED element 7041 mounting properties, and,in addition, is good in heat dissipating properties not only duringglass sealing, but also, for example, in the case where the quantity ofheat generated from the LED element 7041 is increased due to the use oflarge current and is less likely to cause package cracking derived froma thermal expansion coefficient difference. Further, the siliconecoating part 7060 may contain a phosphor.

In the twenty-third embodiment, a construction has been explained inwhich electric power is supplied to the LED element 7041 mounted on theheat dissipating part 7050 from a pair of lead parts 7004A, 7004B. Forexample, a construction may also be adopted in which the heatdissipating part 7050 is integrated with one lead part, and the otherlead part is insulated from the heat dissipating part 7050 through aglass material 7052.

In addition to the use of the silicone resin as the coating material,other heat resistant materials such as ceramic coating materials may beused. The construction in which the coating material is applied is notlimited to the face up-type LED element and can be applied to flipchip-type LED elements.

In light emitting elements such as LEDs, when the refractive index ofthe light emitting element is 2 or more, sealing of the element with asealing material with a refractive index of about 1.5 or more canenhance the efficiency of takeout of light from the element by abouttwice or more. In this case, the sealing material should be transparentto light. In photodetectors, this effect cannot be attained, and theeffect attained by intimate contact sealing of the element directly withthe light transparent material is only the effect of reducing reflectionat interface between dissimilar media. Light transparency is notrequired when the element is not an optical element.

In the above embodiments, the sealing material is glass. The sealingmaterial, however, may be one obtained by crystallization after glassprocessing, and may be any inorganic material so far as it has highchemical stability.

INDUSTRIAL APPLICABILITY

As described above, according to the invention, even when a hard glassmaterial of 10⁸ to 10⁹ poises is used, sealing can be carried outwithout damage to solid elements. Therefore, low melting glass can beused, good glass sealing can be realized while reducing thermal loadapplied to the solid elements. The realization of a solid element devicesealed with glass which, as compared with resin materials, requires hightemperature processing and is a hard material that enables the solidelement device to be used in high-temperature environments andenvironments where weathering resistance is required. Further, theadoption of light transparent glass can realize such a high level ofreliability that the light transmittance of the optical device is stableand undergoes no change with the elapse of time. Further, for the solidlight emitting element, when high refractive index glass is selected,the efficiency of takeout of light from the light emitting element canbe improved and, consequently, highly efficient luminescent devices canbe realized.

1-34. (canceled)
 35. A solid element device, comprising: a solid elementbeing flip-chip mounted; an electric power receiving and supplying partfor receiving electric power from and supplying the electric power tosaid solid element; and an inorganic sealing material for sealing saidsolid element.
 36. A solid element device, comprising: a solid element;an electric power receiving and supplying part for receiving electricpower from and supplying the electric power to said solid element; aheat resistant member for covering an electrical connection part and apart of said electric power receiving and supplying part in said solidelement; and an inorganic sealing material for sealing said solidelement including said heat resistant member.
 37. A solid elementdevice, comprising: a solid element; an electric power receiving andsupplying part for receiving electric power from and supplying theelectric power to said solid element; and a glass sealing part forsealing said solid element, said glass sealing part using a low meltingglass selected from SiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based,P₂O₅—ZnO-based, SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-based low meltingglasses.
 38. A solid element device, comprising: a solid element; a leadpart made of a metal for receiving electric power from and supplying theelectric power to said solid element; and an inorganic sealing materialfor sealing said solid element.
 39. The solid element device accordingto claim 38, wherein: said lead part is made of a soft metal.
 40. Thesolid element device according to claim 38, wherein: said lead partcomprises a submount part and a concave part corresponding to saidsubmount part.
 41. The solid element device according to claim 38,wherein: said solid element is surrounded by a member with a highercoefficient of thermal expansion than said solid element.
 42. A solidelement device, comprising: a solid element; an electric power receivingand supplying part comprising an inorganic material substrate forreceiving electric power from and supplying the electric power to saidsolid element; and an inorganic sealing material for sealing said solidelement, said inorganic sealing material having a coefficient of thermalexpansion equivalent to said inorganic material substrate.
 43. The solidelement device according to claim 35, wherein: said inorganic sealingmaterial is an inorganic sealing glass material.
 44. The solid elementdevice according to claim 36, wherein: said inorganic sealing materialis an inorganic sealing glass material.
 45. The solid element deviceaccording to claim 38, wherein: said inorganic sealing material is aninorganic sealing glass material.
 46. The solid element device accordingto claim 42, wherein: said inorganic sealing material is an inorganicsealing glass material.
 47. The solid element device according to claim43, wherein: said inorganic sealing glass material is a low meltingglass selected from SiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based,P₂O₅—ZnO-based, SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-based low meltingglasses.
 48. The solid element device according to claim 44, wherein:said inorganic sealing glass material is a low melting glass selectedfrom SiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based, P₂O₅—ZnO-based,SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-based low melting glasses.
 49. Thesolid element device according to claim 45, wherein: said inorganicsealing glass material is a low melting glass selected fromSiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based, P₂O₅—ZnO-based,SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-based low melting glasses.
 50. Thesolid element device according to claim 46, wherein: said inorganicsealing glass material is a low melting glass selected fromSiO₂—Nb₂O₅-based, B₂O₃—F-based, P₂O₅—F-based, P₂O₅—ZnO-based,SiO₂—B₂O₃—La₂O₃-based and SiO₂—B₂O₃-based low melting glasses.
 51. Thesolid element device according to claim 35, wherein: said electric powerreceiving and supplying part is a metal lead.
 52. The solid elementdevice according to claim 36, wherein: said electric power receiving andsupplying part is a metal lead.
 53. The solid element device accordingto claim 37, wherein: said electric power receiving and supplying partis a metal lead.
 54. The solid element device according to claim 51,wherein: said metal lead is made of a soft metal.
 55. The solid elementdevice according to claim 52, wherein: said metal lead is made of a softmetal.
 56. The solid element device according to claim 53, wherein: saidmetal lead is made of a soft metal.
 57. The solid element deviceaccording to claim 35, wherein: said electric power receiving andsupplying part comprises an inorganic material substrate with anelectrically conductive pattern formed thereon and said inorganicmaterial substrate has a coefficient of thermal expansion equivalent tosaid inorganic sealing material.
 58. The solid element device accordingto claim 36, wherein: said electric power receiving and supplying partcomprises an inorganic material substrate with an electricallyconductive pattern formed thereon and said inorganic material substratehas a coefficient of thermal expansion equivalent to said inorganicsealing material.
 59. The solid element device according to claim 37,wherein: said electric power receiving and supplying part comprises aninorganic material substrate with an electrically conductive patternformed thereon and said inorganic material substrate has a coefficientof thermal expansion equivalent to said inorganic sealing material. 60.The solid element device according to claim 42, wherein: said electricpower receiving and supplying part comprises an inorganic materialsubstrate with an electrically conductive pattern formed thereon andsaid inorganic material substrate has a coefficient of thermal expansionequivalent to said inorganic sealing material.
 61. The solid elementdevice according to claim 57, wherein: said inorganic sealing materialhas a lower coefficient of thermal expansion than said inorganicmaterial substrate.
 62. The solid element device according to claim 58,wherein: said inorganic sealing material has a lower coefficient ofthermal expansion than said inorganic material substrate.
 63. The solidelement device according to claim 59, wherein: said inorganic sealingmaterial has a lower coefficient of thermal expansion than saidinorganic material substrate.
 64. The solid element device according toclaim 60, wherein: said inorganic sealing material has a lowercoefficient of thermal expansion than said inorganic material substrate.65. The solid element device according to claim 57, wherein: saidinorganic material substrate seals said solid element based on chemicalreaction bonding with said inorganic sealing material.
 66. The solidelement device according to claim 58, wherein: said inorganic materialsubstrate seals said solid element based on chemical reaction bondingwith said inorganic sealing material.
 67. The solid element deviceaccording to claim 59, wherein: said inorganic material substrate sealssaid solid element based on chemical reaction bonding with saidinorganic sealing material.
 68. The solid element device according toclaim 60, wherein: said inorganic material substrate seals said solidelement based on chemical reaction bonding with said inorganic sealingmaterial.
 69. The solid element device according to claim 42, wherein:said inorganic sealing material has a coefficient of thermal expansionof not more than 15×10⁻⁶/° C.
 70. The solid element device according toclaim 42, wherein: said inorganic material substrate comprises a metallayer, and said inorganic material substrate and said inorganic sealingmaterial are bonded to each other through an oxide in said metal layer.71. The solid element device according to claim 42, wherein: saidelectrically conductive pattern provided on said inorganic materialsubstrate comprises a pattern provided on said solid element mount side,a pattern provided on the backside of the inorganic material substrateremote from said solid element, and a pattern for electricallyconnecting both sides of the inorganic material substrate to each other.72. The solid element device according to claim 42, wherein: saidinorganic material substrate comprises device dividing grooves formed ona surface thereof.
 73. The solid element device according to claim 42,wherein: said inorganic material substrate is made of glass-containingAl₂O₃, Al₂O₃ or AlN.
 74. The solid element device according to claim 35,wherein: said inorganic sealing material comprises a surface subjectedto coating treatment for rendering the surface resistant to moisture,acids or alkalis.
 75. The solid element device according to claim 36,wherein: said inorganic sealing material comprises a surface subjectedto coating treatment for rendering the surface resistant to moisture,acids or alkalis.
 76. The solid element device according to claim 37,wherein: said inorganic sealing material comprises a surface subjectedto coating treatment for rendering the surface resistant to moisture,acids or alkalis.
 77. The solid element device according to claim 38,wherein: said inorganic sealing material comprises a surface subjectedto coating treatment for rendering the surface resistant to moisture,acids or alkalis.
 78. The solid element device according to claim 42,wherein: said inorganic sealing material comprises a surface subjectedto coating treatment for rendering the surface resistant to moisture,acids or alkalis.
 79. The solid element device according to claim 35,wherein: said solid element is an optical element, and said inorganicsealing material is a transparent material.
 80. The solid element deviceaccording to claim 36, wherein: said solid element is an opticalelement, and said inorganic sealing material is a transparent material.81. The solid element device according to claim 37, wherein: said solidelement is an optical element, and said inorganic sealing material is atransparent material.
 82. The solid element device according to claim38, wherein: said solid element is an optical element, and saidinorganic sealing material is a transparent material.
 83. The solidelement device according to claim 42, wherein: said solid element is anoptical element, and said inorganic sealing material is a transparentmaterial.
 84. The solid element device according to claim 79, wherein:said optical element is a light emitting element.
 85. The solid elementdevice according to claim 80, wherein: said optical element is a lightemitting element.
 86. The solid element device according to claim 81,wherein: said optical element is a light emitting element.
 87. The solidelement device according to claim 82, wherein: said optical element is alight emitting element.
 88. The solid element device according to claim83, wherein: said optical element is a light emitting element.
 89. Thesolid element device according to claim 84, wherein: said opticalelement is sealed by said inorganic sealing material with a refractiveindex of 1.7 or more.
 90. The solid element device according to claim85, wherein: said optical element is sealed by said inorganic sealingmaterial with a refractive index of 1.7 or more.
 91. The solid elementdevice according to claim 86, wherein: said optical element is sealed bysaid inorganic sealing material with a refractive index of 1.7 or more.92. The solid element device according to claim 87, wherein: saidoptical element is sealed by said inorganic sealing material with arefractive index of 1.7 or more.
 93. The solid element device accordingto claim 88, wherein: said optical element is sealed by said inorganicsealing material with a refractive index of 1.7 or more.
 94. The solidelement device according to claim 79, wherein: said optical element is alight receiving element.
 95. The solid element device according to claim80, wherein: said optical element is a light receiving element.
 96. Thesolid element device according to claim 81, wherein: said opticalelement is a light receiving element.
 97. The solid element deviceaccording to claim 82, wherein: said optical element is a lightreceiving element.
 98. The solid element device according to claim 83,wherein: said optical element is a light receiving element.
 99. Thesolid element device according to claim 35, wherein: said inorganicsealing material comprises a surface subjected to coating treatment forreducing reflection at the interface of said inorganic sealing materialand the air.
 100. The solid element device according to claim 36,wherein: said inorganic sealing material comprises a surface subjectedto coating treatment for reducing reflection at the interface of saidinorganic sealing material and the air.
 101. The solid element deviceaccording to claim 37, wherein: said inorganic sealing materialcomprises a surface subjected to coating treatment for reducingreflection at the interface of said inorganic sealing material and theair.
 102. The solid element device according to claim 38, wherein: saidinorganic sealing material comprises a surface subjected to coatingtreatment for reducing reflection at the interface of said inorganicsealing material and the air.
 103. The solid element device according toclaim 42, wherein: said inorganic sealing material comprises a surfacesubjected to coating treatment for reducing reflection at the interfaceof said inorganic sealing material and the air.
 104. The solid elementdevice according to claim 35, wherein: said inorganic sealing materialcomprises a surface overmolded with a resin.
 105. The solid elementdevice according to claim 36, wherein: said inorganic sealing materialcomprises a surface overmolded with a resin.
 106. The solid elementdevice according to claim 37, wherein: said inorganic sealing materialcomprises a surface overmolded with a resin.
 107. The solid elementdevice according to claim 38, wherein: said inorganic sealing materialcomprises a surface overmolded with a resin.
 108. The solid elementdevice according to claim 42, wherein: said inorganic sealing materialcomprises a surface overmolded with a resin.
 109. A method of making asolid element device, comprising: a mounting step of mounting a solidelement on an electric power receiving and supplying part; and a sealingstep of pressing an inorganic sealing material for said solid element inan oxygen barrier atmosphere at a temperature at or above a deformationpoint of said inorganic sealing material to perform sealing.
 110. Themethod of making a solid element device according to claim 109, wherein:said mounting step is conducted by flip mounting.
 111. The method ofmaking a solid element device according to claim 109, wherein: saidmounting step comprises the step of conducting wire bonding and coveringsaid solid element and said wire bonding part by a heat resistantmember.
 112. The method of making a solid element device according toclaim 109, wherein: said sealing step is conducted such that saidinorganic sealing material is processed in a high viscosity state. 113.The method of making a solid element device according to claim 112,wherein: said sealing step is conducted such that said inorganic sealingmaterial is processed under high viscosity conditions of not less than10⁶ poises.
 114. The method of making a solid element device accordingto claim 109, wherein: said electric power receiving and supplying partcomprises an inorganic material substrate on a side of which said solidelement is mounted and to a backside of which an electrode is formed ledout, and it is sealed when a plurality of the solid elements are mountedon said inorganic material substrate and sealed with said inorganicsealing material, and then subjected to isolation.
 115. The method ofmaking a solid element device according to claim 114, wherein: saidinorganic sealing material is a preformed glass.